Homogeneous photoconductive layer of amorphous silicon and hydrogen
First Claim
1. A process for producing an electrophotographic recording material having an electrically conductive substrate and an homogeneous photoconductive layer of amorphous silicon and hydrogen applied thereon, said process comprisingprecipitating a photoconductive layer of silicon onto a substrate maintained at a temperature ranging from 100°
- to 300°
C. by cathode sputtering in an atmosphere consisting of oxygen or an oxygen-releasing gas, hydrogen and argon, wherein the oxygen or oxygen-releasing gas is present in a proportion of about 1 ppm to 1 vol.% to said hydrogen and said argon gases.
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Abstract
The present invention relates to an electrophotographic recording material and to a process for manufacturing it. The material comprises an electrically conductive substrate and a photoconductive layer of amorphous silicon and hydrogen applied thereto. The recording material is characterized by only a single photoconductive layer having an oxygen component of about 1 ppm to 1 atom percent. The recording material is produced by means of cathode sputtering.
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Citations
7 Claims
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1. A process for producing an electrophotographic recording material having an electrically conductive substrate and an homogeneous photoconductive layer of amorphous silicon and hydrogen applied thereon, said process comprising
precipitating a photoconductive layer of silicon onto a substrate maintained at a temperature ranging from 100° - to 300°
C. by cathode sputtering in an atmosphere consisting of oxygen or an oxygen-releasing gas, hydrogen and argon, wherein the oxygen or oxygen-releasing gas is present in a proportion of about 1 ppm to 1 vol.% to said hydrogen and said argon gases. - View Dependent Claims (2, 3, 4, 5, 6, 7)
- to 300°
Specification