Vibrating accelerometer-multisensor
First Claim
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1. A multisensor, responsive to the linear acceleration and rate of rotation of a body comprising, in combination:
- (a) a first accelerometer responsive to linear acceleration along a first preselected sensing axis;
(b) a second accelerometer responsive to linear acceleration along a second preselected sensing axis;
(c) a pair of double diaphragm suspensions, including an electromagnet mounted between said double diaphragm suspensions, arranged and positioned to constrain said accelerometers so that said first preselected sensing axis is orthogonal to said second preselected sensing axis;
(d) means for vibrating said accelerometers out of phase; and
(e) means connected to receive the output signals of said accelerometers and to separate signals which are measures of the Coriolis accelerations exerted upon said accelerometers from signals caused by acceleration along the respective sensing axes of said accelerometers.
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Abstract
A vibrating multisensor, each using two accelerometers which are vibrated along straight lines perpendicular to their sensing axes. In one embodiment, the sensing axes are co-linear, and in another embodiment the sensing axes are perpendicular. The accelerometers preferably use a proof mass and flexure suspension made on a silicon wafer sandwiched between two other wafers that carry electrodes both for sensing displacement and forcing of the central accelerometer wafer.
137 Citations
10 Claims
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1. A multisensor, responsive to the linear acceleration and rate of rotation of a body comprising, in combination:
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(a) a first accelerometer responsive to linear acceleration along a first preselected sensing axis; (b) a second accelerometer responsive to linear acceleration along a second preselected sensing axis; (c) a pair of double diaphragm suspensions, including an electromagnet mounted between said double diaphragm suspensions, arranged and positioned to constrain said accelerometers so that said first preselected sensing axis is orthogonal to said second preselected sensing axis; (d) means for vibrating said accelerometers out of phase; and (e) means connected to receive the output signals of said accelerometers and to separate signals which are measures of the Coriolis accelerations exerted upon said accelerometers from signals caused by acceleration along the respective sensing axes of said accelerometers. - View Dependent Claims (2, 3)
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4. A multisensor, responsive to the linear acceleration and rate of rotation of a body comprising, in combination:
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(a) a first accelerometer responsive to linear acceleration along a first preselected sensing axis; (b) a second accelerometer responsive to linear acceleration along a second preselected sensing axis; (c) each of said first and second accelerometers comprising a first planar substrate of semiconductor material having an opening therein that defines the periphery of an acceleration sensitive mass;
said acceleration sensitive mass being connected to said semiconductor substrate by a plurality of crossed beam flexure blades formed by anisotropic etching of a single crystal of silicon;
second and third planar substrates mounted on opposite sides of said first planar substrate, each having a conductive surface adjacent said acceleration sensitive mass;
means for applying an electrical potential between said acceleration sensitive mass and said conductive surfaces on said second and third substrates; and
electrical integrated circuit means formed within said semiconductor material of said first planar substrate to connect said electrical potential to said acceleration sensitive mass;(d) a pair of double-diaphragm suspensions, arranged and positioned to constrain said accelerometers so that said first preselected sensing axis is orthogonal to said second preselected sensing axis; (e) means for vibrating said accelerometers in phase opposition; and (f) means connected to receive the output signals of said accelerometers and to separate signals which are measures of the Coriolis accelerations exerted upon said accelerometers from signals caused by acceleration along the respective sensing axes of said accelerometers. - View Dependent Claims (5, 6, 7, 8, 9, 10)
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Specification