Non-crystalline semiconductor solar battery and method of manufacture thereof
First Claim
1. A method of manufacturing a non-crystalline semiconductor solar battery, comprising:
- (a) forming a transparent conductive film on an insulating transparent substrate, said transparent conductive film defining a first electrode;
(b) forming a non-crystalline semiconductor film on said transparent conductive film;
(c) detecting pinholes existing in said non-crystalline semiconductor film;
(d) applying a laser beam in a reducing atmosphere through pinholes detected in step (c) to portions of said transparent conductive film located at positions of said pinholes such that said portions of said transparent conductive film are caused to have a high resistance by reduction, and(e) forming a metal film on said non-crystalline semiconductor film, said metal film defining a second electrode.
1 Assignment
0 Petitions
Accused Products
Abstract
The invention involves (1) forming a transparent conductive film on an insulating transparent substrate, with the transparent conductive film defining a first electrode, (2) forming a non-crystalline semiconductor film on the transparent conductive film, (3) detecting any pinholes existing in the non-crystalline semiconductor film, (4) applying a laser beam in a reducing atmosphere through the detected pinholes to portions of the transparent conductive film located at portions of the pinholes, such that the portions of the transparent conductive film located at positions at which the pinholes are present are caused to have a high resistance by reduction, and (5) finally forming a metal film on the non-crystalline semiconductor film to define a second electrode.
-
Citations
12 Claims
-
1. A method of manufacturing a non-crystalline semiconductor solar battery, comprising:
-
(a) forming a transparent conductive film on an insulating transparent substrate, said transparent conductive film defining a first electrode; (b) forming a non-crystalline semiconductor film on said transparent conductive film; (c) detecting pinholes existing in said non-crystalline semiconductor film; (d) applying a laser beam in a reducing atmosphere through pinholes detected in step (c) to portions of said transparent conductive film located at positions of said pinholes such that said portions of said transparent conductive film are caused to have a high resistance by reduction, and (e) forming a metal film on said non-crystalline semiconductor film, said metal film defining a second electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A method of manufacturing a non-crystalline semiconductor solar battery, comprising:
-
(a) forming a transparent conductive film on an insulating transparent glass substrate, said transparent conductive film defining a first electrode; (b) forming a non-crystalline semiconductor film on said transparent conductive film; (c) detecting pinholes existing in said non-crystalline semiconductive film by (i) applying monochromatic light to said non-crystalline semiconductive film such that said light passes through said non-crystalline semiconductive film, said transparent conductive film, and said insulating transparent substrate, and (ii) employing a photosensor disposed in close contact with a surface of said insulating transparent substrate to detect and measure said light after it has passed through said insulating transparent substrate and to generate signals representing bright spots in said light, (d) applying a laser beam in a reducing atmosphere comprising hydrogen through pinholes detected in step (c) to portions of said transparent conductive film located at positions of said pinholes such that said portions of said transparent conductive film are caused to have a high resistance by reduction, said laser beam matching the light absorbance characteristics of said transparent conductive film, said laser beam being automatically applied responsive to said signals generated by said photosensor, and (e) forming a metal film on said non-crystalline semiconductor film, said metal film comprising a second electrode.
-
Specification