Position detecting device and method

• US 4,688,088 A
• Filed: 04/15/1985
• Issued: 08/18/1987
• Est. Priority Date: 04/20/1984
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Hamazaki, Bunei, Ayata, Naoki
• Primary Examiner(s): Britton, Howard W.
• Assistant Examiner(s): Peng, John K.
• Application Number:
  US06/723,459
• Time in Patent Office: 855 Days
• Field of Search: 358/101, 358/107, 356/400, 356/401, 382/8, 382/18, 382/51
• US Class Current: 348/94
• CPC Class Codes: B23Q 15/22 Control or regulation of position of tool or workpiece
• CPC Class Codes: G03F 9/7076 Mark details, e.g. phase grating mark, temporary mark
• CPC Class Codes: G03F 9/7088 Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Abstract

An improved method and device for detecting a position of a mark formed on an object, by providing plural peaks in an image density distribution, wherein the image of the object having the mark is picked up to provide an image signal which in turn is processed to provide an integrated image-density distribution of the image in a predetermined direction and wherein the position of the mark is detected on the basis of the plural peaks in the integrated image-density distribution.

Claims

1. A device for detecting a mark having edges, said device comprising:

image pickup means for picking up an image of the mark and producing an image signal corresponding thereto;

extracting means having an extracting level for extracting a component from the image signal, each extracted component having a predetermined relation to the extracting level; and

control means for controlling the extracting level in accordance with the width and the number of the signal components extracted, so as to obtain signals corresponding to the edges of the mark.

2. A device according to claim 1, wherein said image pickup means includes an area sensor having plural picture elements and signal forming means adapted to accumulate the outputs of said picture elements in a predetermined direction to thereby form the image signal.

3. A device according to claim 1, wherein said extracting means is arranged for binary-coding the image signal with respect to the extracting level to thereby extract the signal component.

4. A device according to claim 1, wherein said control means is arranged first to temporally determine the extracting level in accordance with a total width of the signal component extracted, and then to determine the extracting level in accordance with the number of the extracted signal components.

5. A method for detecting a mark having edges, the method comprising the steps of:

picking up an image of the mark and producing an image signal corresponding thereto;

extracting a component from the image signal, each extracted component having a predetermined relation with an extracting level; and

controlling the extracting level in a first operation so that a signal component substantially of a predetermined width is obtained as a result of extraction with the controlled extracting level, and then controlling the extracting level in a second operation so that a predetermined number of signal components is obtained as a result of extraction with the controlled extracting level, such that signals corresponding to the edges of the mark are obtained by the extraction.

6. A method according to claim 5, further comprising the step of detecting a position of the mark on the basis of the signals corresponding to the edges of the mark, when a signal component of substantially the predetermined width and of the predetermined number is obtained.