Method and apparatus for providing clean air
First Claim
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1. A method of providing clean air to a workpiece comprising the steps of:
- positioning said workpiece adjacent to a first opening in a conduit including a central segment and a peripheral segment having, respectively, said first opening and a second opening disposed at opposite ends of said conduit, such that said first opening is substantially coplanar with said second opening, the dimensions of said first opening being similar to that of said workpiece;
creating a laminar flow of air through said conduit in a direction away from said second opening and toward said first opening; and
filtering said air flow.
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Abstract
A method of providing clean air to a workpiece comprises positioning the workpiece adjacent to a first opening in a conduit. The conduit includes a central segment and a peripheral segment having, respectively, the first opening and a second opening disposed at opposite ends of the conduit. The peripheral segment surrounds the central segment such that the first opening is substantially coplanar with the second opening. A laminar flow of air is created through the conduit in a direction away from the second opening and toward the first opening. The air flow is filtered through a HEPA filter supported within the conduit.
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Citations
4 Claims
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1. A method of providing clean air to a workpiece comprising the steps of:
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positioning said workpiece adjacent to a first opening in a conduit including a central segment and a peripheral segment having, respectively, said first opening and a second opening disposed at opposite ends of said conduit, such that said first opening is substantially coplanar with said second opening, the dimensions of said first opening being similar to that of said workpiece; creating a laminar flow of air through said conduit in a direction away from said second opening and toward said first opening; and filtering said air flow. - View Dependent Claims (2, 3, 4)
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Specification