Hybrid optical integrated circuit

• US 4,750,799 A
• Filed: 07/10/1985
• Issued: 06/14/1988
• Est. Priority Date: 08/10/1984
• Status: Expired due to Term

• Current Assignee: Nippon Telegraph and Telephone Corporation
• Original Assignee: Nippon Telegraph and Telephone Corporation
• Inventors: Yamada, Yasufumi, Terui, Hiroshi, Kobayashi, Morio, Kawachi, Masao, Yasu, Mitsuho
• Primary Examiner(s): Sikes, William L.
• Assistant Examiner(s): Ullah, Akm E.
• Application Number:
  US06/753,632
• Time in Patent Office: 1,070 Days
• Field of Search: 350/96.11, 350/96.12, 350/96.13, 350/96.15, 350/96.17, 350/96.18, 350/320
• US Class Current: 385/14
• CPC Class Codes: G02B 2006/12109 Filter
• CPC Class Codes: G02B 6/12004 Combinations of two or more optical elements
• CPC Class Codes: G02B 6/12007 forming wavelength selective elements, e.g. multiplexer, demultiplexer
• CPC Class Codes: G02B 6/28 having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
• CPC Class Codes: G02B 6/30 for use between fibre and thin-film device
• CPC Class Codes: G02B 6/4214 the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device G02B6/4246 takes precedence
• CPC Class Codes: G02B 6/423 using guiding surfaces for the alignment
• CPC Class Codes: G02B 6/4246 Bidirectionally operating package structures
• CPC Class Codes: G02B 6/43 Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections

Abstract

A hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a silicon substrate, an optical fiber and an optical device coupled optically to the optical waveguide, and an optical fiber guide and an optical device guide on the substrate for aligning the optical fiber and the optical device at predetermining positions, respectively, relative to the optical waveguide. Islands carrying electrical conductors are disposed on the substrate. A first electrical conductor film is formed on the substrate. Second electrical conductor films are formed on the top surfaces of the optical waveguide, the optical fiber guide, the optical device guide and the islands and are electrically isolated from the first electrical conductor film. An electrical conductor member is provided to feed electric power from the first and second electric conductor films to the optical device which needs the power supply. The optical waveguide, the optical fiber guide, the optical device guide and the islands are formed from the same high-silica glass optical waveguide film. Alignment of various portions is facilitated when assembling the circuit. A high coupling efficiency is realized with a low cost.

Claims

1. A hybrid optical integrated circuit comprising:

a silicon substrate;

at least one optical fiber having a core;

at least one optical device; and

a single silica-based glass film affixed to said silicon substrate, said silica-based film having at least a buffer layer and a core layer, and including

at least one planar optical waveguide having buffer and core portions forming a first part of the buffer and core layers respectively of said silica-based glass film;

at least one optical fiber guide forming a second part of said silica-based glass film for aligning said optical fiber on said substrate at a first predetermined position relative to said optical waveguide for optical coupling therebetween; and

at least one optical device guide forming a third part of said silica-based glass film for aligning said optical device on said substrate at a second predetermined position relative to said optical waveguide for optical coupling therebetween.

3. A hybrid optical integrated circuit as claimed in claim 1, wherein the thickness of the core portion of said optical waveguide is substantially equal to the diameter of the core of said optical fiber, and the thickness of the buffer portion of said optical waveguide is such that the center of the core of said optical fiber substantially coincides with the center of the core portion of said optical waveguide when said optical fiber is engaged with said optical fiber guide.

4. A hybrid optical integrated circuit as claimed in claim 1, wherein the width and thickness of the core portion of said optical waveguide are each 50±

5 μ

m, and wherein input and output optical fibers are coupled to said optical waveguide.

5. A hybrid optical integrated circuit as claimed in claim 1, wherein said optical waveguide is of the step index type, the width and thickness of the core portion of said optical waveguide are each 40 ±

3 μ

m, and wherein input and output optical fibers are coupled to said optical waveguide.

6. A hydrid optical integrated circuit as claimed in claim 1, wherein said optical waveguide is of the graded index type in the direction of the thickness thereof;

the thickness and width of the core portion of said optical waveguide are 50±

5 μ

m and 40±

3 μ

m, respectively; and

wherein input and output optical fibers are coupled to said optical waveguide.

7. A hybrid optical integrated circuit as claimed in claim 1, wherein a micro-reflecting mirror with a reflecting surface inclined at about 45°

relative to the surface of said substrate is disposed at a position adjacent to the end surface of said optical waveguide so that said optical waveguide and said optical device are optically coupled to each other through said micro-reflecting mirror.

8. A hybrid optical integrated circuit as claimed in claim 7, wherein a marker for determining the position of said optical device and for holding said optical device is disposed on said substrate around said micro-reflecting mirror, so that said optical device is mounted on said marker.

11. A hybrid optical integrated circuit as claimed in claim 1 wherein said optical waveguide has side surfaces, and wherein said side surfaces are provided with cladding.

12. A hybrid optical integrated circuit as claimed in claim 1, wherein the junction between said optical waveguide and said optical fiber and the junction between siad optical waveguide and said optical device are covered with a refractive-index-matching agent.

2. A hybrid optical integrated circuit comprising:

a silicon substrate;

at least one optical fiber having a core;

at least one optical device;

a first electrically conductive film affixed to a surface of said silicon substrate;

a single silica-based glass film affixed to said surface of said silicon substrate, said silica-based film having at least a buffer layer and a core layer, and including

at least one planar optical waveguide having buffer and portions forming a first part of the buffer and core layers respectively of said silica-based glass film;

at least one optical fiber guide forming a second part of said silica-based glass film for aligning said optical fiber on said substrate at a first predetermined position relative to said optical waveguide for optical coupling therebetween;

at least one optical device guide forming a third part of said silica-based glass film for aligning said optical device on said substrate at a second predetermined position relative to said optical waveguide for optical coupling therebetween; and

a plurality of glass island comprising a fourth part of said silica-based glass film, each of said glass islands having a first surface disposed on said silicon substrate;

second electrically conductive films each affixed to a second surface of at least one of said plurality of glass islands; and

at least one electrically conductive member connecting said optical device to at least one of said first and second electrically conductive films.

9. A hybrid optical integrated circuit comprising:

a silicon substrate;

at least one optical fiber having a core;

at least one optical device;

a single silica-based glass film affixed to said silicon substrate, said silica-based film having at least a buffer layer and a core layer, and including

at least one planar optical waveguide having buffer and core portions forming a first part of the buffer and core layers respectively of said silica-based glass film;

at least one optical fiber guide forming a second part of said silica-based glass film for aligning said optical fiber on said substrate at a first predetermined position relative to said optical waveguide for optical coupling therebetween; and

at least one optical device guide forming a third part of said silica-based glass film for aligning said optical device on said substrate at a second predetermined position relative to said optical waveguide for optical coupling therebetween;

a lens disposed at one end surface of said optical waveguide for optically coupling said optical device thereto; and

a lens guide disposed on said silicon substrate for aligning said lens at a predetermined position relative to said optical waveguide.

10. A hybrid optical integrated circuit comprising:

a silicon substrate;

at least one silica-based glass planar optical waveguide having core and buffer portions, said optical waveguide being affixed to said silicon substrate;

at least one optical fiber having a core and at least one optical device, each of said optical fiber and said optical device being coupled to said optical waveguide; and

positions, respectively, relative to said optical waveguide, at least a portion of said silicon substrate in the vicinity of said optical fiber guide having a predetermined depth, whereby when said optical fiber is inserted into said optical fiber guide, the core of said optical fiber is optically aligned with the core portion of said optical waveguide.