Two-dimensional scanning photo-electric microscope

• US 4,734,578 A
• Filed: 03/26/1986
• Issued: 03/29/1988
• Est. Priority Date: 03/27/1985
• Status: Expired due to Term

• Current Assignee: Olympus Optical Corporation Limited (Olympus Corporation)
• Original Assignee: Olympus Optical Corporation Limited (Olympus Corporation)
• Inventors: Horikawa, Yoshiaki
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): Allen, Stephone B.
• Application Number:
  US06/844,167
• Time in Patent Office: 734 Days
• Field of Search: 250/234, 250/235, 356/442, 356/444, 356/432, 350/6.2, 350/6.5, 350/6.6, 350/6.7, 350/6.8, 350/6.9
• US Class Current: 250/234
• CPC Class Codes: G02B 21/002 Scanning microscopes scanning near field optical microscopes G01Q60/18

Abstract

A scanning type optical microscope comprising a pair of light deflectors disposed between a laser light source and an objective lens for performing two-dimensional scanning of an object requiring observation by varying the incidence angle of a light entering the objective lens, and a pair of split detectors receiving a light coming from said object, wherein the light deflectors are disposed at the position of the pupil of the objective lens or at a position conjugate therewith or in their vicinity. This microscope has a high resolving power and allows an easy performance of a special microscopy and is convenient to handle. The paired detectors are arranged to be rotatable about an optical axis and allows free alteration of the orientation of differentiation of the differential observation image. A light-blocking plate can be provided within the detecting optical system for removing O-order diffraction light contained in the detection light, whereby permitting dark field microscopy at a very low cost.

Claims

1. A two-dimensional scanning photo-electric microscope comprising:

a light source,

an objective lens for collecting light emitted from said light source onto an object to be observed;

light deflecting means disposed between said light source and said objective lens for deflecting light in a direction in which light coming from said light source travels and altering the angle of incidence of light entering into said object lens to thereby scan said object with the light,

said light deflecting means being disposed at one of a position including at a pupil position of said objective lens, at a position conjugate with said pupil position, and at a position located in the vicinity of these positions; and

a detecting optical system including photo-electric converting means which is a detector for receiving light coming from said object,

said photo-electric converting means being split by at least one interface so that a signal of a difference between output signals delivered from respective regions separated by said interface is determined by calculation to enable a differential image signal to be obtained.

2. A two-dimensional scanning photo-electric microscope according to claim 1, in which:

the light coming from said object is introduced to said photo-electric converting means through said objective lens.

5. A scanning type optical microscope according to claim 1 or 4, in which:

the orientation of said interface is variable.

6. A scanning type optical microscope according to claim 1 or 4, in which:

said detector is split symmetrically relative to said interface.

7. A scanning type optical microscope according to claim 1 or 4, in which:

said detector is split asymmetrically relative to said interface.

8. A two-dimensional scanning photo-electric microscope according to one of claim 1 or 5, in which:

said photo-electric converting means is further split into two regions of an inside and an outside by an interface so that edge portions of an image can be stressed only by output signals delivered from said outside regions.

9. A two-dimensional scanning photo-electric microscope according to claim 1, 3 or 4, in which:

a barrier filter for obtaining a fluorescence image is provided to be capable of being inserted into and removed from an optical path in front of said photo-electric converting means.

10. A two-dimensional scanning photo-electric microscrope according to one of claim 1, 3 or 4, in which:

said light source is a laser light source emitting linearly polarized light and a polarizing plate is provided to be capable of being inserted into and removed from an optical path in front of the photo-electric converting means of said detecting optical system so that a polarizing microscope image is realized when said polarizing plate is inserted into the optical path.

11. A scanning type optical microscope according to claim 1, 2, 3 or 4, further comprising:

image processing and indicating means connected to said detector to allow observation of the image of said object.

12. A two-dimensional scanning photo-electric microscope according to claim 1 or 3, in which:

light-blocking means is disposed to be capable of being inserted into and removed from an optical path at a position where the light coming from said object is collected in said detecting optical system so the O-order diffraction light coming from said object is eliminated when said light-blocking means is inserted into the optical path.

13. A two-dimensional scanning photo-electric microscope according to claim 1 or 3, in which:

pin-holes are provided to be capable of being inserted into and removed from an optical path both at a light-collecting position of said detecting optical system and at a position conjugate with said object in the rear of said light source, said pin-holes being simultaneously inserted into the optical path both at the positions to thereby form a confocal system.

14. A scanning type optical microscope according to claim 13, further comprising:

a reflecting mirror disposed in association with said detecting optical system to make it possible to reflect a light coming from said light source to overlap a light coming from said object to thereby obtain an interference fringe.

15. A two-dimensional scanning photo-electric microscope according to claim 1 or 4, in which:

said photo-electric converting means comprises two photo-electric converting elements and a prism mirror is arranged at a light-collecting position of said detecting optical system and divides light coming from said object into two rays so that the one is introduced to one photo-electric converting element and the other to another photo-electric converting element.

16. A two-dimensional scanning photo-electric microscope according to claim 1 or 3, in which:

said light source comprises a plurality of laser light sources emitting at least one of light beams of colors R (red), G (green) and B (blue) so that an optical system for synthesizing the light beams emitted from respective laser light sources is arranged between said laser light sources and so that a color separating optical system for separating the light beam coming from said object into said three colors R, G and B is arranged in the rear of the pin-hole of said detecting optical system, and said photo-electric converting means is provided with three photo-electric converting elements for receiving the separated light beams of respective colors R, G and B.

17. A two-dimensional scanning photo-electric microscope according to claim 1 or 3, in which:

a reflecting member is provided in the rear of an acousto-optic deflector so that an optical axis of a light beam incident on said acousto-optic deflector is perpendicular to that of a light beam reflected by said reflecting member.

18. A two-dimensional scanning photo-electric microscope according to claim 1 or 3, in which:

a converter lens capable of varying a flux of light is provided in the rear of said light source.

19. A scanning type optical microscope according to claim 1 or 3, further comprising:

a visual observation optical system removably provided between said light deflecting means and said objective lens.

20. A scanning type optical microscope according to claim 1 or 3, in which:

a pupil projecting lens is interchangeably disposed between said light deflecting means and said objective lens.

21. A scanning type optical microscope according to claim 20, in which:

said pupil projecting lens is a zoom lens.

3. A two-dimensional scanning photo-electric microscope comprising:

a light source;

an objective lens means disposed between said light source and said objective lens for deflecting light in a direction in which light coming from said light source travels and altering the angle of incidence of light entering into said objective lens to thereby scan said object with the light,

said light deflecting means being disposed at one of a position including at a pupil position of said objective lens, at a position conjugate with said pupil position and at a position located in the vicinity of these positions, and

a detecting optical system including photo-electric converting means which is a detector for receiving light transmitted through said object and a light collecting lens for introducing light coming from said object to said photo-electric converting means,

said photo-electric converting means being disposed either at one of a position including conjugate with a pupil position of said objective lens, with respect to said light collecting lens, and at a position located in the vicinity of said conjugate position.

4. A two-dimensional scanning photo-electric microscope according to claim 3, in which:

said photo-electric converting means is split by at least one interface so that a signal of a difference between output signals delivered from respective regions separated by said interface is determined by calculation to enable a differential image signal to be obtained.