Piezoelectric deformable mirrors and gratings

• US 4,736,132 A
• Filed: 09/14/1987
• Issued: 04/05/1988
• Est. Priority Date: 09/14/1987
• Status: Expired due to Fees

• Current Assignee: Rockwell International Corporation
• Original Assignee: Rockwell International Corporation
• Inventors: Culp, Gordon W.
• Primary Examiner(s): Budd, Mark O.
• Application Number:
  US07/096,880
• Time in Patent Office: 204 Days
• Field of Search: 310/323, 310/328, 310/330-333, 350/486, 350/487, 350/632, 350/636, 350/637, 350/611, 350/6.6
• US Class Current: 310/333
• CPC Class Codes: G02B 26/06 for controlling the phase of light G02B26/08 takes precedence , measuring optical phase difference G01J9/00
• CPC Class Codes: G02B 26/0825 the reflecting element being a flexible sheet or membrane, e.g. for varying the focus flexible mirrors for cosmetic use A45D42/24
• CPC Class Codes: H10N 30/208 using shear or torsion displacement, e.g. d15 type devices

Abstract

An apparatus and method for rapidly and accurately positioning an optical surface comprises at least one piezoelectric element 10 with an optical surface 16 located thereon and means 12,30 for applying an electric field to the piezoelectric element 10. The piezoelectric element 10 is piezoelectrically polarized along a first axis and the electric field is supplied along a second axis perpendicular to the first axis. Thus, piezoelectric shear deformation of the piezoelectric element occurs and there is rotation of the optical surface 16 about a third axis which is perpendicular to both the first and second axes. The deformation is sufficient to alter the direction of incident radiation and to alter the direction and distribution of diffracted incident radiation after interaction with the optical surface 16. Varying the magnitude of the electric field alters the magnitude of the deformation thereby accurately positioning the optical surface 16.

Claims

1. An apparatus for rapidly and accurately positioning an optical surface, comprising:

at least one piezoelectric element;

an optical surface located on said piezoelectric element for altering the direction of incident acoustic or electromagnetic radiation, said piezoelectric element being piezoelectrically polarized along a first axis; and

means for applying an electric field to said piezoelectric element along a second axis perpendicular to said first axis for causing piezoelectric shear deformation of said piezoelectric element and rotation of said optical surface about a third axis which is perpendicular to both said first and said second axes, said deformation being sufficient to alter the direction of said incident radiation and to alter the direction and distribution of diffracted incident radiation after interaction with said optical surface;

wherein varying the magnitude of said electric field alters the magnitude of said deformation thereby accurately positioning said optical surface.

2. The apparatus of claim 1 wherein said first axis is perpendicular to said optical surface.

3. The apparatus of claim 1, wherein said optical surface is a reflective surface.

4. The apparatus of claim 1, wherein said optical surface is a refractive surface.

5. The apparatus of claim 1, wherein said optical surface is at least one segment of a diffractive surface.

6. The apparatus of claim 1, wherein said piezoelectric element has a substantially rectangular cross section in the unenergized state, said piezoelectric element including a bottom surface located on an opposite end of said piezoelectric element from said optical surface, and two side surfaces.

7. The apparatus of claim 6, wherein said means for applying an electric field includes an electrode extending through the approximate center of said bottom surface and into said piezoelectric element toward said optical surface.

8. The apparatus of claim 7, wherein said means for applying an electric field further includes two side electrodes, each located at a respective side surface.

9. The apparatus of claim 6, wherein said means for applying an electric field includes a first electrode extending along one of said side surfaces of said piezoelectric element, and a second electrode extending along the other of said side surfaces.

10. The apparatus of claim 6, including a plurality of closely spaced piezoelectric elements, a side surface of each piezoelectric element located adjacent a side surface of another piezoelectric element, the optical surface of each piezoelectric element being coplaner with the adjacent said optical surfaces when all said elements are unenergized.

11. The apparatus of claim 10, wherein said means for applying an electric field includes a plurality of central electrodes, each central electrode extending through the approximate center of the bottom surface of a respective piezoelectric element and toward the optical surface, each central electrode extending along the length of said piezoelectric element.

12. The apparatus of claim 11, wherein said means for applying an electric field further includes a plurality of side electrodes, each side electrode being located on a respective side surface.

13. The apparatus of claim 12, wherein each of said piezoelectric elements is piezoelectrically polarized in anti-parallel directions on each side of its center electrode.

14. The apparatus of claim 12, further including base support means for supporting said plurality of central electrodes along a common plane.

15. The apparatus of claim 10, further including electrical insulation means located along an outer periphery of said side electrodes to electrically insulate the piezoelectric elements from each other.

16. The apparatus of claim 8, further including a plurality of piezoelectric elements, each piezoelectric element being attached at a first side surface to a different step on a stepped base, each said piezoelectric element being piezoelectrically polarized in a parallel direction on each side of its center electrode, said optical surface comprising a planar mirror being attached to the half of each piezoelectric element located at the second side surface and thereby forming a narrow angle, high resolution, reflective echelle optical grating.

17. The apparatus of claim 16, wherein said stepped base is rotated to affect a change in distance between adjacent said optical surfaces which is larger than the positioning range of said piezoelectric elements.

18. The apparatus of claim 10, wherein said means for applying an electric field includes a plurality of first electrodes, each first electrode extending along one side surface of each piezoelectric element and a plurality of second electrodes, each second electrode extending along the other side surface of each piezoelectric element.

19. The apparatus of claim 18, wherein each said second electrode supports each said piezoelectric element.

20. A method for rapidly and accurately positioning an optical surface, comprising the steps of:

providing at least one piezoelectric element being piezoelectrically polarized along a first axis, said at least one piezoelectric element having an optical surface for altering the direction of incident acoustic or electromagnetic radiation; and

applying an electric field to said piezoelectric element along a second axis perpendicular to said first axis for causing piezoelectric shear deformation of said piezoelectric element and rotation of said optical surface about a third axis which is perpendicular to both said first and said second axes, said deformation being sufficient to alter the direction of said incident radiation after interaction with said optical surface;

wherein varying the magnitude of said electric field alters the magnitude of said deformation thereby accurately positioning said optical surface.