Pedestal-type microlens fabrication process

• US 4,689,291 A
• Filed: 08/30/1985
• Issued: 08/25/1987
• Est. Priority Date: 08/30/1985
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Sprague, Robert A., Popovic, Zoran D., Connell, G. A. Neville
• Primary Examiner(s): Kittle, John E.
• Assistant Examiner(s): Dees, Jose G.
• Application Number:
  US06/771,089
• Time in Patent Office: 725 Days
• Field of Search: 430/321, 430/323, 430/324, 430/330, 430/394, 350/417
• US Class Current: 430/321
• CPC Class Codes: G03F 7/001 Phase modulating patterns, e.g. refractive index patterns
• CPC Class Codes: Y10S 359/90 Methods

Abstract

Monolithic microlenses and microlens arrays are manufactured on opto-electronic devices and other substrates by using sharp edge pedestals to confine the lateral flow of a molten lens material. The lens material wets the upper surfaces of the pedestals, but the pedestal edges confine the flow, so the lens material conforms to the shape of the pedestal surface and assumes a semi-arcuate profile due to its surface tension. Spin coating and photolithographic patterning may be employed to form the pedestals and to deposit the lens material thereon. The lens material is melted after being deposited, so the pedestals advantageously are stabilized to prevent them from deforming at the temperature of the molten lens material.

Claims

1. A method for fabricating microlenses comprising the steps of

depositing an optically opaque coating on a substrate;

forming an aperture through said coating, said aperture having predetermined lateral dimensions;

forming a pedestal on said coating, with said pedestal being substantially laterally centered on said aperture;

said pedestal having an upper surface of predetermined area and shape, with said surface having an outer circumference bounded by a sharp edge drop off;

freely flowing a predetermined equilibrium volume of molten lens forming material laterally on said surface, said lens forming material being selected to wet said surface as it flows thereacross, and said volume being selected so that said flow is laterally confined circumferentially of said surface by said edge, thereby causing said molten lens forming material to substantially conform to the shape of said surface and to assume a semi-arcuate profile of substantially constant radius as determined by its volume; and

solidifying said lens forming material to form a microlens having said shape and profile, together with an aperture defined by the aperture formed through said coating.

2. The method of claim 1 wherein

said substrate is an opto-electronic device.

3. The method of claim 1 wherein

said aperture is one of a plurality of substantially identical apertures which are formed through said coating at laterally distributed locations;

said pedestal is one of a plurality of substantially identical pedestals which are laterally centered on respective ones of said apertures;

substantially equal volumes of said molten lens forming material are provided for each of said pedestals to freely flow laterally on the upper surface thereof, said volumes each being substantially equal to said equilibrium volume;

whereby an array of laterally distributed microlenses having substantial identical shapes, profiles and apertures is formed.

4. The method of claim 1 wherein said pedestal is formed by the additional steps of

overcoating said opaque coating with a photoresist of predetermined thickness, and

photolithographically patterning said photoresist to form said pedestal.

5. The method of claim 4 further comprising the step of

thermally stabilizing said pedestal sufficiently to prevent deformation thereof by said molten lens material.

6. The method of claim 4 wherein said lens forming material is an optical resin which is introduced by the additional steps of

overcoating said pedestal with a coating of said optical resin, said optical resin coating having a predetermined thickness,

photolithographically patterning said optical resin coating to reduce it to said predetermined equilibrium volume and to spatially confine said volume to the upper surface of said pedestal laterally inwardly from said edge,

melting said volume of said optical resin to cause it to freely flow laterally on said surface, so that it substantially conforms to the shape thereof and assumes said profile.

7. The method of claim 6 wherein

said substrate is an opto-electronic device.

8. The method of claim 4 wherein

said aperture is one of a plurality of substantially identical apertures which are formed through said optically opaque coating at laterally distributed locations;

the photolithographic patterning of said photoresist forms a plurality of pedestals, each laterally centered on a respective one of said apertures, and all substantially identical to said pedestal;

substantially equal volumes of said molten lens forming material are provided for each of said pedestals to freely flow laterally on the upper surface thereof, said volumes each being substantially equal to said equilibrium volume;

whereby an array of laterally distributed microlenses having substantially identical shapes, profiles and apertures is formed.

9. The method of claim 8 wherein said lens forming material is an optical resin which is introduced by the additional steps of

depositing an overcoating of said optical resin on said pedestals, said optical resin coating having a predetermined thickness,

photolithographically patterning said optical resin to reduce it to a plurality of laterally distributed volumes, each supported on the upper surface of a respective one of said pedestals laterally inwardly of said edge, and each substantially equal to said equilibrium volume, and

melting said volumes to cause each of them to flow laterally on the surface upon which it is supported,

thereby causing said optical resin volumes to assume substantially identical shapes and profiles.

10. The method of claim 9 wherein

said substrate is an opto-electronic device,

whereby said microlens array is monolithically fabricated as an integrated component of said opto-electronic device.