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Vacuum valve using improved diaphragm

  • US 4,717,117 A
  • Filed: 12/08/1986
  • Issued: 01/05/1988
  • Est. Priority Date: 12/08/1986
  • Status: Expired due to Term
First Claim
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1. A valve comprising:

  • a plurality of passages (22,24) formed in a housing, and an annular sealing area formed about one of said passages;

    a circular diaphragm, received within and supported by the housing and movably relative to said sealing area in response to a force differential applied thereacross;

    including a thin, planar, flexible, non-metallic membrane centrally disposed therein for sealably engaging said sealing area,means, disposed adjacent to the outer edge of the membrane, for stiffening such outer edge, comprising an increased thickness portion including an annular groove formed therein and a metal ring received into and secured within such groove,a flexible convolute disposed about said portion;

    a spring received upon said ring for biasing the membrane into engagement with the sealing area.

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