Multilayer wiring substrate

• US 4,685,033 A
• Filed: 08/23/1985
• Issued: 08/04/1987
• Est. Priority Date: 08/28/1984
• Status: Expired due to Term

• Current Assignee: NEC Corporation
• Original Assignee: NEC Corporation
• Inventors: Inoue, Tatsuo
• Primary Examiner(s): Grimley, Arthur T.
• Assistant Examiner(s): Lau, Jane K.
• Application Number:
  US06/768,755
• Time in Patent Office: 711 Days
• Field of Search: 361/397-398, 361/402, 361/411-412, 361/414, 174/68.5, 29/829, 29/830-831, 333/1
• US Class Current: 361/794
• CPC Class Codes: H01L 23/5383 Multilayer substrates H01L23/5385 takes precedence; multilayer metallisation on monolayer substrates H01L23/538
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/15312 being a pin array, e.g. PGA
• CPC Class Codes: Y10T 29/49124 On flat or curved insulated base, e.g., printed circuit, etc.
• CPC Class Codes: Y10T 29/49128 Assembling formed circuit to base

Abstract

A multilayer wiring substrate is described wherein a plurality of power supply wiring layers for supplying different voltages is arranged in a first group and interlayered with insulation layers and an additional plurality of power supply wiring layers arranged in a second group, each for providing the same voltage as a layer in the first group, is disposed within the same substrate and interlayered with insulation layers. Corresponding wiring layers of the first and second group are interconnected with via-hole wirings. A signal wiring section is disposed on the power supply wiring section. Polyimide layers of insulation separate the wiring layers of the signal wiring section and via-hole wirings include a mixture of gold and polyimide.

Claims

1. A multilayer wiring substrate comprising:

a first power supply wiring layer group having a plurality of first power supply wiring layers for supplying a plurality of different voltages, respectively, and a plurality of first insulating layers for insulating the wiring layers from each other;

a second power supply wiring layer groups having a plurality of second power supply wiring layers, each being in one-to-one correspondence to said plurality of first power supply wiring layers, and a plurality of second insulating layers for insulating the second power supply wiring layers from each other;

a plurality of first via-hole wirings for connecting each of said first power supply wiring layers and a corresponding one of said second power supply wiring layers;

a plurality of terminals provided on the bottom surface of said second power supply wiring layer group;

a plurality of second via-hole wirings for connecting said terminals to said plurality of power supply wiring layers;

a signal wiring layer section having a plurality of thin film signal wiring layers, a plurality of third insulating layers for insulating the signal wiring layers from each other, and a plurality of third via-hole wirings for connecting said signal wiring layers to each other and provided on said first power supply wiring layer group; and

a plurality of internal wirings whose one ends are exposed on the top surface of said signal wiring layer section and whose the other ends are connected to said plurality of first power supply wiring layers.

2. A multilayer wiring substrate as claimed in claim 1, in which the number of said first via-hole wirings connecting one of said first power supply wiring layers to a corresponding one of said second power supply wiring layers is determined depending on a direct current resistance value required for the corresponding power supply wiring layer.

3. A multilayer wiring substrate as claimed in claim 1, in which each of said third insulating layers is made of polyimide.

4. The multilayer wiring substrate as claimed in claim 3, in which each of said third via hole wirings is made of a material including a mixture of gold and polyimide.

5. A multilayer wiring substrate, comprising:

a plurality of insulating layers;

a plurality of power supply wiring layers for supplying power voltages and being interlayered within said insulating layers to form a sandwich having first and second surfaces, said wiring layers being arranged in a first group and a second group, wherein wiring layers in said second group respectively supply voltages corresponding to voltages supplied by wiring layers in said first group;

a plurality of via-hole wirings disposed within said insulating layers and extending to at least one of the first and second surfaces, each wiring layer of the first group being connected to a wiring layer of the second group that supplies a corresponding voltage by said via-hole wirings; and

a plurality of terminals connected to each via-hole wiring that extends to one of the first and second surfaces.

6. A multilayer wiring substrate as claimed in claim 5, and further including:

a signal wiring layer section disposed in contact with said first surface, said section having a plurality of thin film signal wiring layers;

a plurality of second insulating layers interlayered with said signal wiring layers; and

a plurality of second via-hole wirings for connecting said signal wiring layers to each other, for connecting signal wiring layers to said terminals on said first surface and for connecting signal wiring layers to terminals on a surface of said section opposite said first surface.

7. A multilayer wiring substrate, as claimed in claim 6, wherein each of said second insulating layers is composed of polyimide.

8. A multilayer wiring substrate, as claimed in claim 7, wherein each of said second via-hole wirings comprises a mixture of gold and polyimide.

9. A method of increasing the accessibility of a desired power supply terminal of a multilayer wiring substrate, comprising the steps of:

providing a plurality of power supply wiring layers of a first group, each wiring layer of the first group supplying a different voltage;

interlayering said wiring layers of said first group with layers of insulating material;

providing a plurality of power supply wiring layers of a second group, each wiring layer of the second group supplying a voltage corresponding to the voltage supplied by a wiring layer of said first group;

interlayering said wiring layers of said second group with layers of insulating material; and

connecting a via-hole wiring between each wiring layer of the first group and the wiring layer of the second group which supplies the voltage corresponding to the voltage supplied by the wiring layer of the first group.