Pressure measuring element
First Claim
1. In a pressure measuring element, particularly for measuring intake air pressure in an internal combustion engine of a motor vehicle, comprising a membrane made of ceramic material and deformable in response to an intake air pressure;
- and a substrate formed as a plate and having an upper side to which said membrane is rigidily connected at a peripheral area thereof, said substrate having an underside;
the improvement comprising an electrical heating resistance element mounted immediately on said underside, whereby said substrate is maintained at constant temperature.
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Accused Products
Abstract
A pressure measuring element includes a plate-shaped substrate of ceramic material and a membrane deformable in response to pressure fluctuations. The membrane is made of ceramic material and is mounted to the upper side of the substrate. A pressure-sensitive resistor for measuring pressure is positioned inside the membrane. A heating resistor element is positioned on the underside of the substrate, which maintains the temperature of the substrate constant. A temperature sensor is also arrayed on the upper side of the substrate near the membrane.
20 Citations
7 Claims
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1. In a pressure measuring element, particularly for measuring intake air pressure in an internal combustion engine of a motor vehicle, comprising a membrane made of ceramic material and deformable in response to an intake air pressure;
- and a substrate formed as a plate and having an upper side to which said membrane is rigidily connected at a peripheral area thereof, said substrate having an underside;
the improvement comprising an electrical heating resistance element mounted immediately on said underside, whereby said substrate is maintained at constant temperature. - View Dependent Claims (2, 3, 4, 5, 6, 7)
- and a substrate formed as a plate and having an upper side to which said membrane is rigidily connected at a peripheral area thereof, said substrate having an underside;
Specification