Methods of using photosensitive compositions containing microgels
First Claim
1. In a process for laminating a photosensitive film to a substrate comprising the steps of(a) laminating to the substrate a supported solid photosensitive film,(b) imagewise exposing the layer to actinic radiation,(c) removing unexposed areas of the layer to form resist areas,(d) permanently modifying areas of the substrate which are unprotected by the resist areas by etching the substrate or by depositing a material onto the substrate, andwherein the improvement comprises the photosensitive film which contains(a) addition polymerizable ethylenically unsaturated monomer,(b) initiating system activated by actinic radiation,(c) preformed macromolecular polymer binder, and(d) microgel,wherein the photosensitive composition is a solid and wherein at least one of the following is present:
- (i) the polymer binder and microgel form substantially one phase as viewed by the naked eye, or(ii) the polymer binder and microgel have glass transition temperatures which do not differ by more than 50°
C. with the microgel having a glass transition temperature above 25°
C.
0 Assignments
0 Petitions
Accused Products
Abstract
A solid photopolymerizable composition, contains addition polymerizable ethylenically unsaturated monomer, initiating system, polymer binder and a microgel wherein preferably the binder and microgel form substantially a single phase and have a similar glass transition temperature above 25° C. Although less preferred the solid composition can function without the binder. A preferred use is as a photoresist.
-
Citations
16 Claims
-
1. In a process for laminating a photosensitive film to a substrate comprising the steps of
(a) laminating to the substrate a supported solid photosensitive film, (b) imagewise exposing the layer to actinic radiation, (c) removing unexposed areas of the layer to form resist areas, (d) permanently modifying areas of the substrate which are unprotected by the resist areas by etching the substrate or by depositing a material onto the substrate, and wherein the improvement comprises the photosensitive film which contains (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, (c) preformed macromolecular polymer binder, and (d) microgel, wherein the photosensitive composition is a solid and wherein at least one of the following is present: -
(i) the polymer binder and microgel form substantially one phase as viewed by the naked eye, or (ii) the polymer binder and microgel have glass transition temperatures which do not differ by more than 50°
C. with the microgel having a glass transition temperature above 25°
C. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. In a process for laminating a photosensitive film to a substrate comprising
(a) laminating to the substrate a supported solid photosensitive film, (b) imagewise exposing the layer to actinic radiation, (c) removing unexposed areas of the layer to form resist areas, (d) permanently modifying areas of the substrate which are unprotected by the resist areas by etching the substrate or by depositing a material onto the substrate, and wherein the improvement comprises the photosensitive film which contains (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, and (c) microgel, wherein the photosensitive composition is a solid with the proviso that the photosensitive composition is substantially free of any preformed macromolecular polymer binder.
Specification