Apparatus and method for opto-electronic package
First Claim
1. In the process of making an opto-electronic package for ranging devices having a substrate, a die with electronic components and radiation detectors thereon, a plurality of lenslets with a mask therebetween mounted adjacent the die and a transparent cover adjacent the lenslets and mask and attached to the substrate so that radiation is directed by the lenslets to the detectors and not the electronic components, the improvement comprising:
- constructing the lenslets in the cover on one side.
1 Assignment
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Accused Products
Abstract
An opto-electronic package in which the cover of the package is made so as to have the optical components including lenslets, filters and masks as part thereof so that the assembly of the package may be simplified and that problems associated with different indices of thermal expansion among the parts is reduced.
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Citations
19 Claims
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1. In the process of making an opto-electronic package for ranging devices having a substrate, a die with electronic components and radiation detectors thereon, a plurality of lenslets with a mask therebetween mounted adjacent the die and a transparent cover adjacent the lenslets and mask and attached to the substrate so that radiation is directed by the lenslets to the detectors and not the electronic components, the improvement comprising:
constructing the lenslets in the cover on one side. - View Dependent Claims (2, 3, 17)
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4. The method of constructing an opto-electronic package for ranging devices comprising the steps of:
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(1) forming a plurality of lenslets in a transparent cover. (2) mounting a die with electronic components and radiation detectors thereon to a substrate, and (3) mounting the cover to the substrate so that the lenslets direct radiation to the detectors and not to the electronics components. - View Dependent Claims (5, 6, 18)
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7. An opto-electronic package for ranging devices comprising:
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a substrate; a die having electronic components and radiation detectors thereon attached to the substrate; and a transparent cover having a plurality of lenslets formed therein and attached to the substrate so that the lenslets direct radiation to the detectors. - View Dependent Claims (8, 9, 10, 11, 19)
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12. A cover of transparent material for an opto-electronic package comprising:
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a plurality of lenslets formed by a diffusion process on one side of the cover; and an opaque material formed around the lenslets. - View Dependent Claims (13, 14)
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15. The method of constructing a cover for an opto-electronic package comprising the steps of:
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(1) depositing a metal layer on one side of the cover, (2) depositing a photoresist layer over the metal layer, (3) exposing the photoresist to a predetermined pattern of light, (4) developing the photoresist to soften the predetermined pattern, (5) washing the rest away in the soft spots, (6) etching the metal away in the exposed areas to leave spots in the pattern where lenslets are to be formed, (7) forming the lenslets in the pattern by a diffusion process, (8) removing the remaining metal, and (9) repeating steps (1)-(6) to form a mask. - View Dependent Claims (16)
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Specification