Pressure measuring system

• US 4,687,927 A
• Filed: 10/23/1985
• Issued: 08/18/1987
• Est. Priority Date: 12/13/1984
• Status: Expired due to Term

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Ishimura, Takiji, Kawakami, Osamu, Tashiro, Ikuo, Iwamoto, Katsuharu, Miyagawa, Hideo
• Primary Examiner(s): LaRoche, Eugene R.
• Assistant Examiner(s): Mottola, Steven J.
• Application Number:
  US06/790,501
• Time in Patent Office: 664 Days
• Field of Search: 250/227, 250/231 P, 250/231 R, 250/229, 73/705
• US Class Current: 250/227.21
• CPC Class Codes: G01L 9/0077 for measuring reflected light

Abstract

A pressure measuring system wherein light is transmitted from a light source via a first optical fiber to a pressure-receiving diaphragm having a reflecting surface which undergoes a deflection in relation to the pressure being measured. The diaphragm reflects light transmitted thereto to a second optical fiber which transmits the reflected light to a first photosensitive element. A reference optical fiber is arranged approximately coextensive to the first and second optical fibers and transmits light from the light source in round trip fashion along substantially the same path as light transmitted by the first and second optical fibers to a second photosensitive element. The photosensitive elements produce respective electrical signals which are applied to an operational circuit which eliminates variations in the amount of light due to external disturbances by dividing one electrical signal by the other. With such a construction, it is possible to have a pressure measuring system which is unaffected by electromagnetic induction accompanying large currents and high voltages, which enables more accurate and more sensitive pressure measurements.

Claims

1. A prssure measuring system for measuring pressure, comprising:

a light source;

a first optical fiber means for transmitting a light beam from the light source;

a pressure-receiving diaphragm having a reflecting surface for reflecting light rays transmitted by the first optical fiber means, wherein said reflecting surface undergoes a deflection in relation to the pressure to be measured;

a second optical fiber means for transmitting light reflected from the pressure-receiving diaphragm;

a reference optical fiber means arranged substantially coextensive with said first and second optical fiber means for transmitting a beam from the light source in round trip fashion along substantially the same path as travelled by light transmitted by said first and second optical fiber means;

a sensor head having a first turning section for joining an end section of the first optical fiber means and an end section of the second optical fiber means with a sealed spaced in-between such that said end sections face the reflecting surface of said pressure-receiving diaphragm, said sensor head further having a second turning section for turning light transmitted by said reference optical fiber means;

a first photosensitive element for converting the reflected light transmitted by said second optical fiber means into an electrical output signal;

a second photosensitive element for converting light beam transmitted by said reference optical fiber means into an electrical output signal; and

operational means for eliminating the variations in the amount of light due to external disturbances based on the electrical output signal from said first and said second photosensitive elements and for producing a corresponding output.

3. A pressure measuring system according to claim 1, further comprising:

output adjusting means for establishing a linear relationship between the output of the operational means and the measured pressure.

4. A pressure measuring system as claimed in claim 1, in which said first turning section comprises means for imparting an angle with respect to a normal to said reflecting surface to at least one of optical fiber means such that light is reflected to said second optical fiber means even when there is no deformation of said diaphragm.

5. A pressure measuring system as claimed in claim 4, in which said space in-between said end sections of said first and second optical fiber means is kept in a vacuum state.

6. A pressure measuring system as claimed in claim 1, in which said second turning section is a wall surface of said sensor head having a mirror surface finishing.

7. A pressure measuring system as claimed in claim 6, wherein said reference optical fiber means comprises:

an optical fiber; and

a coupler installed in said reference optical fiber for branching light reflected from said second turning section to the second photosensitive element.

8. A pressure measuring system as claimed in claim 1, further comprising:

two couplers installed in said first and second optical fiber means, one of the couplers being installed in the vicinity of the sensor head in order to branch off light between the first and second optical fiber means at the sensor head, the other coupler provided for branching the reflected light to the first photosensitive element.

9. A pressure measuring system as claimed in claim 7, further comprising:

two couplers installed in said first and second optical fiber means, one of the couplers being installed in the vicinity of the sensor head in order to branch off light between the first and second optical fiber means at the sensor head, the other coupler provided for branching the reflected light to the first photosensitive element.

10. A pressure measuring system as claimed in claim 4, in which said space in-between said end sections of said first and second optical fiber means is filled with an inert gas.

2. A pressure measuring system for measuring pressure at the section to be measured, comprising:

a light source;

a first optical fiber means for transmitting light from the light source;

a pressure-receiving diaphragm having a reflecting surface for reflecting light transmitted by the first optical fiber means, wherein said diaphragm underoges a deflection in relation to the pressure to be measured;

a second optical fiber means for receiving light reflected off the diaphragm and for transmitting the received reflected light from the pressure-receiving diaphragm;

a sealed enclosure surrounding paths of optical communication between the reflecting surface and end sections of said first and second optical fiber means;

a photosensitive element for converting the reflected light transmitted by the second optical fiber means into an electrical signal;

output means for producing an output signal corresponding to the measured pressure based at least in part on said electrical signal;

wherein at least one of said first and second optical fiber means are arranged at an angle set with respect to the normal to said reflecting surface so that light is reflected to said second optical fiber means even where there is no deformation of said diaphragm;

a reference optical fiber means arranged substantially coextensive with said first and seocnd optical fiber means for transmitting light from said light source to the vicinity of said diaphragm in round trip fashion along substantially the same path as light transmitted via said first and second optical fiber means;

said reference optical fiber means comprising a single optical fiber having an end section in the vicinity of said diaphragm;

means for reflecting light transmitted by said reference optical fiber from said light source to said end section back towards said light source;

another photosensitive element; and

a coupler means inserted in said reference optical fiber for branching light reflected back by said reflecting means in said reference optical fiber to said second photosensitive element, said another photosensitive element producing an electrical output signal which is coupled to said output means, said output means producing said output signal based on the electrical output signals from both said photosensitive elements.