Mass spectrometer

• US 4,760,253 A
• Filed: 01/29/1987
• Issued: 07/26/1988
• Est. Priority Date: 01/31/1986
• Status: Expired due to Term

• Current Assignee: Thermo Electron Corporation (Thermo Fisher Scientific Incorporated)
• Original Assignee: VG Instruments Group Limited
• Inventors: Hutton, Robert C.
• Primary Examiner(s): Anderson, Bruce C.
• Assistant Examiner(s): Berman, Jack I.
• Application Number:
  US07/008,468
• Time in Patent Office: 544 Days
• Field of Search: 250/281, 250/288, 250/282, 250/423 R
• US Class Current: 250/288
• CPC Class Codes: H01J 49/067 Ion lenses, apertures, skimmers
• CPC Class Codes: H01J 49/105 using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
• CPC Class Codes: H05H 1/30 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/28 takes precedence

Abstract

The invention provides a mass spectrometer adapted for the elemental analysis of a sample in which ions are formed from the sample in an inductively coupled plasma (ICP). The flame of the plasma (14) is directed against the front surface (30) of a cone (19), and ions are sampled from the plasma through a hole (16) in the apex of the cone. In order to reduce the intensity of the background mass spectra, the rear surface (32) of the inside of the cone is polished to a surface finish of 5 microns or better, at least in the vicinity of the hole.

Claims

1. In a mass spctrometer comprising:

(a) means for generating a high-temperature plasma in a flow of carrier gas by means of an inductively-coupled radio-frequency electrical generator;

(b) means for introducing a sample into said plasma;

(c) a sampling member having a front surface adjacent said plasma, a rear surface, and a hole connecting said front and rear surfaces through which ions formed in said plasma can pass;

(d) a chamber having a wall comprising said rear surface;

(e) means for maintaining the pressure in said chamber substantially below atmospheric pressure; and

(f) means for causing at least some of the ions entering said chamber through said hole to enter a mass analyzer;

the improvement comprising the provision by polishing of a smooth area with a surface finish of 5 microns or less on said rear surface at least in the vicinity of said hole.

2. A mass spectrometer according to claim 1 in which:

(a) said sampling member comprises a hollow cone and said hole is disposed in the apex of said cone; and

(b) said sampling member is disposed with said apex protruding into said plasma.

3. A mass spectrometer according to claim 1 in which said smooth area extends from said hole at least as far as a region in and beyond which substantially no ions formed enter said mass analyser.

4. A mass spectrometer according to claim 2 in which said smooth area extends from said hole at least as far as a region in and beyond which substantially no ions formed enter said mass analyser.

5. A method of reducing the intensity of at least part of the background spectrum observed on a mass spectrometer in which samples are ionized by means of an inductively-coupled plasma discharge in a carrier gas, and in which ions are sampled from said plasma through a hole in a sampling member, said sampling member having a front surface adjacent said plasma and a rear surface which forms part of the wall of an evacuated chamber containing means for causing the ions sampled through said hole to enter a mass analyzer, said method comprising polishing said rear surface at least adjacent to said hole until the surface finish on said rear surface is 5 microns or less.

6. A method according to claim 9 in which said polishing extends from said hole at least as far as a region in and beyond which substantially no ions formed enter said mass analyser.