Optical generator and detector of stress pulses

• US 4,710,030 A
• Filed: 05/17/1985
• Issued: 12/01/1987
• Est. Priority Date: 05/17/1985
• Status: Expired due to Term

• Current Assignee: Brown University
• Original Assignee: Brown University
• Inventors: Maris, Humphrey J., Thomsen, Christian, Tauc, Jan
• Primary Examiner(s): ROSENBERGER, RICHARD A
• Application Number:
  US06/735,825
• Time in Patent Office: 928 Days
• Field of Search: 356/32, 356/432 T, 356/445, 374/5, 374/7, 374/17, 374/57, 73/655, 73/760, 73/800, 73/643
• US Class Current: 356/432
• CPC Class Codes: G01N 2021/1742 either absorption or reflection
• CPC Class Codes: G01N 2021/178 Methods for obtaining spatial resolution of the property being measured
• CPC Class Codes: G01N 2021/1782 In-depth resolution
• CPC Class Codes: G01N 2021/8438 Mutilayers
• CPC Class Codes: G01N 21/1702 with opto-acoustic detection, e.g. for gases or analysing solids
• CPC Class Codes: G01N 21/8422 Investigating thin films, e.g. matrix isolation method
• CPC Class Codes: G01N 29/0681 by acoustic microscopy, e.g. scanning acoustic microscopy
• CPC Class Codes: G01N 29/2418 using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics photoacoustic cells G01N21/1702; measuring characteristics of vibrations by using radiation-sensitive means G01H9/00; acousto-optical conversion techniques for short-range imaging G01S15/8965; sound-producing devices using laser bundle G10K15/046

Abstract

An optical stress pulse generation and detection system for non-destructively measuring physical properties of a sample, which uses a pump beam having short duration radiation pulses having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in a sample and directs the non-destructive pump beam to a surface of the sample to generate the stress pulse. The optical stress pulse generation and detection system also uses a probe radiation beam and guides the probe beam to a location at the sample to intercept the stress pulse. The change in optical constants induced by the stress pulse is detected by observing the probe beam after it intercepts the stress pulse.

Claims

1. An optical stress pulse generation and detection system for non-destructively measuring physical properties of a sample, comprising:

a radiation source for providing a pulsed pump beam having at least one short duration radiation pulse having a duration of 0.01 to 100 psec, and having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in a sample;

a radiation source for providing a probe beam;

means for directing said pump beam to a surface of a sample to generate said stress pulse in said sample;

means for guiding said probe beam to a location at said sample to intercept said stress pulse; and

means for detecting a change in an optical parameter of said probe beam representative of the change in optical constants induced by said stress pulse in said sample.

2. The optical stress pulse generation and detection system of claim 1 in which said means for detecting includes means for measuring the intensity of said probe beam.

3. The optical stress pulse generation and detection system of claim 2 in which said pump beam and said probe beam are derived from the same source beam having a plurality of short duration pulses and said optical stress pulse generation and detection system further includes beam splitting means for directing a first portion of said source beam to form said pump beam having said plurality of pulses and directing a second portion to form said probe beam having said plurality of pulses.

4. The optical stress pulse generation and detection system of claim 3 in which said source beam has a single direction of polarization.

5. The optical stress pulse generation and detection system of claim 4 further including means for rotating the direction of polarization of said probe beam and means, disposed between said test sample and said means for detecting, for transmitting only radiation at said rotated direction of polarization.

6. The optical stress pulse generation and detection system of claim 3 further including chopper means for modulating said pump beam at a predetermined frequency.

7. The optical stress pulse generation and detection system of claim 6 in which said means for detecting includes amplifier means, responsive to said chopper means, for amplifying only the output of said means for measuring corresponding to said predetermined frequency.

8. The optical stress pulse generation and detection system of claim 3 in which said means for guiding includes means for setting a predetermined time delay between the impingement of a said pulse of said pump beam and a said pulse of said probe beam upon said sample.

9. The optical stress pulse generation and detection system of claim 8 in which said means for detecting includes means for averaging the output of said means for measuring for a plurality of pulse detections while the delay between impingements remains set at said predetermined time delay.

10. The optical stress pulse generation and detection system of claim 9 in which said means for setting sequentially changes said predetermined time delay and said means for averaging successively averages the output of said means for measuring during each successive predetermined time delay setting.

11. The optical stress pulse generation and detection system of claim 3 in which said pump beam receives 50 to 99% of said source beam.

12. The optical stress pulse generation and detection system of claim 11 in which said source beam has an average power of 10 μ

W to 1 kW.

13. The optical stress pulse generation and detection system of claim 3 in which said source beam includes wavelengths from 100 Angstroms to 100 microns.

14. The optical stress pulse generation and detection system of claim 1 in which said sample includes a substrate and a film to be examined disposed on said substrate to define a boundary between them.

15. The optical stress pulse generation and detection system of claim 14 in which said film is optically opaque and said pump beam and said probe beam impinge upon the surface of said film opposite said boundary.

16. The optical stress pulse generation and detection system of claim 14 in which said film is optically opaque, said substrate is optically transparent, and said probe beam and said pump beam travel through said substrate to impinge upon said boundary.

17. The optical stress pulse generation and detection system of claim 14 in which said film is optically opaque, said substrate is optically transparent, one said beam travels through said substrate to impinge upon said boundary, and the other said beam impinges upon the surface of said film opposite said boundary.

18. The optical stress pulse generation and detection system of claim 14 in which said film is optically transparent, said substrate is optically opaque, and said pump beam and said probe beam travel through said film to impinge upon said boundary.

19. The optical stress pulse generation and detection system of claim 14 in which said test sample further includes an opto-acoustically active medium disposed on the surface of said film opposite said boundary.

20. The optical stress pulse generation and detection system of claim 19 in which said pump beam and said probe beam impinge upon said active medium.

21. The optical stress pulse generation and detection system of claim 14 in which said substrate is an opto-acoustically active medium.

22. The optical stress pulse generation and detection system of claim 21 in which said pump beam and said probe beam impinge upon the surface of said active medium opposite said boundary.

23. The optical stress pulse generation and detection system of claim 14 in which said film has a thickness from 50 Angstroms to 100 microns.

24. The optical stress pulse generation and detection system of claim 1 in which said probe beam source provides a continuous radiation beam.

25. The optical stress pulse generation and detection system of claim 24 in which said pump beam source provides at least two discrete pump pulses.

26. The optical stress pulse generation and detection system of claim 25 in which said pump beam source provides radiation having an average power of 10 μ

W to 1 kW.

27. The optical stress pulse generation and detection system of claim 1 in which said probe beam source provides short duration radiation pulses.

28. The optical stress pulse generation and detection system of claim 27 in which said probe beam source provides probe beam pulses having a duration of 0.01 to 100 psec.

29. The optical stress pulse generation and detection system of claim 1 in which said pump beam includes wavelengths from 10 angstroms to 100 microns.

30. The optical stress pulse generation and detection system of claim 1 in which said pump beam and said probe beam impinge upon the same location at said sample.

31. The optical stress pulse generation and detection system of claim 1 in which said means for directing and said means for guiding include a common lens system for focussing said pump beam and said probe beam onto said sample.

32. The optical stress pulse generation and detection system of claim 1 in which said means for guiding shifts the position of impingement of said probe beam relative to that of said pump beam.

33. The optical stress pulse generation and detection system of claim 1 in which said probe beam is transmitted by said sample.

34. The optical stress pulse generation and detection system of claim 1 in which said probe beam is reflected by said sample.

35. A system for non-destructively measuring physical properties of a sample in which both generation and detection of stress pulses is accomplished optically, comprising:

a radiation source for providing a pulsed source beam, each pulse having a duration of 0.01 to 100 psec;

beam splitting means for directing a first portion of said source beam to form a pump beam having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in said sample and directing a second portion to form a probe beam;

means for directing said pump beam to a surface of said sample to generate said stress pulse in said sample;

means for guiding said probe beam to a location at said sample to intercept said stress pulse; and

means for detecting a change in an optical parameter of said probe beam representative of the change in optical constants induced by said stress pulse in said sample.

36. A method for optically and non-destructively generating and detecting the propagation of a stress pulse in a sample, comrpising:

producing a pulsed pump beam including short duration radiation pulses having a duration of 0.01 to 100 psec, and having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in a sample;

producing a probe radiation beam;

directing the pump beam to a surface of the sample to generate said stress pulse in the sample;

guiding the probe beam to a location at the sample to intercept the stress pulse; and

detecting the change in optical constants induced by the stress pulse in the sample by measuring the intensity of the probe beam after it intercepts the stress pulse.

37. A method for optically and non-destructively generating and detecting the propagation of a stress pulse in a sample, comprising:

producing a pulsed source beam having short duration pulses of radiation having a duration of 0.01 to 100 psec;

diverting a first portion of the source beam to form a pump beam having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in a sample;

diverting a second portion of the source beam to form a probe beam;

directing the pump beam to a surface of the sample to generate the stress pulse in the sample;

guiding the probe beam to a location at the sample to intercept the stress pulse;

detecting the change in optical constants induced by the stress pulse in the sample by measuring the intensity of the probe beam after it intercepts the stress pulse.