Capacitance transducer
First Claim
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1. A capacitance type pressure transducer for converting fluid pressure into electrical signals representative of a magnitude of pressure, comprising:
- housing means having a pressure measuring chamber with an input orifice for receiving a pressure input to be measured and with a flexible diaphragm for displacement with respect to a first axis as a function of pressure where said first axis is transverse with respect to said diaphragm;
first inner and outer support means in said housing means for respectively supporting first inner and first outer annular electrode plate means on said housing means and on said diaphragm where said plate means are in a first plane transverse to said first axis, said inner support means including a central cylindrical support member;
second support means in said housing means including an annular disc having upper and lower surfaces, and said disc having centrally located upper and lower bearing surfaces;
second inner and outer annular electrode plate means on said lower surface in a second plane transverse to said first axis and in a facing and spaced relationship to said first inner and first outer annular electrode plate means; and
interconnecting means for interconnecting said first inner support means and said second support means to one another including an annular temperature compensating ring means attached to said central cylindrical member, a lower support ring attached to said ring means and bearing on a lower bearing surface of said second support means, an upper annular support ring bearing on an upper bearing surface of said second support means, and rod member means extendable through openings in said upper annular support ring, said annular disc for interconnecting said upper annular support ring and said annular disc to said lower support ring.
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Abstract
A capacitance transducer construction for borehole pressure measurements where the support for one of the capacitor plates sets is mounted in an independent structure which is attached through a temperature compensating means to the support for the other capacitor plates for eliminating stress effects. Electron bonding of materials having graduated coefficients of friction is utilized to minimize stress effects.
31 Citations
9 Claims
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1. A capacitance type pressure transducer for converting fluid pressure into electrical signals representative of a magnitude of pressure, comprising:
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housing means having a pressure measuring chamber with an input orifice for receiving a pressure input to be measured and with a flexible diaphragm for displacement with respect to a first axis as a function of pressure where said first axis is transverse with respect to said diaphragm; first inner and outer support means in said housing means for respectively supporting first inner and first outer annular electrode plate means on said housing means and on said diaphragm where said plate means are in a first plane transverse to said first axis, said inner support means including a central cylindrical support member; second support means in said housing means including an annular disc having upper and lower surfaces, and said disc having centrally located upper and lower bearing surfaces; second inner and outer annular electrode plate means on said lower surface in a second plane transverse to said first axis and in a facing and spaced relationship to said first inner and first outer annular electrode plate means; and interconnecting means for interconnecting said first inner support means and said second support means to one another including an annular temperature compensating ring means attached to said central cylindrical member, a lower support ring attached to said ring means and bearing on a lower bearing surface of said second support means, an upper annular support ring bearing on an upper bearing surface of said second support means, and rod member means extendable through openings in said upper annular support ring, said annular disc for interconnecting said upper annular support ring and said annular disc to said lower support ring. - View Dependent Claims (2, 3, 4, 5)
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6. A capacitance type pressure transducer for converting fluid pressure into electrical signals representative of a magnitude of pressure, comprising:
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housing means having a pressure measuring chamber with an input orifice for receiving a pressure input to be measured and with a flexible diaphragm for displacement with respect to a first axis as a function of pressure where said first axis is tranverse with respect to said diaphragm; first inner and outer support means in said housing means for respectively supporting first inner and first outer annular electrode plate means on said housing means and on said diaphragm where said plane means are in a first plane transverse to said first axis, said inner support means including a central cylindrical support member; second support means in said housing means including an annular disc having upper and lower surfaces, and said disc having centrally located upper and lower bearing surfaces; second inner and outer annular electrode plate means on said lower surface in a second plane transverse to said first axis and in a facing and spaced relationship to said first inner and first outer annular electrode plate means; and interconnecting means for interconnecting said first inner support means and said second support means to one another including an annular temperature compensating ring means attached by electron bonding to said central cylindrical member, an intermediate ring member attached by electron bonding to said compensating ring means, a lower support ring attached to said intermediate ring member and bearing on a lower bearing surface of said second support means, an upper annular support ring bearing on an upper bearing surface of said second support means, and rod member means extendable through openings in said upper annular support ring, said annular disc for interconnecting said upper annular support ring and said annular disc to said lower support ring, said intermediate ring member having a nickel content intermediate of the nickel content in said compensating ring means and said lower support ring. - View Dependent Claims (7, 8)
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9. A capacitance type pressure transducer for converting fluid pressure into electrical signals representative of a magnitude of pressure, comprising:
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housing means having a pressure measuring chamber with an input orifice for receiving a pressure input to be measured and with a flexible diaphragm for displacement with respect to a first axis as a function of pressure where said first axis is transverse with respect to said diaphragm; first inner and first outer support means in said housing means for respectively supporting first inner and outer annular electrode plate means on said housing means and on said diaphragm where said plate means are in a first plane transverse to said first axis, said inner support means including a central cylindrical support member; second support means in said housing means including an annular disc having upper and lower surfaces, and said disc having centrally located upper and lower bearing surfaces; second inner and outer annular electrode plate means on said lower surface in a second plane transverse to said first axis and in a facing and spaced relationship to said first inner and first outer annular electrode plate means; interconnecting means for interconnecting said first inner support means and said second support means to one another including an annular temperature compensating ring means attached by electron bonding to said central cylindrical member, intermediate ring member attached by electron bonding to said compensating ring means, a lower support ring attached to said intermediate ring member and bearing on a lower bearing surface of said second support means, an upper annular support ring bearing on an upper bearing surface of said second support means, and rod member means extendable through openings in said upper annular support ring, said annular disc for interconnecting said upper annular support ring and said annular disc to said lower support ring, said intermediate ring member having a coeficient of expansion intermediate of the coefficient of expanses for said compensating ring means and said lower support ring.
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Specification