Process for depositing a composite ceramic coating on a cemented carbide substrate

• US 4,745,010 A
• Filed: 01/20/1987
• Issued: 05/17/1988
• Est. Priority Date: 01/20/1987
• Status: Expired due to Term

• Current Assignee: GTE Valenite Corp. (Verizon Communications Inc.)
• Original Assignee: GTE Laboratories Incorporated (Lumen Technologies, Inc.)
• Inventors: Sarin, Vinod K., Gindraux, Gilbert, Hintermann, Hans E.
• Primary Examiner(s): NOT, DEFINED
• Application Number:
  US07/005,001
• Time in Patent Office: 483 Days
• Field of Search: 427/255.2, 427/255.3, 427/255, 427/255.7, 427/249, 427/419.2, 427/419.7
• US Class Current: 427/255.15
• CPC Class Codes: C23C 16/40 Oxides
• CPC Class Codes: C23C 16/403 of aluminium, magnesium or beryllium
• CPC Class Codes: C23C 16/405 of refractory metals or yttrium

Abstract

A process for producing a wear resistant article, such as a cutting tool. Gaseous halides of two or more of aluminum, zirconium, and yttrium with other reactants are passed over a cemented carbide substrate at 900°-1250° C. and 1 torr to about ambient pressure to form a composite ceramic coating on the substrate. The coating is a continuous first-phase metal oxide matrix having particles of at least one different metal oxide dispersed therein. In a preferred process, one or more of the metal halides is pulsed into the gaseous mixture containing a different metal halide to control the deposition of the particles.

Claims

1. In a process for depositing a wear resistant ceramic coating on a cemented carbide substrate comprising the step of:

passing over the cemented carbide substrate a first gaseous mixture of a first halide vapor selected from the group consisting of halides of aluminum, yttrium, and zirconium, with one or more volatile oxidizing gases, and optionally a carrier gas, at a temperature of about 900°

-1250°

C., at a pressure between about 1 torr and about ambient pressure, and at partial pressure ratios, at a flow rate, and for a time sufficient to deposit a continuous, fully dense, adherent, wear resistant layer of a material selected from the group consisting of oxides of aluminum, zirconium, and yttrium about 0.1-20 microns thick on the cemented carbide substrate;

the improvement which comprises the steps of;

mixing with the first gaseous mixture at least one additional vapor selected from the halides of aluminum, zirconium, and yttrium;

wherein the additional vapor is different from the first halide vapor, and is mixed at a partial pressure selected to form at least one discontinuous additional phase, dispersed as discrete particles within the continuous oxide layer, of at least one material selected from the group consisting of oxides of aluminum, zirconium, and ytrrium, to form a wear resistant composite ceramic layer on the cemented carbide substrate.

2. A process according to claim 1 further comprising the step of depositing between the cemented carbide substrate and the composite ceramic layer at least one intermediate layer about 0.5-10 microns thick selected from the group consisting of carbides, nitrides, and carbonitrides of Ti, Zr, Hf, Va, Nb, Ta, Cr, Mo, W, Si and B.

3. A process for depositing a wear resistant composite ceramic coating on a cemented carbide substrate comprising the steps of:

passing over the cemented carbide substrate a first gaseous mixture of a first halide vapor selected from the group consisting of halides of aluminum, yttrium, and zirconium, with one or more volatile oxidizing gases, and optionally a carrier gas, at a temperature of about 900°

-1250°

C. at a pressure between 1 torr and about ambient pressure, wherein the one or more volatile oxidizing gases, the partial pressure ratios, the flow rates, and the deposition time are selected so that a continuous, fully dense, adherent, wear resistant first-phase layer of a material selected from the group consisting of oxides of aluminum, zirconium, and ytrrium about 0.1-20 microns thick is deposited on the cemented carbide substrate; and

interrmittently, during the deposition of the continuous oxide layer, pulsing into the first gaseous mixture to mix therewith at least one additional vapor selected from the halides of aluminum, zirconium, and yttrium, optionally mixed with a carrier gas;

wherein the at least one additional vapor is different from the first halide vapor and is mixed at a partial pressure, at time intervals, and for lengths of time selected to form at least one discontinuous additional phase, dispersed as discrete particles within the continuous oxide layer, of at least one material selected from the group consisting of oxides of aluminum, zirconium, and yttrium to form a wear resistant composite ceramic layer on the cemented carbide substrate.

4. A process according to claim 3 further comprising the step of controlling the size and distribution within the oxide layer of the additional phase particles by controlling the partial pressure, the time intervals, and the lengths of time at which the at least one additional vapor is pulsed into the first gaseous mixture.

5. A process according to claim 4 wherein the step of deposition of the continuous oxide layer is carried out for a sufficient time before the pulsing step is begun to form a single-phase, continuous oxide portion separating the cemented carbide substrate and the two or more phase portion of the composite ceramic coating.

6. A process according to claim 4 wherein the intermittent pulsing step occurs at time intervals and for times selected to form a stratified composite ceramic layer in which two or more phase portions alternate with single-phase, continuous oxide portions.

7. A process according to claim 3 further comprising the step of depositing between the cemented carbide substrate and the composite ceramic layer at least one intermediate layer about 0.5-10 microns thick selected from the group consisting of carbides, nitrides, and carbonitrides of Ti, Zr, Hf, Va, Nb, Ta, Cr, Mo, W, Si and B.

8. A process according to claim 3 further comprising the step of depositing between the cemented carbide substrate and the composite ceramic layer an intermediate layer of TiC or TiN about 2-5 microns thick;

and wherein the first gaseous mixture consists essentially of 2.5-21 volume % CO₂, 47-64 volume % hydrogen, and 1.5-30 volume % AlCl₃, the remainder being argon, passing over the cemented carbide substrate at a temperature of 1000°

-1100°

C., a pressure of 50-100 torr, and a flow rate of 1100-1500 cm³ /min for 2.5 to 5 hr; and

the at least one additional vapor is 0.5-2.5 volume % ZrCl₄ pulsed for about 1-10 min at intervals of about 2-6 times the pulse time, to deposit a composite ceramic layer consisting of a first, continuous phase of Al₂ O₃ and a discontinuous additional phase of discrete grains of ZrO₂ dispersed within the Al₂ O₃ first phase.

9. A process according to claim 8 further comprising the step of controlling the size and distribution within the oxide layer of the additional phase particles by controlling the partial pressure, the time intervals, and the lengths of time at which the at least one additional vapor is pulsed into the first mixture.

10. A process according to claim 8 wherein the intermediate layer is TiC about 3.0-3.5 microns thick;

the first gaseous mixture consists essentially of about 7 volume % CO₂, 88 volume % hydrogen, 2.5 volume % AlCl₃, the remainder being argon, passing over the cemented carbide substrate at a temperature of about 1040°

C., a pressure of about 50 torr, and a flow rate of about 1420 cm³ /min for about 3.5 hrs; and

about 2.5 volume % ZrCl₄ is pulsed for about 8 min of each 22 min during the last 2.5 hrs.

11. A process for depositing a wear resistant composite coating on a cemented carbide substrate comprising the steps of:

passing a halide vapor, optionally mixed with a carrier gas, over a mixture or alloy of two or more metals selected from the group consisting of aluminum, zirconium yttrium, and their metal salts, at about 250°

-250°

C., to form a first halide mixture comprising halides of two or more of aluminum, zirconium, and ytrrium, and optionally the carrier gas;

mixing the first halide mixture with one or more volatile oxidizing gases to form a first gaseous mixture; and

passing the first gaseous mixture over the cemented carbide substrate at a temperature of about 900°

-1250°

C. and a pressure between about 1 torr and about ambient pressure, to deposit a composite layer on the cemented carbide substrate;

wherein the one or more volatile oxidizing gases, the flow rates of the gases, the surface areas and the ratio of the suface areas of the two or more metals, and the deposition time are selected so that the composite layer comprises an adherent layer about 0.1-20 microns thick of a continuous first phase of an oxide of one of the two or more of aluminum, zirconium, and yttrium, and at least one discontinuous additional phase, dispersed as discrete particles within the first-phase layer, of oxides of the remaining of the two or more of aluminum, zirconium, and yttrium.

12. A method according to claim 11 wherein the mixture or alloy of two or more metals consists essentially of a mixture or alloy of aluminum and zirconium or a mixture or alloy of zirconium and yttrium;

the one or more volatile oxidizing gases comprise CO₂ with hydrogen as a carrier; and

the composite layer comprises a continuous Al₂ O₃ first phase having a discrete particles of ZrO₂ dispersed therein, or a continuous ZrO₂ first phase having discrete particles of Y₂ O₃ dispersed therein, or a continuous Y₂ O₃ first phase having discrete particles of ZrO₂ dispersed therein.

13. A process according to claim 11 further comprising the step of depositing between the cemented carbide substrate and the composite layer at least one intermediate layer about 0.5-10 microns thick selected from the group consisting of the carbides, nitrides, and carbonitrides of Ti, Zr, Hf, Va, Nb, Ta, Cr, Mo, W, Si, and B.

14. A process for depositing a wear resistant composite coating on a cemented carbide substrate comprising the steps of:

passing a first gaseous halide, optionally mixed with a first carriage gas, over a first metal selected from the group consisting of aluminum, zirconium, yttrium, and metal salts thereof, at 250°

-1250°

C., to form a gaseous first metal halide of aluminum, zirconium, or yttrium;

passing a second gaseous halide, which may be the same or different from the first gaseous halide, optionally mixed with a second carrier gas, which may be the same or different from the first carrier gas, over one or more additional metals selected from the group consisting of aluminum, zirconium, yttrium, and alloys and metal salts thereof, and different from the first metal, at about 250°

-1250°

C., to form one or more additional metal halides of one or more of aluminum, zirconium, and ytrrium;

passing a gaseous mixture comprising the first metal halides, the one or more additional metal halides, optionally the carrier gases, and one or more volatile oxidizing gases over the cemented carbide substrate, at a temperature of about 900°

-1250°

C. and at a pressure between about 1 torr and about ambient pressure to deposit a composite layer on the cemented carbide substrate;

wherein the one or more volatile oxidizing gases, the flow rates of the vapors, the surface areas of the first metal and the one or more additional metals, and the deposition time are selected so that the composite layer comprises an adherent layer about 0.1-20 microns thick of a continuous first phase of an oxide of one of aluminum, zirconium, and yttrium, having at least one discontinuous additional phase of discrete particles of oxide(s) of one or more or aluminum, zirconium, and yttrium dispersed therein, the additional phase oxide(s) being different from the first-phase oxide.

15. A process according to claim 14 further comprising the step of depositing between the cemented carbide substrate and the composite layer at least one intermediate layer about 0.5-10 microns thick selected from the group consisting of the carbides, nitrides, and carbonitrides of Ti, Zr, Hf, Va, Nb, Ta, Cr, Mo, W, Si, and B.

16. A process according to claim 15 wherein the first metal is aluminum, the additional metal is zirconium, the first and second halides are both Cl₂ or HCl, and the intermediate layer is TiC.

17. A process according to claim 14 wherein the step of passing the first halide over the first metal is a continuous step, producing a steady flow of the first metal halide to pass over the cemented carbide substrate;

and the step of passing the second halide over the one or more additional metals is an intermittent, pulsing step, producing pulses of the one or more additional metal halides to pass over the cemented carbide substrate with the first metal halide, wherein the second halide is pulsed at intervals and for times selected to control the size and distribution of the additional phase particles within the continuous first phase.

18. A process according to claim 14 wherein the first metal halide and the one or more volatile oxidizing gases are passed over the cemented carbide substrate for a sufficient time before the flow of the second halide is begun to deposit a single-phase, continuous portion of the composite layer separating the cemented carbide substrate and the two or more phase portion of the composite layer.

19. A process according to claim 14 wherein the step of passing the gaseous mixture over the cemented carbide substrate takes place within a reactor;

and at least one of the first metal and the one or more additional metals is disposed within a separate vessel within the reactor, the separate vessel operationally communicating with a source of the associated gaseous halide, and optionally the associated carrier gas, and with the reactor, so that the associated gaseous halide enters the separate vessel, and passes over the metal(s) therein to form the metal halide(s), which flows into the reactor to pass over the cemented carbide substrate as a component of the gaseous mixture.

20. A process according to claim 19 wherein the first metal is aluminum or a metal salt thereof;

and the one or more additional metals is zirconium or yttrium, or a metal salt thereof, or a mixture or alloy thereof, and is disposed within a separate vessel within the reactor.

21. A process according to claim 14 wherein the additional metal is aluminum, zirconium, yttrium or a metal salt thereof, and is different from the first metal;

and further comprising the step of passing a third gaseous halide, which may be the same or different from the first and second gaseous halides, optionally mixed with a third carrier gas, which may be the same or different from the first and second carrier gases, over a third metal selected from the group consisting of aluminum, zirconium, yttrium, and metal salts thereof, and different from the first and additional metals, at about 250°

-1250°

C., to form a third metal halide of aluminum, zirconium, or yttrium; and

wherein the gaseous mixture passing over the cemented carbide substrate further comprises the third metal halide, and the discontinuous additional phase further comprises discrete particles of oxides of two of aluminum, zirconium, and yttrium dispersed therein.

22. A process according to claim 21 wherein the step of passing the gaseous mixture over the cemented carbide substrate takes place within a reactor;

and at least one of the first metal, the additional metal, and the third metal is disposed within a separate vessel within the reactor, the separate vessel operationally communicating with a source of the associated gaseous halide and optionally the associated carrier gas, and with the reactor, so that the associated gaseous halide enters the separate vessel, and passes over the metal therein to form the metal halide, which flows into the reactor to pass over the cemented carbide substrate as a component of the gaseous mixture.