Coordinate measuring instrument
First Claim
1. A coordinate measuring instrument, wherein a work to be measured, which is mounted on a mount plate, and a measuring element held by a moving mechanism having a pair of legs are moved relative to each other at least in two directions of axes perpendicularly intersecting each other out of the directions of X-, Y- and Z-axes, and configuration and the like are measured from relative displacement values, characterized in that:
- said mount plate is provided over a base with a space formed therebetween; and
position regulating means in the direction of X-axis, which are formed on said mount plate and opposed to two vertical surfaces parallel to each other and extending in the direction of Y-axis are provided on both legs of said moving mechanism, respectively, so that said legs are made movable relative to said mount plate.
1 Assignment
0 Petitions
Accused Products
Abstract
A coordinate measuring instrument, wherein a measuring element support member (1) having a measuring element (2) is movably supported on a mount plate (3), this measuring element (2) is abutted against the surface and the like of a work to be measured, which is mounted on the mount plate (3), and relative movement values between this measuring element (2) and the work are detected to measure a configuration and the like of the work. In this measuring instrument, vertical surfaces (3A, 3B, 50A and 50B) are formed on the mount plate (30) and air bearings (47, 52 and 53) opposed to these vertical surfaces are provided on legs (8 and 9) of the measuring element support member (1), so that the measuring element support member (1) can be regulated in its position in a direction of X-axis.
-
Citations
10 Claims
-
1. A coordinate measuring instrument, wherein a work to be measured, which is mounted on a mount plate, and a measuring element held by a moving mechanism having a pair of legs are moved relative to each other at least in two directions of axes perpendicularly intersecting each other out of the directions of X-, Y- and Z-axes, and configuration and the like are measured from relative displacement values, characterized in that:
- said mount plate is provided over a base with a space formed therebetween; and
position regulating means in the direction of X-axis, which are formed on said mount plate and opposed to two vertical surfaces parallel to each other and extending in the direction of Y-axis are provided on both legs of said moving mechanism, respectively, so that said legs are made movable relative to said mount plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- said mount plate is provided over a base with a space formed therebetween; and
Specification