Pressure sense recognition control system
First Claim
1. A pressure sense recognition control system for controlling the driving of an object, said system comprising:
- pressure detection means mounted on the object for detecting the distribution, in a plane, of the components of a force in three selected directions of a rectangular coordinate system, said detection means including a plurality of pressure sensor modules, each said module having at least one pressure sensor cell having a pressure sensing member made of single crystal silicon, said pressure sensing member having a pressure receiving surface lying in the plane for receiving the force, and a plurality of diffusion type strain gauges provided on at least one surface of said pressure sensing member which is substantially perpendicular to said pressure receiving surface for detecting the three force components in the three directions applied to said pressure receiving surface, said strain gauges being electrically connected to constitute at least one bridge circuit for producing detection signals indicative of the amplitude of the three force components;
signal processing and storing means for deriving the detection signals from said pressure detection means sequentially, for converting said detection signals into pressure sense detection data, and for storing the converted pressure sense detection data corresponding to each said pressure receiving surface for each of said component forces in the three directions;
primary arithmetic operation and storage means for processing said pressure detection data derived from said signal processing and storing meansin accordance with a predetermined basic arithmetic/logic operation algorithm to obtain basic pressure data and for storing said basic pressure data;
secondary arithmetic operation and storage means for processing said basic pressure data read out from said primary arithmetic operation and storage means and said pressure sense detection data read from said signal processing and storing means in accordance with a predetermined pressure recognition algorithm to obtain pressure sense recognition data and for storing said pressure recognition data;
tertiary arithmetic operation and storage means responsive to command data from an external control means for controlling the drive of said object for processing said pressure sense detection data read out from said signal processing and storing means, said basic pressure data read out from said primary arithmetic operation and storage means and said pressure sense recognition data read out from said secondary arithmetic operation and storage means in accordance with a predetermined control algorithm to obtain control data required to control the drive of the object and for outputting said control data to the external control means; and
data communication means for communicating data between said tertiary arithmetic operation and storage means and the external control means.
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Accused Products
Abstract
A pressure sense recognition control system having at least one pressure sensor module for detecting the two-dimensional distribution of the component forces in the three directions in the rectangular coordinate system of a force applied to the pressure receiving surface of the pressure sensor modules. The pressure sensor module has at least one pressure sensor cell having a pressure sensing member made of single crystal silicon, and a plurality of diffusion type strain gauges provided on the surfaces of the pressure sensing member which are substantially perpendicular to the pressure receiving surface and for detecting the three component forces applied to the pressure surfaces in response to the changes of an output of a bridge composed of the strain gauges. These members are mounted on an object, the drive of which is to be controlled. The detection signals derived from the pressure sensor module are processed and converted into pressure sense detection data corresponding to the pressure surfaces for each of the component forces. The data is further processed to produce pressure sense recognition data. Data for controlling the drive of the object is obtained from the pressure sense recognition data.
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Citations
38 Claims
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1. A pressure sense recognition control system for controlling the driving of an object, said system comprising:
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pressure detection means mounted on the object for detecting the distribution, in a plane, of the components of a force in three selected directions of a rectangular coordinate system, said detection means including a plurality of pressure sensor modules, each said module having at least one pressure sensor cell having a pressure sensing member made of single crystal silicon, said pressure sensing member having a pressure receiving surface lying in the plane for receiving the force, and a plurality of diffusion type strain gauges provided on at least one surface of said pressure sensing member which is substantially perpendicular to said pressure receiving surface for detecting the three force components in the three directions applied to said pressure receiving surface, said strain gauges being electrically connected to constitute at least one bridge circuit for producing detection signals indicative of the amplitude of the three force components; signal processing and storing means for deriving the detection signals from said pressure detection means sequentially, for converting said detection signals into pressure sense detection data, and for storing the converted pressure sense detection data corresponding to each said pressure receiving surface for each of said component forces in the three directions; primary arithmetic operation and storage means for processing said pressure detection data derived from said signal processing and storing meansin accordance with a predetermined basic arithmetic/logic operation algorithm to obtain basic pressure data and for storing said basic pressure data; secondary arithmetic operation and storage means for processing said basic pressure data read out from said primary arithmetic operation and storage means and said pressure sense detection data read from said signal processing and storing means in accordance with a predetermined pressure recognition algorithm to obtain pressure sense recognition data and for storing said pressure recognition data; tertiary arithmetic operation and storage means responsive to command data from an external control means for controlling the drive of said object for processing said pressure sense detection data read out from said signal processing and storing means, said basic pressure data read out from said primary arithmetic operation and storage means and said pressure sense recognition data read out from said secondary arithmetic operation and storage means in accordance with a predetermined control algorithm to obtain control data required to control the drive of the object and for outputting said control data to the external control means; and data communication means for communicating data between said tertiary arithmetic operation and storage means and the external control means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A pressure sense recognition control system for controlling the driving of an object, said system comprising:
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pressure detection means mounted on the object for detecting the distribution, in a plane, of the components of a force in three selected directions of a rectangular coordinate system, said detection means including a plurality of pressure sensor modules, each said module having at least one pressure sensor cell having a pressure sensing member made of single crystal silicon, said pressure sensing member having a pressure receiving surface for receiving the force, and a plurality of diffusion type strain gauges provided on at least one surface of said pressure sensing member which is substantially perpendicular to said pressure receiving surface for detecting the three force components in the three directions applied to said pressure receiving surface, said strain gauges being electrically connected to constitute at least one bridge circuit for producing detection signals indicative of the amplitide of the three force components; temperature detector means for detecting the temperature of said modules and producing temperature-representative analog signals; and signal processing and storing means for deriving the detection signals from said pressure detector means sequentially, for converting said detection signals into pressure sense detection data, and for storing the converted pressure sense detection data corresponding to said pressure receiving surface for each of said component forces in the three directions;
wherein;each said bridge circuit and said temperature detector means is associated with a respective characteristic address composed of a first address part and a second address part; and said signal processing and storing means comprise; a plurality of connecting lines each associated with a respective second address part; first analog switches associated with the first address parts and each connected between a respective bridge circuit or said temperature detector means and a respective connecting line for selectively connecting each said bridge circuit and said temperature detector means to a respective connecting line; second analog switches associated with the second address parts and connected to the connecting lines; an address generator for sequentially generating successive ones of the first and second parts of the characteristic addresses; a first switch driver connected between said first analog switches and said address generator for actuating each first analog switch in response to generation of its assoiated first address part; a second switch driver connected between said second analog switches and said address generator for actuating each second analog switch in response to generation of its associated second address part; analog/digital converter means connected to said second analog switches for converting into digital signals the analog signals produces by each bridge circuit or said temperature detector means when said first analog switch associated therewith is actuated and said second analog switch whose associated connecting line is connected to an actuated first analog switch is also actuated; and microprocessor means connected to said digital/analog converter means for inserting the digital signals from said converter means into predetermined arithmetic operation equations, performing computations according to the equations, and compensating the digital signals derived from the analog signals produced by said bridge circuits on the basis of the digital signals derived from the temperature-representative analog signals. - View Dependent Claims (34, 35, 36)
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37. A pressure sense recognition control system for controlling the driving of an object, said system comprising:
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pressure detection means mounted on the object for detecting the distribution, in a plane, of the components of a force in three selected directions of a rectangular coordinate system, said detection means including a plurality of pressure sensor modules, each said module having at least one pressure sensor cell having a pressure sensing member made of single crystal silicon, said pressure sensing member having a pressure receiving surface for receiving the force, and a plurality of diffusion type strain gauges provided on at least one surface of said pressure sensing member which is substantially perpendicular to said pressure receiving surface for detecting the three force components in the three directions applied to said pressure receiving surface, said strain gauges being electrically connected to constitute at least one bridge circuit for producing detection signals indicative of the amplitude of the three force components; a plurality of temperature detectors each associated with a respective cell for detecting the temperature of said cell and producing temperature-representative analog signals; and signal processing and storing means for deriving the detection signals from said pressure detector means sequentially, for converting said detection signals into pressure sense detection data, and for storing the converted pressure sense detection data corresponding to said pressure receiving surface for each of said component forces in the three directions;
wherein;each said bridge circuit and each said temperature detector is associated with a respective characteristic address composed of a first address part and a second address part, and each said bridge circuit includes two first connecting lines; and said signal processing and storing means comprise; a plurality of second connecting lines each associated with a respective second address part, with one first connecting line of each said bridge circuit being connected to a respective second connecting line; first analog switches each associated with a respective first address part and each connected between a respective temperature detector and a respective second connecting line for selectively connecting each said temperature detector to a respective second connecting line; a plurality of switching diodes each having an anode connected to the other first connecting line of a respective bridge circuit and a cathode connected to a respective second connecting line; with those of said second connecting lines which are connected to those of said one first connecting line, said diode and said first analog switch which are associated with the same cell having the same second address part; second analog switches associated with the second address parts and connected to the second connecting lines; an address generator for sequentially generating successive ones of the first and second parts of the characteristic addressess; a first switch driver connected between said first analog switches and said address generator for actuating each first analog switch in response to generation of its associated first address part; a second switch driver connected between said second analog switches and said address generator for actuating each second analog switch in response to generation of its associated second address part; analog/digital converter means connnected to said second analog switches for converting the analog signals produced by each respective bridge circuit and said temperature detector into digital signals when the first analog switch associated with said temperature detector is actuated and said second analog switches connected to the actuated first analog switch and to said diode and one first connecting line of the same cell are actuated; and microprocessor means connected to said digital/analog converter means for inserting the digital signals from said converter means into predetermined arithmetic operation equations, performing computations according to the equations, and compensating the digital signals derived from the analog signals produced by said bridge circuits on the basis of the digital signals derived from the temperature-representative analog signals. - View Dependent Claims (38)
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Specification