Heating oven

• US 4,695,707 A
• Filed: 08/12/1985
• Issued: 09/22/1987
• Est. Priority Date: 10/06/1984
• Status: Expired due to Fees

• Current Assignee: Kineticon Limited
• Original Assignee: Keneticon Limited
• Inventors: Young, David N.
• Primary Examiner(s): Goldberg, E. A.
• Assistant Examiner(s): Donovan, Lincoln
• Application Number:
  US06/764,971
• Time in Patent Office: 771 Days
• Field of Search: 219/209, 219/385, 219/386, 219/391, 219/392, 219/394, 219/402, 219/475, 219/521, 324/73 AT, 324/158 F, 324/73 PL, 342/242
• US Class Current: 219/392
• CPC Class Codes: C30B 33/00 After-treatment of single crystals or homogeneous polycrystalline material with defined structure C30B31/00 takes precedence

Abstract

A heating oven for use in ageing semiconductors comprises a heating chamber 5 for receiving a number of trays 10 of semiconductors. Each tray 10 can be passed into the heating chamber 5 and ejected from the heating chamber 5, without disturbing the temperature environment of the remaining trays 10 in the heating chamber 5. This is achieved by the provision of closeable openings 13 on the wall 11 of the heating chamber 5 through which trays 10 may be passed.

Claims

1. A heating oven for testing of semiconductors comprising:

a heating chamber for receiving a plurality of containers, said containers having a first portion for receiving semiconductors to be tested and a second portion containing test control apparatus for said semicondutors;

the chamber having a wall in the form of a heat barrier, said heat barrier defining apertures at spaced intervals to allow independent passage therethrough of each of said containers between a first position in which the portion for receiving semiconductors is fully out of the chamber and a second position in which the portion for receiving semiconductors is fully in the heating chamber;

wherein a portion of each said container intermediate said first and second portions porvides a closure which forms a heat barrier for a corresponding aperture in the second position of said container.

2. A heating oven as claimed in Claim 1, wherein a further portion of each said container provides a closure which forms a heat barrier for a corresponding aperture in the first position of said container.

3. A heating oven as claimed in Claim 1, wherein each container is provided with drive means for moving said container between said first and second portions.

4. A heating oven as claimed in Claim 1, wherein electrical connections are provided to each of the containers independently, the electrical connections being maintained irrespective of the position of the containers.