Laser processing method
First Claim
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1. A laser processing method for scribing the surface of a workpiece, said method comprising:
- generating a laser beam;
modifying said beam to have a substantially rectangular shape; and
scribing said surface of said workpiece with said rectangular beam to form a groove in said surface, said scribing step including periodically moving said rectangular beam relative to and along said surface, each movement of said beam causing said beam to irradiate a portion of said surface to form said groove, each of said portions overlapping an adjacent one of said portions by a predetermined amount.
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Abstract
A laser processing method comprises the steps of generating a pulsed laser beam having a substantially circular shape; modifying the beam to a substantially rectangular shape; and scribing the surface of a workpiece with the rectangular beam to form grooves therein. The scribing step may include scanning the surface with the beam in a predetermined pattern, and aligning two parallel sides of the rectangular beam in parallel with the direction of the scanning. The beam may be made square, or may have unequal sides with the longer sides preferably arranged in parallel with the scanning direction.
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Citations
8 Claims
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1. A laser processing method for scribing the surface of a workpiece, said method comprising:
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generating a laser beam; modifying said beam to have a substantially rectangular shape; and scribing said surface of said workpiece with said rectangular beam to form a groove in said surface, said scribing step including periodically moving said rectangular beam relative to and along said surface, each movement of said beam causing said beam to irradiate a portion of said surface to form said groove, each of said portions overlapping an adjacent one of said portions by a predetermined amount. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification