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Surface acoustic wave device

  • US 4,748,364 A
  • Filed: 03/20/1987
  • Issued: 05/31/1988
  • Est. Priority Date: 10/15/1984
  • Status: Expired due to Fees
First Claim
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1. A surface acoustic wave device comprising:

  • a semiconductor substrate;

    A piezoelectric film provided on said semiconductor substrate;

    an input transducer and an output transducer provided at spaced locations on said piezoelectric film, wherein a surface acoustic wave travelling through said piezoelectric film from said input transducer to said output transducer has respective portions which travel along respective paths of travel;

    a plurality of elongate metal electrodes provided on said piezoelectric film between said input transducer and said output transducer, each said metal electrode being positioned along a respective said surface acoustic wave path of travel so as to extend parallel to a direction in which surface acoustic waves travel along the path;

    bias voltage applying means for applying to each of said metal electrodes a respective bias voltage; and

    bias voltage regulating means for independently regulating said bias voltages so as to control the respective propagation losses of surface acoustic waves traveling past each said metal electrode along a respective said path of travel.

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