Device for automatically transporting disk shaped objects

• US 4,695,215 A
• Filed: 01/02/1985
• Issued: 09/22/1987
• Est. Priority Date: 05/25/1982
• Status: Expired due to Term

• Current Assignee: Ernst Leitz Wetzlar GmbH (ACM Project Development Co.)
• Original Assignee: Ernst Leitz Wetzlar GmbH (ACM Project Development Co.)
• Inventors: Jacoby, Hans-Dieter, Schmidt, Peter
• Primary Examiner(s): Werner, Frank E.
• Assistant Examiner(s): Underwood, Donald W.
• Application Number:
  US06/688,419
• Time in Patent Office: 993 Days
• Field of Search: 414/222, 414/223, 414/225, 414/744 R, 414/744 B, 414/749, 414/752, 414/331, 414/416, 198/486, 198/339, 198/468.4, 198/346.2
• US Class Current: 414/223.01
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers
• CPC Class Codes: Y10S 414/136 including wafer orienting means
• CPC Class Codes: Y10S 414/137 including means for charging or discharging wafer cassette

Abstract

Device for the automatic transport of disk shaped objects from a discharge cassette adjustable in height through a position adjusting station to an inspection table and further into depository cassettes which are also adjustable in height in a step-wise manner. According to the invention, between the discharge cassette and the position adjusting station a linearly displaceable transport arm gripping the disk shaped objects eccentrically and between the position adjusting station and the inspection table a pivoting lever again gripping the disk shaped objects eccentrically, and within the working range of the pivoting lever additionally on a rotating plate a slide displaceable to and from in the radial direction and gripping the disk shaped objects eccentrically, are provided and the depository cassettes are arranged with their orifices at the circumference of the rotating disk.

Claims

1. A device for operating on disk shaped objects comprising a disk cassette, means for adjusting the height of said cassette, a position adjusting station, an inspection station, and means for automatically transporting said disk shaped objects along a path from said disk cassette through said position adjusting station to said inspection station and from said inspection station to a receiving cassette, said transporting means comprising:

a linearly displaceable transport arm mounted between said disk cassette and said position adjusting station and extendable into said disk cassette from the side facing said position adjusting station, said transport arm being laterally spaced from and extending parallel to a center line of said path along which said disk shaped objects are transported from said cassette to said position adjusting station;

means on said linearly displaceable transport arm for eccentrically gripping one of said disk shaped objects;

means at said position adjusting station for centrally gripping the bottom of a disk shaped object;

a pivotal lever having a working range between said position adjusting station and said inspection station; and

means of said pivotal lever for eccentrically gripping one of said disk shaped objects.

2. A device according to claim 1, wherein the disk cassette, the position adjusting station and the inspection table are linearly aligned with each other during transfer of a disk shaped object and wherein said pivoting lever has a pivoting axle which coincides with the alignment.

3. A device according to claim 1, wherein all of said eccentrically gripping means are positioned for engaging the bottom sides of the disk shaped objects.

4. A device according to claim 3, wherein all of said eccentrically gripping means comprise suction nozzles.

5. A device according to claim 1, wherein said pivoting lever is adjustable in height and has at least two arms of fixed, equal length, and wherein said eccentrically gripping means comprises separately actuatable suction nozzles associated with each of said arms.

6. A device according to claim 1, wherein said inspection table is a part of a separate inspection instrument.

7. A device according to claim 1, wherein the system comprises a plurality of modules including:

a first module comprising said means for adjusting the height of said disk cassette, said position adjusting station, said transport arm and said pivoting lever; and

another module comprising said inspection station.

8. A device according to claim 7, wherein a common base plate is provided to support the modules in a mutually aligned configuration.

11. A device according to claim 1, wherein said transport arm which is extendable into said disk cassette is formed sufficiently flat that it can be extended between two adjacent disk shaped objects in said cassette without contacting either of the two adjacent disk shaped objects.

12. A device according to claim 5, wherein said two arms are directed at an angle of 180°

to each other.

9. A system for operating on disk shaped objects comprising a disk cassette, means for adjusting the height of said cassette, a position adjusting station, an inspection table, and means for automatically transporting said disk shaped objects along a path from said disk cassette through said position adjusting station to said inspection station and from said inspection station to a receiving cassette, said transporting means comprising:

a linearly displaceable transport arm laterally spaced from and extending parallel to a center line of said path along which said disk shaped objects are transported, said transport arm being movable between said disk cassette and said position adjusting station;

a guide for said transport arm laterally spaced from and extending parallel to said path from said disk cassette past said position adjusting station, said transport arm entering said disk cassette from the side facing said position adjusting station;

means on said linearly displaceable transport arm for eccentrically gripping one of said disk shaped objects;

a pivotal lever having a working range between said adjusting station and said inspection station; and

means on said pivotal lever for eccentrically gripping one of said disk shaped objects.

10. A system for operating on disk shaped objects comprising a disk cassette, means for adjusting the height of said cassette, a position adjusting station, an inspection table, and means for automatically transporting said disk shaped objects along a path from said disk cassette through said position adjusting station to said inspection station and from said inspection station to a receiving cassette, said transporting means comprising:

a linearly displaceable transport arm laterally spaced from and extending parallel to a center line of said path along which said disk shaped objects are transported, said transport arm being movable between said disk cassette and said position adjusting station;

means on said linearly displaceable transport arm for eccentrically gripping one of said disk shaped objects;

means at said position adjusting station for centrally gripping the bottom of a disk shaped object;

a pivotal lever having a working range between said position adjusting station and said inspection station;

means on said pivotal lever for eccentrically gripping one of said disk shaped objects; and

means extensible into the working range of said pivotal lever for receiving a disk-shaped object from said pivotal lever and transporting the received disk-shaped object to said receiving cassette.