Fluid-cooled integrated circuit package
First Claim
1. A fluid-cooled integrated circuit package, comprising,(a) a generally planar substrate forming a portion of the package and including(i) a plurality of discrete integrated circuits thereon, and(ii) signal interconnecting means for electrical communication between at least some of the integrated circuits,(b) a heat sink generally in a parallel plane with the substrate (a), including(i) microchannel means formed in the heat sink structure and adapted for fluid flow therethrough in juxtaposition with each of the integrated circuits (a)(i), and(ii) manifold means for delivery of a cooling fluid to and from the microchannel means (b)(i),(c) means for distributing power to the integrated circuits (a)(i), and(d) means for enclosing the substrate (a), heat sink (b) and power distribution means (c) to form a unitary package, wherein the substrate (a) is a wafer of material selected from the group consisting of silicon, ceramic and metal, and the signal interconnecting means (a)(ii) comprises alternating layers of patterned electrically conductive metal and insulator on the inner surface of the substrate wafer.
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Accused Products
Abstract
A package for enclosing, protecting and cooling semiconductor integrated circuit chips. The package includes a generally planar substrate with the chips positioned thereon. Signal connections are provided between at least some of the chips. A heat sink is positioned in contact with the chips and includes microchannels through which a cooling fluid flows for purposes of transferring heat generated by the chips to such fluid. Manifolds are provided to direct the fluid to and from the microchannels, and microcapillary slots may be formed on the heat sink surface adjacent the chips to receive liquid to generate attractive forces between the heat sink and chips to facilitate heat transfer. Circuitry is provided to distribute power through the package and to the chips.
223 Citations
15 Claims
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1. A fluid-cooled integrated circuit package, comprising,
(a) a generally planar substrate forming a portion of the package and including (i) a plurality of discrete integrated circuits thereon, and (ii) signal interconnecting means for electrical communication between at least some of the integrated circuits, (b) a heat sink generally in a parallel plane with the substrate (a), including (i) microchannel means formed in the heat sink structure and adapted for fluid flow therethrough in juxtaposition with each of the integrated circuits (a)(i), and (ii) manifold means for delivery of a cooling fluid to and from the microchannel means (b)(i), (c) means for distributing power to the integrated circuits (a)(i), and (d) means for enclosing the substrate (a), heat sink (b) and power distribution means (c) to form a unitary package, wherein the substrate (a) is a wafer of material selected from the group consisting of silicon, ceramic and metal, and the signal interconnecting means (a)(ii) comprises alternating layers of patterned electrically conductive metal and insulator on the inner surface of the substrate wafer.
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4. A fluid-cooled protective package for integrated circuits, comprising
(a) a generally planar substrate forming a portion of the package and including, (i) a plurality of discrete integrated circuits arranged geometrically about the substrate, each such integrated circuit having a plurality of electrical leads radiating from the integrated circuit, (ii) signal interconnecting means carried on the substrate for electrical communication between at least some of the integrated circuits in coaction with the electrical leads, (b) a heat sink formed of a plurality of parallel layers of material selected from the group consisting of silicon, ceramic and metal and generally oriented in a parallel plane with the substrate (a), including (i) a first layer having microchannels formed therein for fluid flow therethrough, the microchannels being in juxtaposition with the integrated circuits so as to conduct heat away from the integrated circuits, (ii) at least a second layer having manifolds formed therein for delivery of a cooling fluid to and from each of the microchannels of the first layer, and (iii) a third layer forming a cover for the manifolds of the second layer, (c) means for distributing power to the integrated circuits, including, (i) a plurality of metal stud members extending through the heat sink layers (b), (ii) a plurality of metal buss strips connecting two or more of the metal stud members, (iii) a plurality of capacitors, and (iv) power redistribution decal means for electrically connecting with the metal stud members, the capacitors and the integrated circuits, and (d) means for enclosing the substrate (a), the heat sink (b) and the power distributing means (c) to form a unitary package.
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15. A fluid-cooled integrated circuit package, comprising,
(a) a generally planar substrate forming a portion of the package and including (i) a plurality of discrete integrated circuits thereon, and (ii) signal interconnecting means for electrical communication between at least some of the integrated circuits, (b) a heat sink generally in a parallel plane with the substrate (a), including (i) microchannel means formed in the heat sink structure and adapted for fluid flow therethrough in juxtaposition with each of the integrated circuits (a)(i), and (ii) manifold means for delivery of a cooling fluid to and from the microchannel means (b)(i), (c) means for distributing power to the integrated circuits (a)(i), and (d) means for enclosing the substrate (a), heat sink (b) and power distribution means (c) to form a unitary package, wherein the means (c) for distributing power to the integrated circuits (a)(i) comprises, (i) a plurality of stud members in parallel alignment with one another and extending through the heat sink, (ii) a plurality of metal buss strips interconnecting two or more of the stud members (i), (iii) a plurality of capacitors, (iv) power redistribution decal means for electrically connecting with the stud members (i), the capacitors (ii) and the integrated circuits.
Specification