Gate valve for wafer processing system

• US 4,715,764 A
• Filed: 04/28/1986
• Issued: 12/29/1987
• Est. Priority Date: 04/28/1986
• Status: Expired due to Term

• Current Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Original Assignee: Varian Associates, Inc.
• Inventors: Hutchinson, Martin A.
• Primary Examiner(s): ASCHENBRENNER, PETER
• Application Number:
  US06/856,876
• Time in Patent Office: 610 Days
• Field of Search: 419/222, 419/217, 419/225, 419/417, 251/327, 251/328
• US Class Current: 414/217
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: Y10S 414/136 including wafer orienting means
• CPC Class Codes: Y10S 414/138 Wafers positioned vertically within cassette
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber
• CPC Class Codes: Y10S 414/14 Wafer cassette transporting
• CPC Class Codes: Y10S 414/141 includes means for gripping wafer

Abstract

A modular wafer processing system requires a gate valve of minimum thickness. A gate valve is provided in which the gate is an assymetric wedge on an assymetrically mounted drive shaft.

Claims

1. A valve comprising:

a valve body having a passage therethrough;

a valve gate having a first position in which said passage is open and a second position in which a first portion and a second portion of the surface of said valve gate each extend across said passage thereby dividing said passage into a first region and a second region;

sealing means, between said valve body and said first portion of said surface of said valve gate when said valve gate is in said second position, for providing a vacuum seal between said first region and said second region, a rotational moment being generated on said valve body by said sealing means being pressed between said first portion of said surface and said valve body when said valve gate is in said second position;

means between said second portion of said surface and said valve body when said valve gate is in said second position, for providing a rotational moment opposed to said rotational moment generated on said valve gate by said sealing means being pressed between said first portion of said surface and said valve body when said valve gate is in said second position, said means for providing a rotational moment not providing a vacuum seal between said first region and said second region; and

means connected to said valve gate for translating said valve gate from said first position to said second position and from said second position to said first position.

2. A valve as in claim 1 wherein said passage through said valve body has a central plane and wherein the orthogonal projection of said second portion of said surface onto said central plane is narrower than the orthogonal projection of said first portion of said surface on said central plane as measured along an axis in said central plane connecting said first region to said second region.

3. A valve as in claim 2 wherein said first portion includes a planar surface and said second portion includes a planar surface.

4. A valve as in claim 3 wherein said planar surface of said first portion makes an angle less than or equal to 45°

with said central plane.

5. A valve as in claim 3 wherein said planar surface of said second portion includes a first and a second planar surface, said second planar surface being perpendicular to said central plane.

6. A valve as in claim 1 wherein said valve gate has a first side and a second side parallel to said first side and wherein said valve gate is the union of a first gate region containing said first portion and said first side and a second gate region containing said second portion and said second side, said first gate region and said second gate region meeting in a common plane parallel to said first side and said second side wherein the distance between said common plane and said second side is less than the distance between said first side and said common plane.

7. A valve as in claim 6 wherein said first gate region has a trapezoidal cross section and said second gate region has a trapezoidal cross section.

8. A valve as in claim 6 wherein said second side includes a portion of said second portion of said surface.

9. A valve as in claim 6 further including bearing means contacting said first side and said second side.

10. A valve as in claim 1 wherein said means for providing a rotational moment comprises an elastomeric strip.

11. A valve as in claim 1 wherein said means for translating is positioned so that said rotational moment opposed to said rotational moment generated by said sealing means has the same absolute value as said rotational moment generated by said sealing means.