Force responsive capacitive transducer
First Claim
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1. A force-responsive capacitive transducer, comprising:
- first electrode means including a plurality of electrode regions;
second electrode means spaced apart from the first electrode means and angularly deflectable in response to applied moment, for defining with the first electrode means a plurality of capacitors having capacitance variable with spacing, such spacing being differentially variable with angular deflection of said second electrode means;
actuator means connected to said second electrode means and responsive to externally applied force, for applying moment to said second electrode means and varying the spacing between said first and second electrode means, whereby capacitance is varied; and
diaphragm means, connected to said second electrode means, for elastically deflecting in response to moment applied to said second electrode means.
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Abstract
A capacitive transducer includes a plurality of first electrodes which, together with at least one second electrode, define a plurality of capacitors having capacitance variable with spacing. An actuator element connected to a plate supporting at least one second electrode angularly deflects the plate. This angular deflection causes the spacing, and thus the capacitance, of electrode sets disposed on opposite sides of the center of the plate to vary in a differential manner.
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Citations
13 Claims
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1. A force-responsive capacitive transducer, comprising:
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first electrode means including a plurality of electrode regions; second electrode means spaced apart from the first electrode means and angularly deflectable in response to applied moment, for defining with the first electrode means a plurality of capacitors having capacitance variable with spacing, such spacing being differentially variable with angular deflection of said second electrode means; actuator means connected to said second electrode means and responsive to externally applied force, for applying moment to said second electrode means and varying the spacing between said first and second electrode means, whereby capacitance is varied; and diaphragm means, connected to said second electrode means, for elastically deflecting in response to moment applied to said second electrode means. - View Dependent Claims (2, 3, 4, 5)
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6. A force-responsive capacitive transducer, comprising:
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flexible diaphragm means deflectable in response to a centrally applied moment, said flexible diaphragm means including first electrode means, such electrode means having at least two electrode regions; second electrode means spaced apart from said first electrode means for defining with the first electrode means a plurality of capacitors having capacitance variable with spacing; and actuator means for applying moment, connected to the flexible diaphragm means so that applied moment deflects the flexible diaphragm means and varies the spacing between the flexible diaphragm means and the second electrode means, whereby capacitance is varied. - View Dependent Claims (7, 8)
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9. A force-responsive capacitive transducer comprising:
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flexible diaphragm means deflectable in response to a centrally applied moment, said flexible diaphragm means including first electrode means, such electrode means having at least two electrode regions; second electrode means spaced apart from said first electrode means for defining with the first electrode means a plurality of capacitors having capacitance variable with spacing; actuator means for applying moment, connected to the flexible diaphragm means so that applied moment deflects the flexible diaphragm means and varies the spacing between the flexible diaphragm means and the second electrode means, whereby capacitance is varied; and signal generating means responsive to the variable capacitance of the force to capacitance transducer means, for generating signals representative of force variations, the signal generating means including first and second variable frequency oscillator means, each coupled to the transducer means and responsive to the capacitive value of each for providing first and second variable frequency signals representative of applied moment; and means responsive to said first and second variable frequency signals for generating a third variable frequency signal representative of the difference between said first and second variable frequency signals.
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10. A force-responsive capacitive transducer comprising
flexible diaphragm means deflectable in response to a centrally applied moment, said flexible diaphragm means including first electrode means, such electrode means having at least two electrode regions; -
second electrode means spaced apart from said first electrode means for defining with the first electrode means a plurality of capacitors having capacitance variable with spacing; actuator means for applying moment, connected to the flexible diaphragm means so that applied moment deflects the flexible diaphragm means and varies the spacing between the flexible diaphragm means and the second electrode means, whereby capacitance is varied; signal generating means responsive to the variable capacitance of the force to capacitance transducer means, for generating signals representative of force variations; and digital processor means, connected to said signal generating means, for controlling the signal generating means and processing signals generated by the signal generating means.
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11. A capacitive transducer for converting applied force to capacitive changes, comprising:
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a substantially rigid support element; a flexible diaphragm having a relatively rigid central region and a peripheral region affixed to said support element; a plurality of first electrodes mounted on said flexible diaphragm; actuator means attached to said central region of said flexible diaphragm; second electrode means spaced apart from and affixed to said rigid central region of said diaphragm, for defining with said first electrode means an arrangement of capacitors, said capacitors having capacitance variable with spacing, and so that angular deflection of the central region of the diaphragm relative to said support element differentially varies the spacings of said capacitors, whereby capacitance is varied and applied force is measured. - View Dependent Claims (12, 13)
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Specification