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Method for producing transparent protective coatings from silicon compounds

  • US 4,762,730 A
  • Filed: 09/03/1986
  • Issued: 08/09/1988
  • Est. Priority Date: 07/19/1986
  • Status: Expired due to Fees
First Claim
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1. A method for producing a transparent protective coating on a surface of a plastic optical substrate in a reaction chamber having at least two electrodes of opposed polarity, one of the electrodes functioning as a cathode, the method comprising the following steps:

  • (a) positioning the substrate on the cathode in the reaction chamber;

    (b) introducing a noble gas into the reaction chamber;

    (c) exposing the surface of the plastic optical substrate to ion bombardment in the noble gas plasma, the ion bombardment being produced between the electrodes by a bias voltage formed at the cathode by a radiofrequency means;

    (d) introducing a monomeric organic compound into the reaction chamber comprising a member of the group of siloxane and silazane, the organic compound being polymerized by the plasma to coat the surface of the plastic optical substrates;

    (e) setting the bias voltage at the cathode at a value in the range of -80 to -500 volts; and

    (f) introducing oxygen into the reaction chamber during polymerization of the monomeric organic compound, the oxygen having a partial pressure of at least five times the partial pressure of the monomeric organic compound to form a mixture with the compound.

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