Integrated circuit for a chemical-selective sensor with voltage output

• US 4,743,954 A
• Filed: 06/07/1985
• Issued: 05/10/1988
• Est. Priority Date: 06/07/1985
• Status: Expired due to Term

• Current Assignee: University Of Utah
• Original Assignee: University of Utah (State of Utah)
• Inventors: Brown, Richard B.
• Primary Examiner(s): LARKINS, WILLIAM
• Application Number:
  US06/742,721
• Time in Patent Office: 1,068 Days
• Field of Search: 357/25, 357/40, 357/23.15, 357/41, 357/45, 357/48
• US Class Current: 257/253
• CPC Class Codes: G01N 27/4148 Integrated circuits therefor, e.g. fabricated by CMOS processing CMOS processing per se H01L21/82
• CPC Class Codes: H01L 27/00 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate details thereof H01L23/00, H01L29/00 - H10K10/00; assemblies consisting of a plurality of individual solid state devices H01L25/00

Abstract

An integrated circuit for a miniaturized solid-state chemical sensor. The integrated circuit includes a chemical-selective membrane which provides an electric signal in response to contact with a particular chemical or group of chemicals in a fluid. The chemical-selective membrane is attached to the integrated circuit by a membrane definition layer. An electrically conductive layer beneath the membrane definition layer provides electrical contact between the chemical-selective membrane and one of the input transistors of the voltage-follower amplifier. The chemical-selective membrane is formed separately from the gate of the input transistors and is designed as a integrated input to the amplifier. The output of the chemical sensor is a low impedance electric signal represented as a voltage which corresponds to the chemical activity present at the chemical-selective membrane/fluid interface. In one embodiment, multiple chemical sensors are fabricated on a single integrated circuit wherein each chemical-selective sensor forms an integrated input to a separate amplifier. Included on the integrated circuit of that embodiment is circuitry to allow for multiplexing of the outputs of the amplifiers to one or both of two output pads provided on the integrated circuit.

Claims

1. An integrated circuit for a miniaturized solid-state chemical sensor, said integrated circuit comprising:

a semiconductor substrate;

a plurality of layers formed on said substrate so as to define a plurality of transistors configured as an amplifier, two of said transistors comprising field-effect input transistors with essentially identical dimensions and gate electrodes;

a chemical-selective membrane;

a membrane definition layer applied over said layers defining said amplifier, said membrane definition layer comprising a well for receiving said chemical-selective membrane, said well being formed in sufficient proximity to said gate electrode of at least one of said input transistors such that said chemical-selective membrane is separated from said gate electrode by no greater distance than the largest dimension of said input transistors;

means formed on said substrate for electrically connecting said chemical-selective membrane to said gate electrode of one of said input transistors; and

said gate electrode of said other input transistor being electrically connected to said output of said amplifier to provide a unity-gain buffer.

2. An integrated circuit as defined in claim 1 wherein said means formed on said substrate for electrically connecting said chemical-selective membrane to said gate material of one of said input transistors comprises a metal layer interposed between said membrane definition layer and said layers forming said transistors.

3. An integrated circuit as defined in claim 2 wherein said metal layer comprises a first contact location electrically connected to said chemical-selective membrane and a second contact location electrically connected to said gate electrode of one of said input transistors.

4. An integrated circuit as defined in claim 3 wherein said means formed on said substrate for electrically connecting said chemical-selective membrane to said gate electrode of one of said input transistors further comprises a passivation layer formed over said metal layer and having an opening formed therein so as to define said first contact location on said metal layer, and further comprising an insulating layer formed under said metal layer and having an opening formed therein so as to define said second contact location.

5. An integrated circuit as defined in claim 3 wherein said membrane definition layer comprises a well formed in said membrane definition layer over said first contact location, and wherein said chemical-selective membrane is deposited in said well so as to electrically contact said metal layer at said first contact location.

6. An integrated circuit as defined in claim 5 wherein said membrane definition layer is completely formed by a planar process.

7. An integrated circuit as defined in claim 6 wherein said planar process comprises the steps of:

coating the top of said integrated circuit with a layer of a photosensitive emulsion;

patterning said layer of photosensitive emulsion with a mask and etching said emulsion so as to leave a chimney defined by said mask at the place where said well is to be formed;

coating the surface of said integrated circuit with a layer of epoxy and lapping said epoxy down to the level of said chimney; and

stripping said emulsion forming said chimney so as to leave said well in said layer of epoxy.

8. An integrated circuit as defined in claim 6 wherein said planar process comprises the steps of:

spinning a layer of epoxy onto the top of said integrated circuit;

coating said layer of epoxy with a layer of material from the group of materials consisting of aluminum and polysilicon;

patterning said layer of material with a mask to defined the location at which said well is to be formed; and

etching said layer of epoxy to form said well at said location.

9. An integrated circuit as defined in claim 6 wherein said planar process comprises the steps of:

coating the top of said integrated circuit with a layer of dry film acrylic photopolymer;

patterning said layer of photopolymer with a mask layout to define said well; and

curing said layer of photopolymer.

10. An integrated circuit as defined in claim 6 wherein said planar process comprises the steps of:

spinning a layer of polyimide onto the top of said integrated circuit;

coating said layer of polimide with a photoresist;

patterning said photoresit with a mask layout to define the location at which said well is to be formed; and

etching said layer of polyimide to form said well at said location, and stripping away said photoresist.

11. An integrated circuit as defined in claim 5 wherein said chemical-selective membrane comprises a liquid ion exchanger and wherein the size of said well is selected such that said liquid is held in said well by surface tension.

12. An integrated circuit as defined in claim 5 wherein said chemical-selective membrane comprises a solvent-cast polymeric membrane.

13. An integrated circuit as defined in claim 1 wherein said transistors are connected to form a plurality of voltage-follower amplifiers, each said amplifier comprising a pair of field-effect input transistors having essentially identical dimensions and gate electrodes.

14. An integrated circuit as defined in claim 13 further comprising a plurality of chemical-selective membranes held by said membrane definition layer, and wherein said means formed on said substrate comprises means for electrically connecting each said membrane to said gate electrode of one of said pair of input transistors of a corresponding amplifier for said membrane.

15. An integrated circuit as defined in claim 14 wherein one or more of said membranes are adapted to sense a different chemical than the chemical sensed by the other said membranes.

16. An integrated circuit as defined in claim 14 further comprising means for outputting an electrical signal from at least one of said amplifiers, and means for selectively switching from one of said amplifiers to another so as to be able to selectively connect an output voltage from any said amplifier to said means for outputting said electrical signal.

17. An integrated circuit for a miniaturized solid-state chemical sensor adapted to sense one or more selected chemicals in a fluid, said integrated circuit comprising:

a semiconductor substrate;

a plurality of layers formed on said substrate so as to define a plurality of transistors interconnected to form a plurality of voltage-follower amplifiers, each said amplifier comprising a pair of field-effect input transistors having essentially identical dimensions and gate electrodes;

a membrane definition layer applied over said layers defining said amplifiers;

a plurality of chemical-selective membranes held by said membrane definition layer, each said membrane being secured to a region of said membrane definition layer so as to be essentially immediately adjacent the gate electrode of a corresponding input transistor;

a metal layer formed between said membrane definition layer and said plurality of layers defining said transistors, said metal layer comprising a series of electrical contact locations providing electrical contact between each said chemical-selective membrane and the gate electrode of one of said input transistors of a corresponding amplifier for said chemical-selective membrane; and

said plurality of layers further defining means formed on said substrate for outputting an electrical signal from at least one of said amplifiers, and means for selectively switching from one of said amplifiers to another so as to be able to selectively connect an output voltage from any said amplifier to said means for outputting said electrical signal.

18. An integrated circuit as defined in claim 17 wherein one or more of said chemical-selective membranes are adapted to sense a different chemical than the chemical sensed by the other said membranes.

19. An integrated circuit as defined in claim 17 wherein said membrane definition layer is completely formed by a planar surface.

20. An integrated circuit as defined in claim 19 wherein said planar process comprises the steps of:

coating the top of said integrated circuit with a layer of a photosensitive emulsion;

patterning said layer of photosensitive emulsion with a mask and etching said emulsion so as to leave a chimney defined by said mask at the place where said well is to be formed;

coating the surface of said integrated circuit with a layer of epoxy and lapping said epoxy down to the level of said chimney; and

stripping said emulsion forming said chimney so as to leave said well in said layer of epoxy.

21. An integrated circuit as defined in claim 19 wherein said planar process comprises the steps of:

spinning a layer of epoxy onto the top of said integrated circuit;

coating said layer of epoxy with a layer of material from the group of materials consisting of aluminum and polysilicon;

patterning said layer of material with a mask to define the location at which said well is to be formed; and

etching said layer of epoxy to form said well at said location.

22. An integrated circuit as defined in claim 19 wherein said planar process comprises the steps of:

coating the top of said integrated circuit with a layer of dry film acrylic photopolymer;

patterning said layer of photopolymer with a mask layout to define said well; and

curing said layer of photopolymer.

23. An integrated circuit as defined in claim 19 wherein said planar process comprises the steps of:

spinning a layer of polyimide onto the top of said integrated circuit;

coating said layer of poylimide with a photoresist;

patterning said photoresist with a mask layout to define the location at which said well is to be formed; and

etching said layer of polyimide to form said well at said location, and stripping away said photoresist.

24. An integrated circuit as defined in claim 17 wherein at least one of said chemical-selective membranes comprises a liquid ion exchanger.

25. An integrated circuit as defined in claim 17 wherein at least one of said chemical-selective membranes comprises a solvent-cast polymeric membrane.

26. An integrated circuit as defined in claim 17 further comprising a junction isolation layer formed around the entire periphery of said layers forming said transistors so as to extend to and slightly under the edges of said layers forming said transistors.

27. An integrated circuit as defined in claim 26 wherein said passivation layer overlaps the edges of said junction isolation layer, and wherein said layers forming said transistors are chemically and electrically isolated from said fluid by the combination of said substrate, said junction isolation layer and said passivation layer.

28. An integrated circuit as defined in claim 27 further comprising means for providing an internal ground connection, and wherein said substrate and said junction isolation layer are electrically connected to said internal ground connection so as to form a solution contact for referencing an output voltage of each said amplifier.