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Pressure sensor assembly

  • US 4,703,658 A
  • Filed: 06/18/1986
  • Issued: 11/03/1987
  • Est. Priority Date: 06/18/1986
  • Status: Expired due to Fees
First Claim
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1. A pressure sensor assembly comprising:

  • a base having top and bottom external surfaces each having central and surrounding peripheral portions;

    a diaphragm with a peripheral portion thereof hermetically bonded to said base top surface peripheral portion and forming a reference pressure cavity between said diaphragm and said base top surface;

    said base and diaphragm together comprising a pressure transducer having electrical characteristics which vary in response to sensed pressure altering the position of said diaphragm with respect to said base; and

    electrical output connections for said transducer including at least conductive portions embedded in and passing through said base from said central portion of said base top surface and emerging on said central portion of said base bottom surface;

    the improvement comprising;

    a carrier plate having a top surface to which said transducer is mounted and having holes therein for passage of effective extensions of said electrical output connections;

    housing means for providing mechanical protection for pressure sensor assembly components while providing substantial access to said diaphragm by ambient atmosphere/fluid external to said housing means by way of an opening in said housing means;

    first inner seal means for bonding at least the peripheral portions of said base bottom surface to said carrier plate to effectively seal said central area of said base bottom surface, from which said electrical output connections emerge, and said holes from ambient atmosphere/fluid surrounding said diaphragm; and

    second outer seal means positioned between said carrier top surface and said housing means and positioned about said opening in said housing means such that said housing means, said first and second seal means and said carrier form an effective seal against ambient atmosphere/fluid surrounding and external to said diaphragm.

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