Pressure sensor assembly
First Claim
1. A pressure sensor assembly comprising:
- a base having top and bottom external surfaces each having central and surrounding peripheral portions;
a diaphragm with a peripheral portion thereof hermetically bonded to said base top surface peripheral portion and forming a reference pressure cavity between said diaphragm and said base top surface;
said base and diaphragm together comprising a pressure transducer having electrical characteristics which vary in response to sensed pressure altering the position of said diaphragm with respect to said base; and
electrical output connections for said transducer including at least conductive portions embedded in and passing through said base from said central portion of said base top surface and emerging on said central portion of said base bottom surface;
the improvement comprising;
a carrier plate having a top surface to which said transducer is mounted and having holes therein for passage of effective extensions of said electrical output connections;
housing means for providing mechanical protection for pressure sensor assembly components while providing substantial access to said diaphragm by ambient atmosphere/fluid external to said housing means by way of an opening in said housing means;
first inner seal means for bonding at least the peripheral portions of said base bottom surface to said carrier plate to effectively seal said central area of said base bottom surface, from which said electrical output connections emerge, and said holes from ambient atmosphere/fluid surrounding said diaphragm; and
second outer seal means positioned between said carrier top surface and said housing means and positioned about said opening in said housing means such that said housing means, said first and second seal means and said carrier form an effective seal against ambient atmosphere/fluid surrounding and external to said diaphragm.
1 Assignment
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Accused Products
Abstract
A pressure sensor assembly includes a pressure transducer having a pressure displaceable diaphragm bonded to a base. Displacement of the diaphragm results in varying of electrical characterisitcs of the transducer in response to sensed pressure. Electrical output connections (wires) of the transducer extend from a central portion of a top surface of the base, which faces the diaphragm, to a central portion of a base bottom surface and peripheral portions of the diaphragm and base top surface are hermetically bonded together. The transducer is mounted on a carrier plate and integral extensions of the electrical output connections pass through holes in the carrier plate. A housing for the sensor assembly has an opening therein to provide access to the diaphragm by ambient atmosphere/fluid surrouding the housing. A first inner seal bonds at least the peripheral portions of the base bottom surface to the carrier plate, and a second outer seal is positioned between the carrier plate top surface and walls of the housing. The housing walls, carrier plate and first and second seals form an effective seal against ambient atmosphere/fluid which contacts the diaphragm and, therefore, seal and protect the electrical output connections of the transducer. The housing walls form an internal cavity which is isolated from the sensed ambient atmosphere/fluid. Within the internal cavity components are connected to the extensions of the clectrical output connections which pass through the carrier plate holes.
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Citations
30 Claims
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1. A pressure sensor assembly comprising:
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a base having top and bottom external surfaces each having central and surrounding peripheral portions; a diaphragm with a peripheral portion thereof hermetically bonded to said base top surface peripheral portion and forming a reference pressure cavity between said diaphragm and said base top surface; said base and diaphragm together comprising a pressure transducer having electrical characteristics which vary in response to sensed pressure altering the position of said diaphragm with respect to said base; and electrical output connections for said transducer including at least conductive portions embedded in and passing through said base from said central portion of said base top surface and emerging on said central portion of said base bottom surface; the improvement comprising; a carrier plate having a top surface to which said transducer is mounted and having holes therein for passage of effective extensions of said electrical output connections; housing means for providing mechanical protection for pressure sensor assembly components while providing substantial access to said diaphragm by ambient atmosphere/fluid external to said housing means by way of an opening in said housing means; first inner seal means for bonding at least the peripheral portions of said base bottom surface to said carrier plate to effectively seal said central area of said base bottom surface, from which said electrical output connections emerge, and said holes from ambient atmosphere/fluid surrounding said diaphragm; and second outer seal means positioned between said carrier top surface and said housing means and positioned about said opening in said housing means such that said housing means, said first and second seal means and said carrier form an effective seal against ambient atmosphere/fluid surrounding and external to said diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A sensor assembly comprising:
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a base having top and bottom external surfaces each having central and surrounding peripheral portions; said base comprising at least part of a transducer having electrical characteristics which vary in response to a sensed parameter of an ambient atmosphere/fluid; and electrical output connections for said transducer including at least conductive portions embedded in and passing through said base from said central portion of said base top surface and emerging on said central portion of said base bottom surface; the improvement comprising; a carrier plate having a top surface to which said transducer is mounted and having holes therein for passage of effective extensions of said electrical output connections; housing means for providing mechanical protection for pressure sensor assembly components while providing substantial access to said transducer by ambient atmosphere/fluid external to said housing means by way of an opening in said housing means; first inner seal means for bonding at least the peripheral portions of said base bottom surface to said carrier plate to effectively seal said central area of said base bottom surface, from which said electrical output connections emerge, and said holes from ambient atmosphere/fluid surrounding said transducer; and second outer seal means positioned between said carrier top surface and said housing means and positioned about said opening in said housing means such that said housing means, said first and second seal means and said carrier form an effective seal against ambient atmosphere/fluid surrounding and external to said transducer. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification