Remote passive temperature sensor

• US 4,762,426 A
• Filed: 12/19/1986
• Issued: 08/09/1988
• Est. Priority Date: 12/19/1986
• Status: Expired due to Fees

• Current Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Original Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Inventors: Foss, Norman A.
• Primary Examiner(s): Cuchlinski, Jr., William A.
• Assistant Examiner(s): WORTH, WILLIE M
• Application Number:
  US06/943,418
• Time in Patent Office: 599 Days
• Field of Search: 374/18, 374/19, 374/130, 374/131, 374/205, 350/102, 350/103, 350/359, 350/360, 350/487, 340/584, 340/594, 340/600, 340/602, 250/231 R, 250/338 R, 250/353, 73/29, 73/73, 73/335-337, 357/55, 356/43
• US Class Current: 374/130
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01D 5/28 with deflection of beams of light, e.g. for direct optical indication G01D5/40 takes precedence; mechanical adjustment G01D5/264
• CPC Class Codes: G01D 5/32 with attenuation or whole or partial obturation of beams of light G01D5/40 takes precedence ; mechanical adjustment G01D5/264
• CPC Class Codes: G01K 11/12 using changes in colour, translucency or reflectance
• CPC Class Codes: G01K 5/72 with electric transmission means for final indication
• CPC Class Codes: G01N 21/81 Indicating humidity

Abstract

A remote passive condition sensor apparatus such as a temperature or humidity sensor apparatus. A corner cube reflector at a remote location, where it is not feasible to have electrical connections or batteries, receives and reflects back radiant energy to an optical readout instrument. Condition responsive elements in the corner reflector affect the amount of reflected radiant energy as a function of the condition sensed.

Claims

1. A non-electrical, optically read condition sensor apparatus for determining the condition at a remote location by transmitting a radiant energy beam to the remote location and measuring a reflected return beam, the apparatus comprising in combination:

a local ground instrument comprising;

means for generating an interrogation beam of radiant energy;

means directing said interrogation beam to a remotely located corner-cube sensor; and

,

return radiation sensing means for sensing the intensity of the reflected returned beam;

a passive, unpowered, remotely located corner cube sensor means comprising;

a reflective corner cube having a plurality of adjoining reflective faces at right angles to each other;

a condition sensing area on one of said reflective corner cube faces, said sensing area including condition responsive bi-level film cantilever member means forming a part of said condition sensing area, said bi-level film cantilever member means consisting of two different materials which have different expansion coefficients whereupon as the condition changes the bi-level film cantilever member means bends to a degree dependent on the amount of change of the condition sensed and thus deflects more or less of the return radiation away from the local ground instrument.

7. The condition sensor apparatus according to claim 1 in which the condition responsive bi-level film cantilever member means are responsive to humidity.

10. The condition sensor apparatus according to claim 7 in which said bi-level film cantilever member means has one material consisting of a layer of silicon nitride and the other material consisting of a layer of polyimide.

2. A non-electrical, optically read condition sensor apparatus for determining the condition at a remote location, the apparatus comprising in combination:

a local ground instrument comprising;

means for generating an interrogation beam of radiant energy having a component λ

₁ and a component λ

₂ ;

means directing said interrogation beam to a remotely located corner-cube sensor; and

,

return radiation sensing means for sensing the intensity of returned λ

₁ and λ

₂ components;

a passive, unpowered, remotely located corner cube sensor means comprising;

a reflective corner cube having three adjoining faces at right angles to each other;

a reference area on one of said corner cube faces;

λ

₂ filter means associated with said reference area of said corner cube for returning said λ

₂ component to said local ground instrument without modification;

a condition sensing area on said one of said reflective corner cube faces;

λ

₁ filter means associated with said condition sensing area, said sensing area including condition responsive bi-level film cantilever member means forming a part of said one of said reflective corner cube faces, said bi-level film consisting of two different materials which have different expansion coefficients whereupon as said condition changes, the bi-level film cantilever member means bends to a degree dependent on said condition, and thus deflects more or less of the λ

₁ return radiation.

3. A non-electrical, optically read temperature sensor apparatus for determining the temperature at a remote location, the apparatus comprising in combination:

a local ground instrument comprising;

means for generating an interrogation beam of radiant energy having a component λ

₁ and a component λ

₂ ;

means directing said interrogation beam to a remotely located corner-cube sensor; and

,

return radiation sensing means for sensing the intensity of returned λ

₁ and λ

₂ components;

a passive, unpowered, remotely located corner cube sensor means comprising;

a reflective corner cube having three adjoining faces at right angles to each other;

a reference area on one face of said corner cube;

λ

₂ filter means associated with said reference area of said corner cube for returning said λ

₂ component to said local ground instrument without modification;

a temperature sensing area of said reflective corner cube, said sensing area including temperature responsive bi-level film cantilever member means forming a part of said one face, said bi-level film consisting of two different materials which have different thermal expansion coefficients whereupon as temperature changes the bi-level film cantilever member means bends to a degree dependent on absolute temperature and thus deflects more or less of the return radiation.

8. The sensor apparatus according to claim 3 in which the temperature sensing area of said reflective corner cube includes λ

₁ filter means associated therewith for passing and returning said λ

₁ component to said local ground instrument.

9. The sensor apparatus according to claim 3 in which said bi-level film consists of a first layer of silicon nitride and a second layer selected from a group consisting of aluminum and platinum.

4. A passive condition responsive corner cube reflector means comprising:

a reflective corner cube having a plurality of adjoining reflective faces at right angles to each other,

at least one of said reflective faces comprising;

a wafer of single crystalline silicon having a planar surface coated with a thin film layer of reflective silicon nitride;

a plurality of silicon-nitride cantilever member means formed in said silicon nitride layer, said cantilever member means having etched cavities in the silicon beneath them, said silicon nitride having a first expansion coefficient;

a layer of material of a different expansion coefficient coated on said cantilever member means so that at a first sensed condition said coated cantilever member means are in the plane of said thin film layer of reflective silicon nitride and at a second sensed condition said coated cantilever member means are warped out of said plane by an amount which is a function of said second sensed condition.

5. The corner cube reflector means according to claim 4 in which said first and second sensed condition are temperature.

6. The corner cube reflector means according to claim 4 in which said first and second sensed condition are humidity.

11. The corner cube reflector means according to claim 5 in which the layer of material of said different expansion coefficient is selected from a group consisting of aluminum and platinum.

12. The corner cube reflector means according to claim 6 in which the layer of material of said different expansion coefficient consists of a layer of polyimide.