Ion source for an ion implanter

• US 4,719,355 A
• Filed: 04/10/1986
• Issued: 01/12/1988
• Est. Priority Date: 04/10/1986
• Status: Expired due to Fees

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Relue, Michael, Meyers, Victor
• Primary Examiner(s): NOT, DEFINED
• Assistant Examiner(s): NOT, DEFINED
• Application Number:
  US06/850,181
• Time in Patent Office: 642 Days
• Field of Search: 250/423 R, 250/423 F, 250/424, 250/425, 250/426, 250/427, 313/550, 313/564, 313/362.1, 60/202
• US Class Current: 250/425
• CPC Class Codes: H01J 27/022 Details
• CPC Class Codes: H01J 27/08 using arc discharge
• CPC Class Codes: H01J 37/08 Ion sources; Ion guns
• CPC Class Codes: H01J 49/04 Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components

Abstract

An ion source of a type used on ion implanters which includes a crucible having a hollow interior and a hole for providing fluid communication between the interior of and exterior to the crucible. A heater assembly is used for adjustably heating the crucible. The crucible hole is if fluid communication with a passageway down the crucible and with a vapor nozzle aperture. An arc chamber has an inlet positioned at the output of the vapor nozzle aperture. The material to be vaporized does not bond to the crucible interior when solidified from a liquid state.

Claims

1. An ion source for an ion implanter, comprising:

a housing having an orifice at one end, and having a removable cap;

a graphite crucible disposed within said housing, said crucible having a hollow interior for holding an ion source metal, having a channel formed into and along the side of the crucible, and having a hole for providing fluid communication between the interior and exterior of said crucible, said hole positioned above a portion of the interior in which the ion source metal is to be held, and said hole also positioned within said channel so that the interior of said crucible is in fluid communication with said orifice through said hole and along the side of said crucible in said channel, said crucible removable from said housing when said removable cap is removed therefrom; and

a heater assembly for heating said crucible to a temperature at which said ion source metal will produce a vapor.

2. An ion source according to claim 1, wherein said housing is formed of electrically non-conductive material;

and wherein said heater assembly comprises a heater wire wound around said housing for receiving electrical current therethrough.

3. An antimony ion source for an ion implanter, comprising:

a housing having an orifice at one end, and having a removable cap at another end;

a graphite crucible disposed within said housing, said crucible having a hollow interior for holding antimony source metal, having a plurality of holes for providing fluid communication between the interior and exterior of said crucible and having a plurality of channels formed on and along an exterior surface of said crucible each of said plurality of holes positioned above the a portion of the interior in which the antimony source metal is to be held and said hole also positioned within one of said channels so that the interior of said crucible is in fluid communication with said orifice through each of said plurality of holes and along the exterior surface of said crucible in corresponding ones of said plurality of channels, said crucible removable from said housing when said removable cap is removed therefrom; and

a heater assembly disposed around said crucible, for heating said crucible to a temperature at which antimony vaporizes

4. An ion source according to claim 3, wherein said housing is formed of electrically non-conductive material;

and wherein said heater assembly comprises a heater wire wound around said housing for receiving electrical current therethrough.

5. An ion source according to claim 4, wherein said housing is boron nitride.

6. An ion source according to claim 3, wherein said housing further comprises:

a sleeve surrounding said crucible, said sleeve formed of an electrically non-conductive material; and

a nozzle cap at the end of said sleeve opposite from said removable cap, having said orifice disposed therethrough, said nozzle cap formed of stainless steel.

7. An ion source according to claim 4, wherein said crucible has a pair of oppositely disposed legs for spacing said crucible away from said orifice.