Differential plane mirror interferometer
First Claim
1. A differential plane mirror interferometric system comprising:
- a pair of plane mirrors separable by a variable optical path length;
source means for emitting an input beam comprising two stabilized orthogonally polarized optical frequencies;
tilted parallel plate means optically coupled to said input beam for converting said input beam into two separated parallel orthogonally polarized beams;
means optically disposed in the path of one of said two separated parallel orthogonally polarized beams for converting said two separated parallel orthogonally polarized beams into two separated parallel beams having the same polarization;
means optically coupled to said two separated parallel same polarized beams for causing one of said two separated parallel same polarized beams to be reflected twice by one of said pair of plane mirrors and the other of said two separated parallel same polarized beams to be reflected by the other of said pair of plane mirrors to produce two parallel output beams having the same polarization;
means optically disposed in the path of one of said two separated same polarized parallel output beams for converting said two separated same polarized parallel output beams into two separated orthogonally polarized parallel output beams;
means optically coupled to said two separated parallel orthogonally polarized output beams for converting said two separated parallel orthogonally polarized output beams into a single output beam having a pair of orthogonally polarized frequency components, with a phase difference therebetween being directly proportional to said variable optical path length between said pair of plane mirrors;
means optically coupled to said single output beam for mixing said orthogonally polarized components thereof and producing an electrical measurement signal therefrom; and
means operatively connected to said electrical measurement signal for extracting said difference in phase from said electrical measurement signal, said extracted phase difference being proportional to said variable optical path length between said pair of plane mirrors;
whereby an optical configuration extremely insensitive to measurement error and misalignment is provided for said interferometric system, said tilted parallel plate means comprising a first set of regions of reflection, antireflection and polarizing coatings, said means for converting said two separated parallel orthogonally polarized output beams into said single output beams comprising said first set of regions and coatings on said tilted parallel plate means, said tilted parallel plate means further comprising a second set of regions of reflection, antireflection and polarization coatings, said second set of regions and coatings comprising said input beam converting means.
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Abstract
A differential plane mirror interferometric comprises a source (10) which emits a light beam containing two linear orthogonally polarized components; a tilted parallel plate (16) having regions of reflection, antireflection and polarization coatings for converting the input beam into two separated, parallel, orthogonally polarized beams; a half-wave retardation plate (29A, 29) located in one of the separated beams for converting said two separated, parallel, orthogonally polarized beams into two separated parallel beams with the same polarization; means including a polarizing beamsplitter (44), for causing each of the separated parallel beams with the same polarization to be reflected twice by one of two plane mirrors (71, 70) to produce two parallel output beams with the same polarization; a half-wave retardation plate (29B, 29) located in one of the separated parallel output beams, with the tilted parallel plate (16) having regions of reflection, antireflection and polarization coatings for converting the two separated parallel orthogonally polarized output beams into a single output beam in which the phase difference between the two polarization components of the single output beam is directly proportional to the optical path length between the two plane mirrors (70, 71); a polarizer (81) for mixing the orthogonal components of the output beam; a photoelectric detector (83) to produce the measurement signal; and an electronic module (90) to indicate the phase difference which is directly proportional to the changes in the optical path length between the two plane mirrors.
35 Citations
33 Claims
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1. A differential plane mirror interferometric system comprising:
- a pair of plane mirrors separable by a variable optical path length;
source means for emitting an input beam comprising two stabilized orthogonally polarized optical frequencies;
tilted parallel plate means optically coupled to said input beam for converting said input beam into two separated parallel orthogonally polarized beams;
means optically disposed in the path of one of said two separated parallel orthogonally polarized beams for converting said two separated parallel orthogonally polarized beams into two separated parallel beams having the same polarization;
means optically coupled to said two separated parallel same polarized beams for causing one of said two separated parallel same polarized beams to be reflected twice by one of said pair of plane mirrors and the other of said two separated parallel same polarized beams to be reflected by the other of said pair of plane mirrors to produce two parallel output beams having the same polarization;
means optically disposed in the path of one of said two separated same polarized parallel output beams for converting said two separated same polarized parallel output beams into two separated orthogonally polarized parallel output beams;
means optically coupled to said two separated parallel orthogonally polarized output beams for converting said two separated parallel orthogonally polarized output beams into a single output beam having a pair of orthogonally polarized frequency components, with a phase difference therebetween being directly proportional to said variable optical path length between said pair of plane mirrors;
means optically coupled to said single output beam for mixing said orthogonally polarized components thereof and producing an electrical measurement signal therefrom; and
means operatively connected to said electrical measurement signal for extracting said difference in phase from said electrical measurement signal, said extracted phase difference being proportional to said variable optical path length between said pair of plane mirrors;
whereby an optical configuration extremely insensitive to measurement error and misalignment is provided for said interferometric system, said tilted parallel plate means comprising a first set of regions of reflection, antireflection and polarizing coatings, said means for converting said two separated parallel orthogonally polarized output beams into said single output beams comprising said first set of regions and coatings on said tilted parallel plate means, said tilted parallel plate means further comprising a second set of regions of reflection, antireflection and polarization coatings, said second set of regions and coatings comprising said input beam converting means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
- a pair of plane mirrors separable by a variable optical path length;
Specification
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- Resources
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Current AssigneeZygo Corporation (Ametek Incorporated)
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Original AssigneeZygo Corporation (Ametek Incorporated)
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InventorsSommargren, Gary E.
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Primary Examiner(s)Willis, Davis L.
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Assistant Examiner(s)Turner, S. A.
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Application NumberUS06/873,423Time in Patent Office460 DaysField of Search356/349, 356/351, 356/358US Class Current356/487CPC Class CodesG01B 2290/70 Using polarization in the i...G01B 9/02018 Multipass interferometers, ...G01B 9/02057 by using common path config...G01J 9/0215 by shearing interferometric...
