Self-assembled nanometer lithographic masks and templates and method for parallel fabrication of nanometer scale multi-device structures

• US 4,728,591 A
• Filed: 03/07/1986
• Issued: 03/01/1988
• Est. Priority Date: 03/07/1986
• Status: Expired due to Fees

• Current Assignee: Trustees of Boston University, University of Colorado Foundation Inc (University of Colorado)
• Original Assignee: Trustees of Boston University, University of Colorado Foundation Inc (University of Colorado)
• Inventors: Rothschild, Kenneth J., Clark, Noel A., Douglas, Kenneth
• Primary Examiner(s): Kittle, John E.
• Assistant Examiner(s): Ryan, Patrick J.
• Application Number:
  US06/837,376
• Time in Patent Office: 725 Days
• Field of Search: 430/5, 148/1.5, 29/578, 29/580, 29/591, 428/333, 428/459, 428/460, 428/463, 428/474, 428/500, 428/522, 428/524, 428/336, 428/458
• US Class Current: 430/5
• CPC Class Codes: B01J 2219/00317 Microwell devices, i.e. having large numbers of wells
• CPC Class Codes: B01J 2219/00605 the compounds being directly bound or immobilised to solid supports
• CPC Class Codes: B01J 2219/00612 the surface being inorganic
• CPC Class Codes: B01J 2219/00621 by physical means, e.g. trenches, raised areas
• CPC Class Codes: B01J 2219/00635 by reactive plasma treatment
• CPC Class Codes: B01J 2219/00637 by coating it with another layer
• CPC Class Codes: B01J 2219/00659 Two-dimensional arrays
• CPC Class Codes: B01J 2219/00725 Peptides
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C40B 40/10 Libraries containing peptides or polypeptides, or derivatives thereof
• CPC Class Codes: C40B 60/14 for creating libraries
• CPC Class Codes: G03F 7/004 Photosensitive materials G03F7/12, G03F7/14 take precedence
• CPC Class Codes: G03F 7/038 Macromolecular compounds which are rendered insoluble or differentially wettable G03F7/075 takes precedence; macromolecular azides G03F7/012; macromolecular diazonium compounds G03F7/021
• CPC Class Codes: G03F 7/039 Macromolecular compounds which are photodegradable, e.g. positive electron resists G03F7/075 takes precedence; macromolecular quinonediazides G03F7/023
• CPC Class Codes: Y10T 428/261 In terms of molecular thickness or light wave length
• CPC Class Codes: Y10T 428/31681 Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
• CPC Class Codes: Y10T 428/31855 Of addition polymer from unsaturated monomers
• CPC Class Codes: Y10T 428/31942 Of aldehyde or ketone condensation product

Abstract

Articles exhibiting fabricated structures with nanometer size scale features (nanostructures), typically a device comprising nanostructures of a functional material on or in a substrate of dissimilar material, are produced by a method employing a substrate base or coating and a thin layer serving as a lithographic mask or template, consisting of a self-assembled ordered material array, typically a periodic array of molecules such as undenatured proteins, exhibiting holes, thickness or density variations. It is possible to produce complex structures containing large numbers of nanometers scale elements through a small number of simple steps.

Claims

1. A nanosubstrate for the production of patterns on a nanometer scale comprising:

a substrate base;

a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of at least one of thickness, density and chemical reactivity variation, said pattern having a characteristic dimension of 1-50 nanometers;

a patterned layer formed on said array and having a pattern which is determined by said spatial pattern of said array; and

at least one electrode coupled to at least one of said patterned layer and said array.

8. A nanosubstrate as in claim 1, 3 or 5 wherein said array includes spatially ordered nondenatured proteins.

9. A nanosubstrate as in claim 8 wherein said spatial array includes S-layer from Sulfolobus acidocaldarius.

10. A nanosubstrate as in claim 8 wherein said array includes purple membrane from HALOBACTERIUM HALOBIUM.

11. A nanosubstrate as in claim 8 wherein said array includes rhodopsin.

12. A nanosubstrate as in claim 8 wherein said array includes cytochrome oxidase.

13. A nanosubstrate as in claim 8 wherein said array includes E. coli matrix porin.

14. A nanosubstrate as in claim 8 wherein said array includes tight gap junctions.

15. A nanosubstrate as in claim 1, 3 or 5 wherein said array includes a surface layer of a three-dimensionally ordered crystal.

16. A nanosubstrate as in claim 15 wherein said three-dimensionally ordered crystal includes a three-dimensionally ordered protein crystal.

17. A nanosubstrate as in claim 1, 3 or 5 wherein said array contains spatially ordered holes 1-50 nanometers in dimension.

18. A nanosubstrate as in claim 1 or 3 wherein said array forms two-dimensional spatial pattern of chemical reactivity variations having a characteristic dimension of 1-50 nanometers.

19. A nanosubstrate as in claim 1, 2 or 5 wherein said substrate base includes a plurality of layers.

20. A nanosubstrate as in claim 1, or 5 wherein said substrate base includes material containing a heterogenous surface which is spatially differentiated, said pattern of said array being aligned in a predetermined manner with said substrate heterogeneity.

21. A nanosubstrate as in claim 1 or 5 wherein said substrate base includes material containing a heterogeneous surface which is spatially differentiated, said pattern of said array not being aligned with said substrate heterogeneity.

22. A nanosubstrate as in claim 1, 2 or 5 wherein said substrate base includes a liquid.

23. A nanosubstrate as in claim 1 wherein said patterned layer includes a plurality of layers.

24. A nanosubstrate as in claim 1 wherein said patterned layer is heterogeneous and spatially differentiated.

26. A nanosubstrate as in claim 24 wherein said patterned layer includes at least one electrode coupled to said projections.

2. A nanosubstrate for the production of patterns and structures on a nanometer scale comprising:

a substrate base;

a plurality of projections disposed in a pattern on said base, said pattern having a characteristic dimension of 1-50 nanometers and corresponding to a two-dimensional spatial pattern of at least one of thickness, density and chemical reactivity variations in a self-assembled two-dimensional array; and

a layer of material disposed on said base and between said projections, said material of said layer being different than material of said projections, said material not forming said pattern naturally.

25. A nanosubstrate as in claim 2 further comprising a patterned layer disposed adjacent said projections and said layer of material, said patterned layer having a pattern which is determined by said pattern of said projections.

27. A nanosubstrate as in claim 2 wherein said projections are made of at least one type of biological molecule.

28. A nanosubstrate as in claim 2 wherein said projections are from at least one of the group consisting of ferritin and ferritin conjugated with another biological molecule.

29. A nanosubstrate as in claim 28 wherein said another biological molecule is an antibody.

30. A nanostructure as in claim 27 wherein said biological molecule has catalytic activity.

31. A nanostructure as in claim 2 wherein said layer of material between said projections includes a conducting polymer.

32. A nanostructure as in claim 31 wherein a plurality of molecules of said conducting polymer each make contact with more than one of said projections.

33. A nanostructure as in claim 2 wherein said layer of material includes a self-assembled two-dimensional array forming a two-dimensional spatial pattern of holes corresponding to said pattern of projections.

3. A nanosubstrate for the production of patterns on a nanometer scale comprising:

a substrate base;

a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of at least one of thickness, density and chemical reactivity variations, said pattern having a characteristic dimension of 1-50 nanometers; and

means for determining the state of selected portions of said array.

4. A nanosubstrate as in claim 3 wherein said determining means includes a plurality of electrodes coupled to said array.

5. A microsubstrate for the production of patterns on a nanometer scale comprising:

a substrate base; and

a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of one of thickness variations, density variations and holes, said pattern having a characteristic dimension of 1-50 nanometers, said substrate base having depressions therein corresponding to said holes.

34. A nanosubstrate as in claim 5 further comprising material filling said depressions in said substrate.

35. A nanostructure as in claim 34 wherein said material includes a biological molecule.

36. A nanosubstrate as in claim 35 wherein said material is made of at least one of the group consisting of ferritin and ferritin conjugated to another biological molecule.

37. A nanosubstrate as in claim 36 wherein said material includes ferritin conjugated with an antibody.

38. A nanosubstrate as in claim 35 wherein said biological molecule has catalytic activity.

6. A nanosubstrate for the production of patterns on a nanometer scale comprising:

a substrate base;

a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of holes, said pattern having a characteristic dimension of 1-50 nanometers; and

a patterned layer disposed on said array, and substantially not on said substrate base and having a pattern of holes which is determined by said spatial pattern of said array.

7. A nanosubstrate for the production of patterns on a nanometer scale comprising:

a substrate base;

a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of at least one of thickness, density and chemical reactivity variations, said pattern having a characteristic dimension of 1-50 nanometers; and

a patterned layer disposed on said array, and having a pattern of holes which is determined by said spatial pattern of said array.