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Pedestal-type microlens fabrication process

  • US 4,689,291 A
  • Filed: 08/30/1985
  • Issued: 08/25/1987
  • Est. Priority Date: 08/30/1985
  • Status: Expired due to Term
First Claim
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1. A method for fabricating microlenses comprising the steps ofdepositing an optically opaque coating on a substrate;

  • forming an aperture through said coating, said aperture having predetermined lateral dimensions;

    forming a pedestal on said coating, with said pedestal being substantially laterally centered on said aperture;

    said pedestal having an upper surface of predetermined area and shape, with said surface having an outer circumference bounded by a sharp edge drop off;

    freely flowing a predetermined equilibrium volume of molten lens forming material laterally on said surface, said lens forming material being selected to wet said surface as it flows thereacross, and said volume being selected so that said flow is laterally confined circumferentially of said surface by said edge, thereby causing said molten lens forming material to substantially conform to the shape of said surface and to assume a semi-arcuate profile of substantially constant radius as determined by its volume; and

    solidifying said lens forming material to form a microlens having said shape and profile, together with an aperture defined by the aperture formed through said coating.

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