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Pressure sensor

  • US 4,691,573 A
  • Filed: 06/16/1986
  • Issued: 09/08/1987
  • Est. Priority Date: 06/16/1986
  • Status: Expired due to Term
First Claim
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1. A fluid filled pressure transducer for measuring the pressure of an external fluid comprising:

  • a sensor body having a substantially planar backup surface;

    a flexible diaphragm having a radially outer portion in sealed relationship with the backup surface of the sensor body;

    a variable volume fluid chamber defined by the backup surface and the diaphragm;

    a sensor chamber formed in the sensor body and in fluid communication with the variable volume fluid chamber;

    a pressurized, compressible working fluid contained in the fluid and sensor chambers;

    means mounted in the sensor chamber for sensing variations in the density of the working fluid within the sensor chamber;

    an enclosure cover attached to the sensor body and enclosing the flexible diaphragm;

    an isolation diaphragm having a radially outer portion secured to said enclosure cover, said isolation diaphragm and enclosure cover forming a isolation chamber in fluid communication with said flexible diaphragm; and

    a substantially incompressible isolation fluid contained in the isolation chamber whereby pressure exerted upon the isolation diaphragm is communicated by said isolation fluid to said flexible diaphragm.

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