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Method and apparatus for operating one or more deposition systems

  • US 4,736,304 A
  • Filed: 04/07/1986
  • Issued: 04/05/1988
  • Est. Priority Date: 04/07/1986
  • Status: Expired due to Term
First Claim
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1. A method of providing a flexible multiple deposition operating system, said method comprising:

  • providing at least two deposition system programs;

    providing a plurality of service system programs, each said service system program adapted to carry out at least one fabrication task of the deposition system program;

    providing a separate recipe file program, said recipe file program adapted to coordinate interaction between said deposition and service system programs;

    providing a control program which coordinates the interaction between the recipe file program and the deposition and service system program; and

    revising only said recipe file program to effect changes in said deposition and service system programs.

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