Method of producing diamond-like carbon-coatings

• US 4,728,529 A
• Filed: 12/13/1985
• Issued: 03/01/1988
• Est. Priority Date: 06/12/1984
• Status: Expired due to Fees

• Current Assignee: Battelle-Institut EV
• Original Assignee: Battelle-Institut EV
• Inventors: Ronge, Werner, Etzkorn, Heinz-Werner
• Primary Examiner(s): Pianalto, Bernard D.
• Application Number:
  US06/813,280
• Time in Patent Office: 809 Days
• Field of Search: 427/39, 427/294
• US Class Current: 427/577
• CPC Class Codes: C03C 17/22 with other inorganic material C03C17/34, C03C17/44 take precedence
• CPC Class Codes: C03C 2217/282 Carbides, silicides
• CPC Class Codes: C03C 2218/153 by plasma-enhanced cvd
• CPC Class Codes: C23C 16/26 Deposition of carbon only
• CPC Class Codes: G02B 1/105 Protective coatings
• CPC Class Codes: G02B 1/111 using layers comprising organic materials
• CPC Class Codes: G02B 1/14 Protective coatings, e.g. hard coatings

Abstract

Diamond-like, transparent, clear and uncolored carbon coatings with low internal stresses are generated on substrates by plasma discharge from the gas phase. For this purpose, a hydrocarbon gas or a mixture of hydrocarbon gases and pure hydrogen is admitted onto the substrate to be coated which is at room temperature. Around the substrate an oxygen-free plasma discharge is produced by high-frequency excitation which is sustained by the gases admitted. The gases are excited, dissociated ionized and accelerated toward the substrate during plasma discharge.

Claims

1. Method of producing diamond-like carbon coatings in which hydrocarbons and hydrogen, possible in the presence of a noble gas, are ionized by plasma discharge, comprising placing a substrate to be coated in a coating apparatus and evacuating the apparatus to a residual gas pressure of below 2×

10^-5 mbar, then passing a hydrocarbon gas or a mixture of hydrocarbon gases and pure hydrogen onto the substrate to be coated which is at room temperature or cooled down to -100°

C., and producing around the substrate an oxygen-free plasma discharge by high-frequency excitation which is sustained by the gases admitted, the gases being excited, dissociated, ionized and accelerated toward the substrate during the plasma discharge, wherein the partial pressure of the hydrocarbon gas is adjusted between 10^-3 and 1 mbar.

2. Methods as claimed in claim 1 wherein the ratio of the partial pressures of hydrocarbons:

hydrogen being between 0.05 and 20.

3. Method as claimed in claim 1 wherein the ratio of the partial pressures of hydrocarbon:

hydrogen being between 0.5 and 10.

4. Method as claimed in claim 1 wherein the ratio of the partial pressures of hydrocarbon:

noble gas ranges between 0.1 and 10.

5. Method as claimed in claim 4 wherein the noble gas is argon and the ratio for the partial pressures of hydrocarbon:

argon is between 1 and 5.

6. Method as claimed in claim 1 wherein the substrate to be coated is cooled down to -100°

C.

7. Method as claimed in claim 6 wherein the substrate to be coated is cooled down to 10°

to 20°

C.

8. Method as claimed in claim 1 wherein plasma discharge is carried out at a voltage of 50 to 600 V.

9. Method as claimed in claim 8 wherein plasma discharge is carried out at a voltage of 150 to 250 V.

10. Method as claimed in claim 1 wherein frequencies in the kilohertz to megahertz range, preferably between 30 KHz and 14 MHz, are used for plasma discharge.

11. Method as claimed in claim 10 wherein frequencies between 30 KHz and 14 MHz are used for plasma discharge.

12. Method as claimed in claim 1 wherein coating is carried out intermittently, during the temporary interruptions of the coating process the hydrocarbon supply being discontinued so that the substrate is bombarded with noble gas and/or hydrogen.

13. Method as claimed in claim 1 wherein the substrate is coated during 1 s. to 20 min., that the admission of hydrocarbons is interrupted during 1 s. to 10 min. and that this procedure is repeated until the desired film thickness is achieved.

14. Method as claimed in claim 13 wherein the substrate is coated during 2 s. to 2 min., that the admission of hydrocarbons is interrupted during 1 s. to 1 min. and that this procedure is repeated until the desired film thickness is achieved.