Molecule-based microelectronic devices

• US 4,721,601 A
• Filed: 11/23/1984
• Issued: 01/26/1988
• Est. Priority Date: 11/23/1984
• Status: Expired due to Term

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Wrighton, Mark S., Kittlesen, Gregg P., White, Henry S. Jr.
• Primary Examiner(s): Marcus, Michael S.
• Application Number:
  US06/674,410
• Time in Patent Office: 1,159 Days
• Field of Search: 204/78, 204/433, 204/435, 204/290 F, 204/291, 324/438, 324/60 R, 324/61 R, 422/90, 422/97, 422/98, 422/681, 436/151, 350/357
• US Class Current: 422/82.03
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G01N 27/129 Diode type sensors, e.g. gas sensitive Schottky diodes capacitor type sensors G01N27/227; field-effect transistor type sensors G01N27/414
• CPC Class Codes: G01N 27/414 Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
• CPC Class Codes: G01N 27/48 using polarography, i.e. measuring changes in current under a slowly-varying voltage
• CPC Class Codes: G02F 1/1533 structural features not otherwise provided for
• CPC Class Codes: G11C 13/0009 RRAM elements whose operation depends upon chemical change
• CPC Class Codes: G11C 13/0014 comprising cells based on organic memory material
• CPC Class Codes: G11C 13/0016 comprising polymers
• CPC Class Codes: H01G 7/00 Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
• CPC Class Codes: H10K 10/26 Diodes comprising organic-organic junctions
• CPC Class Codes: H10K 10/46 Field-effect transistors, e.g. organic thin-film transistors [OTFT] H10K10/43 takes precedence
• CPC Class Codes: H10K 10/701 Organic molecular electronic devices
• CPC Class Codes: H10K 71/125 using electrolytic deposition e.g. in-situ electropolymerisation
• CPC Class Codes: H10K 85/111 comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
• CPC Class Codes: H10K 85/30 Coordination compounds
• CPC Class Codes: Y10S 977/936 in a transistor or 3-terminal device

Abstract

Several types of new microelectronic devices including diodes, transistors, sensors, surface energy storage elements, and light-emitting devices are disclosed. The properties of these devices can be controlled by molecular-level changes in electroactive polymer components. These polymer components are formed from electrochemically polymerizable material whose physical properties change in response to chemical changes, and can be used to bring about an electrical connection between two or more closely spaced microelectrodes. Examples of such materials include polypyrrole, polyaniline, and polythiophene, which respond to changes in redox potential. Each electrode can be individually addressed and characterized electrochemically by controlling the amount and chemical composition of the functionalizing polymer. Sensitivity of the devices may be increased by decreasing separations between electrodes as well as altering the chemical environment of the electrode-confined polymer. These very small, specific, sensitive devices provide means for interfacing electrical and chemical systems while consuming very little power.

Claims

1. A microelectronic device comprising at least two electrically conductive electrodes, separated by less than two microns and on an insulating substrate overlaid with at least one electroactive polymer, wherein said device is responsive to a signal that changes the state of charge of the electronic polymer which results in a net change in the concentration of ionic species in said polymer.

2. The device of claim 1 wherein said electrodes are conductive electrochemically inert metals selected from the group consisting of gold, silver, palladium, and platinum.

3. The device of claim 1 wherein said substrate is selected from the group consisting of silicon dioxide, glass and sapphire.

4. The device of claim 1 wherein said polymer is derivatized with a material selected from the group consisting of metals, enzymes, and ionophores.

5. The device of claim 1 comprising at least two electrically conductive microelectrodes separated by less than two microns, wherein said polymer is polymerized from electrochemiluminescent monomers.

6. The device of claim 1 further comprising a macroscopic indicator electrode.

7. The device of claim 1 wherein said polymer is polymerized for monomers which are selected from the group consisting of electrochemically polymerizable monomers and photopolymerizable monomers.

8. The device of claim 7 wherein said polymer is polymerized from monomers selected from the group consisting of pyrrole;

N-Methylpyrrole;

aniline;

vinylferrocene;

styrene;

nitrostyrene;

viologens;

vinyl-pyridine;

vinyl-2,2'"'"'-bipyridine;

vinyl-rubrene;

quinone-based compounds; and

derivatives of said monomers.

9. The device of claim 1 wherein said polymer reversibly responds to a chemical signal in a way which can be electrically detected.

10. The device of claim 9 wherein said chemical signal is a change in pH.

11. The device of claim 9 wherein said chemical signal results from the interaction of said polymer with a component in the medium surrounding the device.

12. The device of claim 9 wherein said polymer is derivatized with palladium and said derivatized polymer responds to a change in concentration of oxygen.

13. The device of claim 9 wherein said polymer is derivatized with platinum and said derivatized polymer responds to a change in concentration of hydrogen.