Laser beam homogenizer

• US 4,744,615 A
• Filed: 01/29/1986
• Issued: 05/17/1988
• Est. Priority Date: 01/29/1986
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Tibbetts, Raymond E., Fan, Bunsen, Wilczynski, Janusz S., Witman, David F.
• Primary Examiner(s): Sikes, William L.
• Assistant Examiner(s): HEALY, BRIAN
• Application Number:
  US06/823,554
• Time in Patent Office: 839 Days
• Field of Search: 350/96.10, 350/96.11, 350/96.12, 350/96.25, 350/96.28, 350/96.30, 350/523, 350/527, 350/445, 350/355, 350/356, 372/6, 372/7, 372/9, 372/12, 372/29, 372/57, 372/33, 362/32, 362/259, 352/203, 219/121 LA, 219/121 LT
• US Class Current: 385/146
• CPC Class Codes: G02B 27/09 Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for adapting the beam shape of a laser diode G02B19/0052; adapting the beam shape of an LED G02B19/0061; coupling into light guides using intermediate optical elements G02B6/4204; beam shaping specially adapted for lasers H01S3/005
• CPC Class Codes: G02B 27/0994 Fibers, light pipes optical fibers per se G02B6/02
• CPC Class Codes: G03F 7/70075 Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
• CPC Class Codes: G03F 7/70583 Speckle reduction, e.g. coherence control or amplitude/wavefront splitting

Abstract

A coherent laser beam having a possibly non-uniform spatial intensity distribution is transformed into an incoherent light beam having a substantially uniform spatial intensity distribution by homogenizing the laser beam with a light tunnel (a transparent light passageway having flat internally reflective side surfaces). It has been determined that when the cross-section of the tunnel is a polygon (as preferred) and the sides of the tunnel are all parallel to the axis of the tunnel (as preferred), the laser light at the exit of the light tunnel (or alternatively at any image plane with respect thereto) will have a substantially uniform intensity distribution and will be incoherent only when the aspect ratio of the tunnel (length divided by width) equals or exceeds the contangent of the input beam divergence angle θ and when

W.sub.min =L.sub.coh (R+(1+R.sup.2).sup.1/2)>2RL.sub.coh,

where W_min is the minimum required width for the light tunnel, L_coh is the effective coherence length of the laser light being homogenized and R is the chosen aspect ratio for the light tunnel.

Claims

1. Apparatus for uniformly illuminating a substantially flat plane with light from a coherent laser source, comprising

means forming a diverging laser light beam which diverges from a central optical axis, the light in said beam having a coherence length L_c an having possibly a non-uniform spatial intensity distribution;

a light tunnel receiving said diverging laser beam, said light tunnel having flat internally reflective sides parallel to said optical axis and to each other to provide a light tunnel with a uniform size cross section for forming an array of apparent laser light sources, the light from each apparent source in said array being superposed by said light tunnel at the exit of said light tunnel, each individual light ray from each apparent source following a distinct light path to an illumination plane, each of said distinct light paths having an individual path length; and

means providing a minimum difference between the individual path lengths of any two rays coincident at said illumination plane and arising from adjacent apparent sources in said array, said minimum path length difference being equal to or greater than the coherence length L_c of said laser beam.

2. Apparatus as defined in claim 1 wherein said minimum path length difference providing means comprises a minimum width for said light tunnel equal to L_coh cosθ

(1-cosθ

), where θ

is the beam angle of said diverging laser beam and L_coh is the effective coherence length of the light in said beam.

3. Apparatus as defined in claim 1 wherein said minimum path length difference providing means comprises a retardation plate positioned at a plane where the light rays corresponding to each distinct apparent source are spatially distinct from each other, distinct spatial regions of said plate corresponding uniquely with each separate apparent source, said distinct spatial regions of said plate providing different amounts of retardation for the rays of each adjacent apparent light source.

4. Apparatus as defined in claim 1 wherein said light tunnel has an aspect ratio R equal to or exceeding cot θ

, where θ

is the beam angle of said diverging laser beam and R is the distance between the focal point defined by said diverging laser beam and the exit of said light tunnel divided by the width of said light tunnel.

5. Apparatus as defined in claim 1 wherein said laser source is an excimer laser having a coherence length of less than 10 centimeters.

6. Apparatus as defined in claim 1 wherein said light tunnel has an even number of at least four flat reflective parallel sides.

7. Apparatus for uniformly illuminating a plane with light from a coherent laser source, comprising:

means forming a diverging laser light beam, said diverging light beam defining a focal point, a focal plane and a beam axis, the light in said beam having an effective coherence length L_coh and having possibly a non-uniform spatial intensity distribution;

a light tunnel having at least four substantially flat internally reflective sides all approximately parallel with said beam axis to provide a uniform size tunnel cross section, said light tunnel having an entrance receiving at least a portion of said diverging laser beam and having an exit, said portion of said light beam received by said tunnel having a beam diverge angle;

the distance L between said tunnel exit and said focal point divided by the minimum transverse dimension W of said light tunnel defining an aspect ration R, said aspect ratio R being no less than tahe cotangent of said beam divergence angle; and

said minimum transverse dimension W of said light tunnel being no less than twice said aspect ratio R times said effective coherence length L_coh.

8. Apparatus as defined in claim 16 wherein said minimum transverse dimension W is no less than the effective coherence length L_coh times the sum of the aspect ratio R and the square root of the quantity 1 plus the aspect ratio R squared.