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Method and apparatus for providing clean air

  • US 4,749,385 A
  • Filed: 03/27/1987
  • Issued: 06/07/1988
  • Est. Priority Date: 03/27/1987
  • Status: Expired due to Term
First Claim
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1. A method of providing clean air to a workpiece comprising the steps of:

  • positioning said workpiece adjacent to a first opening in a conduit including a central segment and a peripheral segment having, respectively, said first opening and a second opening disposed at opposite ends of said conduit, such that said first opening is substantially coplanar with said second opening, the dimensions of said first opening being similar to that of said workpiece;

    creating a laminar flow of air through said conduit in a direction away from said second opening and toward said first opening; and

    filtering said air flow.

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