Calibrated automatic test system

• US 4,724,378 A
• Filed: 07/22/1986
• Issued: 02/09/1988
• Est. Priority Date: 07/22/1986
• Status: Expired due to Term

• Current Assignee: Credence Systems Corporation (COHU Incorporated)
• Original Assignee: Tektronix Incorporated (Fortive Corp.)
• Inventors: Murray, Donald F., Sullivan, Steven K.
• Primary Examiner(s): Karlsen, Ernest F.
• Assistant Examiner(s): Nguyen, Vinh P.
• Application Number:
  US06/888,906
• Time in Patent Office: 567 Days
• Field of Search: 324/73 R, 324/73 AT, 324/74, 324/158 P, 324/130, 371/20, 371/25, 364/571, 73/1 R
• US Class Current: 714/738
• CPC Class Codes: G01R 31/3191 Calibration

Abstract

A calibrated automatic test system includes a test station for generating digital test function codes and a test head containing a plurality of I/O pins for connection to a device under test. Each I/O pin includes a pin electronics circuit responsive to the digital test function codes for providing test signals to the device under test. The pin electronics circuits are inexpensive CMOS IC'"'"'s and lack the accuracy needed to test VLSI devices at the frequencies of interest. An external calibration unit is connected to each I/O pin and data measurements are taken which represent the performance of the CMOS IC'"'"'s. The data measurements are converted to calibrated function codes representing desired data values which are then stored in correction memory circuits which respond to nominal digital test function codes and substitute in their places calibrated function codes which are then supplied to the pin electronics circuits.

Claims

1. An automatic test system for testing an electronic device comprising:

a. a programmable test station for generating test function digital codes;

b. a test head having;

a plurality of output pin means for connection to a device disposed to be tested; and

a plurality of CMOS integrated circuit means, a different one of which is coupled to each of said plurality of output pin means, each for providing test signals to a different pin of said device under test;

c. external calibration means selectively connectable to each of said output pin means of said test head for receiving said test signals and for deriving therefrom error correction factors for calibrating each of said CMOS integrated circuit means; and

d. error correction memory means for storing said error correction factors therein and for altering said test function digital codes from said test station with said error correction factors to produce intermediate signals which cause the correct test signal to be applied to each output pin when said intermediate signals are each applied to said plurality of CMOS integrated circuit means.

2. The automatic test system of claim 1 wherein said external calibration means is portable and includes X-Y positioning means for selectively connecting said external calibratin means to selected ones of said output pin means.

3. An automatic test system for testing electrical devices comprising:

a. a programmable test station for generating test functions represented by digital test codes;

b. test head means coupled to said test station for providing output means for connection to a device disposed to be tested;

c. a plurality of circuit means, one for each output means of said test head means for providing test data to said device under test in response to calibrated digital test codes;

d. calibration means selectively connectable to said test head for deriving calibrated digital test codes to be selectively substituted for said digital test codes generated by said test station; and

e. error correction memory means for storing said calibrated digital test codes.

4. The automatic test system of claim 3 wherein said calibration means comprises an external portable unit including positioning means for selectively connecting said unit to each output means of said test head means.

5. The automatic test system of claim 3 wherein said calibration means comprises means for measuring test data provided to each of said output means by said circuit means in response to said digital test codes, and further including memory means for storing said data.

6. The automatic test system of claim 5, further including means for looking up in said memory means data respresenting predetermined performance characteristics of said circuit means, for deriving said calibrated digital test codes therefrom, and for storing said calibrated digital test codes in said correction memory means whereby the generation of predetermined once of said digital test codes triggers said correction memory means to substitute said calibrated digital test codes therefor.

7. The automatic test system of claim 6 wherein said circuit means comprise CMOS integrated circuit.

8. An automatic test system for testing electrical devices comprising:

a. a programmable test station;

b. a multipin connector controlled by said test station, said multipin connector including electronic circuits for each pin of said connector for executing predetermined test functions;

c. correction memory means associated with each of said electronic circuits for providing codes representing calibrated test functions; and

d. external calibration means selectively connectable to said multipin connector for determining said codes to be stored in said correction memory means.

9. The automatic test system of claim 8 wherein said external calibration means comprises X-Y probe means for connection to said multipin connector, one pin at a time.

10. The automatic test system of claim 9 wherein said external calibration means includes means for measuring preselected data parameters of signals generated by said electronic circuits and for causing said data parameters to be stored in a memory.

11. The automatic test system of claim 10, further including means for determining function codes for said data parameters and for loading preselected ones of said function codes into said correction memory means to replace nominal function codes generated by said programmable test station.

12. The automatic test system of claim 11 wherein said correction memory means include multiplexing means for permitting selection between the contents of said correction memory means and uncorrected function codes generated by said programmable test station.

13. A method of calibrating an automatic test system for testing electrical devices comprising the steps of:

a. connecting a calibration circuit including a memory to an output pin of said automatic test system;

b. initiating a plurality of test functions from said automatic test system, each having a distinct digital code;

c. applying said distinct digital codes of step b. to said output pin;

d. measuring the data produced at said output pin by each of said distinct digital codes with said calibration circuit and storing said data is said memory;

e. determining a desired data value at said output pin for each of said distinct digital codes;

f. determining a data correction factor from the measured data of step d. and the desired data value of step e. for each distinct digital code applied to said output pin in step c.; and

g. storing said data correction factor in an error correction memory associated with said output pin of said automatic test system.

14. The method of claim 13 further includes the step:

h. repeating steps a. through g. for each output pin of the automatic test system.