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Coaxial shielded helical delay line and process

  • US 4,729,510 A
  • Filed: 11/14/1984
  • Issued: 03/08/1988
  • Est. Priority Date: 11/14/1984
  • Status: Expired due to Fees
First Claim
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1. A method of forming a shielded delay line embedded in a planar substrate formed of a plurality of superimposed parallel planar layers, said substrate having a major surface thereof lying in a plane parallel to said planar layers, comprising the steps of:

  • providing a first conductive planar layer as a first of said plurality of superimposed parallel planar layers;

    forming a pair of conductive strips in a next one of said superimposed parallel planar layers disposed on said first conductive layer;

    placing dielectric material between said conductive strips;

    forming a plurality of conductive strips in a plurality of successive ones of said plurality of superimposed parallel planar layers over said next one of said superimposed parallel planar layers;

    placing dielectric material between the conductive strips in each of said plurality of successive ones of said plurality of superimposed parallel planar layers;

    forming a pair of conductive strips in an additional one of said superimposed parallel planar layers on said plurality of successive planar layers;

    depositing dielectric material between said conductive strips of the additional one of said superimposed parallel planar layers; and

    forming a second conductive planar layer over said additional one of said superimposed parallel planar layers, selected ones of said plurality of conductive strips formed in the plurality of superimposed parallel planar layers being at least partially overlapping and electrically connected and arranged to form a coil having a plurality of turns disposed about and extending along an axis parallel to said plane of said planar substrate, said first and second conductive planar layers, said pairs of conductive strips and others of said plurality of conductive strips being at least partially overlapping and electrically connected and arranged to form a conductive shield spaced from said coil and extending along the length thereof.

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