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Z-axis height measurement system

  • US 4,743,771 A
  • Filed: 06/17/1985
  • Issued: 05/10/1988
  • Est. Priority Date: 06/17/1985
  • Status: Expired due to Term
First Claim
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1. A non-contact Z-axis probe for making height measurements comprising:

  • an optical system for projecting a given image from a reticle through a beamsplitting mirror to form a projected image on a selected area that is aligned with the beamsplitting mirror along the Z axis, said reticle being located a fixed distance from said beamsplitting mirror;

    a video camera and said optical system mounted for movement in the Z direction and adapted to move in the Z direction,said camera located a fixed distance from said beamsplitting mirror along the Z axis for viewing said projected image,said video camera continuously scanning reflected energy from said projected image while said camera is moved in the Z axis for generating an output signal that varies in amplitude as a function of distance from said selected area,and a computer for statistically evaluating the output signal to determine the theoretical maximum amplitude of a focus indicating characteristic of the output signals and correlating that theoretical maximum amplitude with the position of said camera as a function of height of camera above said selected area.

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