Temperature compensation of an accelerometer
First Claim
1. An accelerometer for measuring acceleration along a sensitive axis, comprising:
- a housing;
a proof mass;
support means for mounting the proof mass with respect to the housing; and
first and second vibrating beam force transducers connected between the proof mass and the housing such that an acceleration along the sensitive axis results in a compression force on one force transducer and a tension force on the other force transducer and such that differential thermal expansion or contraction between the force transducers and the other accelerometer components results in rotation of the proof mass about a compensation axis normal to the sensitive axis.
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Accused Products
Abstract
Prior vibrating beam accelerometers are subject to errors caused by differential thermal expansion between the vibrating beams and other accelerometer components. This problem is overcome by the present accelerometer that comprises a housing (32), a proof mass (30), a support (34,36) for mounting the proof mass with respect to the housing, and first and second force sensing elements (38,40). The force sensing elements are connected between the proof mass and the housing such that differential thermal expansion or contraction between the force sensing elements and the proof mass, support and housing results in rotation of the proof mass about a compensation axis (CA) normal to the sensitive axis (SA). The force sensing elements may extend from their respective points of connection to the proof mass in opposite directions parallel to the sensitive axis to their respective points of connection to the housing, and the force sensing elements may be connected to the proof mass at spaced apart positions on opposite sides of the compensation axis.
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Citations
12 Claims
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1. An accelerometer for measuring acceleration along a sensitive axis, comprising:
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a housing; a proof mass; support means for mounting the proof mass with respect to the housing; and first and second vibrating beam force transducers connected between the proof mass and the housing such that an acceleration along the sensitive axis results in a compression force on one force transducer and a tension force on the other force transducer and such that differential thermal expansion or contraction between the force transducers and the other accelerometer components results in rotation of the proof mass about a compensation axis normal to the sensitive axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An accelerometer for measuring acceleration along a sensitive axis, comprising:
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a housing; a proof mass; support means for mounting the proof mass with respect to the housing, the support means comprising a frame pivotally mounted to the housing for rotation about a compensation axis normal to the sensitive axis, and flexure means extending between the proof mass and the frame, the flexure means permitting rotation of the proof mass with respect to the frame about a hinge axis normal to the sensitive axis and to the compensation axis; and
,first and second force transducers connected between the proof mass and the housing such that an acceleration along the sensitive axis results in a compression force on one force transducer and a tension force on the other force transducer and such that differential thermal expansion or contraction between the force transducers and the other accelerometer components results in rotation of the proof mass about the compensation axis. - View Dependent Claims (12)
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Specification