Method and apparatus for operating one or more deposition systems

• US 4,736,304 A
• Filed: 04/07/1986
• Issued: 04/05/1988
• Est. Priority Date: 04/07/1986
• Status: Expired due to Term

• Current Assignee: Energy Conversion Devices
• Original Assignee: Energy Conversion Devices
• Inventors: Doehler, Joachim
• Primary Examiner(s): NOT, DEFINED
• Assistant Examiner(s): Lastova, John R.
• Application Number:
  US06/848,934
• Time in Patent Office: 729 Days
• Field of Search: 427/8, 427/10, 427/11, 364/131, 364/133, 364/136, 364/138, 364/468, 364/469, 364/496, 118/695, 118/696, 118/697, 118/698, 118/704, 118/707, 118/708, 118/712
• US Class Current: 700/123
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: G05B 19/0423 Input/output
• CPC Class Codes: G05B 19/0428 Safety, monitoring G05B19/0423 takes precedence
• CPC Class Codes: G05B 2219/24115 Continue critical operation only if detector, operator input is satisfied
• CPC Class Codes: G05B 2219/24199 Recover from fault, malfunction, go to safe state, correct and set new sequence

Abstract

There are disclosed a method and apparatus for improved operation of one or more deposition systems. A minimum expenditure malfunction recovery system provides for a variable recovery related to the current hardware and actual states of the system. A simplified input and output (I/O) device is provided to control the data flow in the system without addressing and decoding complexity. A flexible operation system is also provided for a plurality of deposition systems whose operation easily can be varied without reprogramming of the operating sequence.

Claims

1. A method of providing a flexible multiple deposition operating system, said method comprising:

providing at least two deposition system programs;

providing a plurality of service system programs, each said service system program adapted to carry out at least one fabrication task of the deposition system program;

providing a separate recipe file program, said recipe file program adapted to coordinate interaction between said deposition and service system programs;

providing a control program which coordinates the interaction between the recipe file program and the deposition and service system program; and

revising only said recipe file program to effect changes in said deposition and service system programs.

2. The method as defined in claim 1 including operating said two deposition systems entirely separately from one another.

3. The method as defined in claim 1 including independently controlling each of said deposition system programs and said service system programs by individual, respective operation programs, adapted to operate said system programs in a manner consistant with the deposition parameters of the recipe file program.

4. The method as definad in claim 1 including providing a priority for service system operations to maximize the system efficiency and flexibility.

5. An apparatus for providing a flexible, multiple deposition operating system, said apparatus comprising:

at least two deposition system programs;

said deposition system programs including a plurality of service system programs, each said service system programs adapted to carry out at least one fabrication task;

each of said deposition and service system programs including a separate recipe file program adapted to coordinate interaction between said deposition and service system programs;

control program means adapted to coordinate interaction between the recipe file program and the deposition and service system programs; and

means for revising only said recipe file programs to effect changes in said deposition and service system programs.

6. The apparatus as defined in claim 5 including means for operating said two deposition systems entirely separately from one another.

7. The apparatus as defined in claim 5 including means for independently controlling each of said deposition system programs and said service system programs by individual, respective operation programs adapted to operate said system programs in a manner consistent with the deposition parameters of the recipe file program.