Vacuum chamber gate valve

• US 4,721,282 A
• Filed: 12/16/1986
• Issued: 01/26/1988
• Est. Priority Date: 12/16/1986
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Shawver, Michael J., Lobianco, Robert T.
• Primary Examiner(s): Cohan, Alan
• Application Number:
  US06/942,516
• Time in Patent Office: 406 Days
• Field of Search: 251/62, 251/193, 251/335.3, 251/326, 251/203, 251/63.4, 251/158
• US Class Current: 251/62
• CPC Class Codes: F16K 3/18 by movement of the closure members
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

A gate valve assembly includes a housing, a shaft axially mounted within the housing, and a gate member secured to one end of the shaft. A mechanism within the housing is provided for axially extending and rotating the shaft in order to move the gate member into sealing engagement with a port in a processing chamber. By providing an expandable seal about the shaft and secured to the housing, the mechanical drive portion of the valve may be isolated from the interior of the chamber. The valve is particularly suitable for use with loadlocks and other chambers having a low pressure environment.

Claims

1. A gate valve assembly for mounting on a port in a chamber wall, said gate valve comprising:

an elongate housing having means at one end for sealing to the chamber wall about the port;

a bearing block pivotally mounted within the housing;

a shaft slidably received by the bearing block and extending through said one end of the housing;

a gate member attached to one end of the shaft;

an expandable seal member sealing the shaft to the housing to prevent leakage through the one end; and

means in the other end of the housing for translating the shaft through the bearing block and for pivoting the bearing block to move the gate member between an opened position and a closed position.

2. A gate valve assembly as in claim 1, wherein the means for sealing includes an O-ring.

3. A gate valve assembly as in claim 2, wherein the expandable seal member includes a bellows.

4. A gate valve assembly as in claim 1, wherein the means for translating and pivoting the shaft includes a piston and cylinder assembly, a transverse link coupling the piston and cylinder to the shaft, and track means for guiding travel of the link so that the shaft is caused to move axially relative to the housing during a first portion of travel and transversely relative to the housing during a second portion of travel.

5. A gate valve assembly as in claim 4, wherein the means for translating further includes a spring attaching the link to the shaft and a stop member which stops axial travel of the shaft prior to the end of travel of the piston and cylinder assembly, so that the piston and cylinder assembly will cause the shaft to pivot in the bearing block after axial travel has been stopped.

6. A gate valve assembly comprising:

an elongate housing having at least one opening;

a bearing block pivotally mounted within the housing;

a shaft slidably received by the bearing block and extending through the one opening;

a gate member attached to the end of the shaft which extends through the one opening; and

means for translating the shaft through the bearing block and for pivoting the bearing block so that the gate member moves between an opened position and a closed position.

7. A gate valve assembly as in claim 6, wherein the means for translating the shaft includes a piston and cylinder assembly mounted on the housing, a transverse link coupling the piston and cylinder assembly to the shaft, and track means for guiding travel of the link so that the shaft is caused to move axially relative to the housing during a first portion of travel and transversely relative to the housing during a second portion of travel.

8. A gate valve assembly as in claim 7, wherein the means for translating the shaft includes a spring attaching the link to the shaft and a stop member which stops axial travel of the shaft in the bearing block prior to the end of travel of the piston and cylinder assembly, so that the piston and cylinder assembly will cause the shaft to pivot in the bearing block after axial travel has been stopped.

9. A gate valve assembly as in claim 6, further including means on the housing proximate the one opening for sealing the housing to a port in a wall.

10. A gate valve assembly as in claim 9, wherein the means for sealing includes an O-ring.

11. A gate valve assembly for mounting on a port in a chamber wall, said gate valve comprising:

an elongate housing having at least one opening and means proximate the one opening for sealing the housing about the port;

a bearing block pivotally mounted within the housing;

a shaft slidably received by the bearing block and extending through the one opening;

a gate member attached to the end of the shaft which extends through the opening so that said gate member will extend through the port into the chamber when the housing is mounted on the chamber;

an expandable seal member sealing the shaft to the housing to prevent leakage through the one opening; and

means for translating the shaft through the bearing block and for pivoting the bearing block so that the gate member moves between an opened and a closed position.

12. A gate valve assembly as in claim 11, wherein the means for sealing includes an O-ring.

13. A gate valve assembly as in claim 12, wherein the expandable seal member includes a bellows.

14. A gate valve assembly as in claim 11, wherein the means for translating the shaft includes a piston and cylinder assembly mounted on the housing, a transverse link coupling the piston and cylinder assembly to the shaft, and track means for guiding travel of the link so that the shaft is caused to move axially relative to the housing during a first portion of travel and transversely relative to the housing during a second portion of travel.

15. A gate valve assembly as in claim 14, wherein the means for translating the shaft further includes a spring attaching the link to the shaft and a stop member which stops axial travel of the shaft in the bearing block prior to the end of travel of the piston and cylinder assembly, so that the piston and cylinder assembly will cause the shaft to pivot in the bearing block after axial travel has been stopped.