Cryopump and method of starting the cryopump

• US 4,763,483 A
• Filed: 07/17/1986
• Issued: 08/16/1988
• Est. Priority Date: 07/17/1986
• Status: Expired due to Term

• Current Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Original Assignee: Helix Technology Corporation (Azenta, Inc.)
• Inventors: Olsen, Donald A.
• Primary Examiner(s): Capossela, Ronald C.
• Application Number:
  US06/887,369
• Time in Patent Office: 761 Days
• Field of Search: 62/55.5, 62/100, 62/268, 62/383, 417/901, 55/269, 248/636, 248/638
• US Class Current: 62/55.5
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps
• CPC Class Codes: Y10S 417/901 Cryogenic pumps

Abstract

The refrigerator of a cryopump is positioned within an insulating vacuum and the two stages of the refrigerator are selectively thermally coupled to first and second stage cryopanels. After initial rough pumping by an air ejector, rough pumping is completed during startup by coupling the cold first stage of the refrigerator to a first stage adsorption cryopanel. The second stage of the refrigerator is thereafter coupled to the second stage cryopanel. Thermal coupling of the refrigerator to the cryopanels is by means of spring biased thermal contacts brought into position by movement of the refrigerator. The thermal contact elements are provided with sufficiently large thermal masses to handle the large thermal loads of system startup.

Claims

1. A method of starting a cryopump comprising:

providing a first stage cryopanel and a second stage cryopanel in a pumping volume, providing a close cycle refrigerator having a first stage and a second, colder stage in an insulating volume, and thermally isolating the refrigerator from the cryopanels and from the pumping volume by means of a vacuum in the insulating volume;

operating the refrigerator to cool it to cryopumping temperatures;

thereafter providing a thermal coupling between the refrigerator first stage and the first stage cryopanel to cool the first stage cryopanel and thereby condense gases thereon from the pumping volume; and

thereafter providing a thermal coupling between the refrigerator second stage and the second stage cryopanel to cool the second stage cryopanel and thereby condense additional gases thereon from the pumping volume.

2. A method of as claimed in claim 1 further comprising reducing the pumping volume to a vacuum pressure by means of an air ejector prior to providing the thermal coupling between the refrigerator first stage and the first stage cryopanel.

3. A method as claimed in claim 1 further comprising providing a relatively large thermal mass cooled by the refrigerator first stage prior to thermal coupling with the first stage cryopanel and providing a first stage cryopanel of relatively low thermal mass.

4. A method as claimed in claim 1 wherein the first stage cryopanel comprises an adsorbent.

5. A method as claimed in claim 1 further comprising providing a radiation shield about the second stage cryopanel and cooling the radiation shield by means of the first stage of the refrigerator by means of a thermal choke between the first stage cryopanel and the radiation shield.

6. A method as claimed in claim 1 wherein the thermal coupling between the refrigerator and the cryopanels is by means of the step of moving the refrigerator within the insulating volume.

7. A method as claimed in claim 6 further comprising spring loading a thermal mass cooled by the first stage of the refrigerator toward a heat station in communication with the first stage cryopanel.

8. A method as claimed in claim 7 further comprising spring loading an element cooled by the refrigerator second stage toward a second stage cryopanel heat station.

9. A cryopump comprising:

a first stage cryopanel and second stage cryopanel in a pumping volume;

a refrigerator having a first stage and a second, colder stage in an insulating volume, the insulating volume having a vacuum therein to thermally isolate the refrigerator from the first and second stage cryopanels and from the pumping volume; and

means for first thermally coupling the refrigerator first stage to the first stage cryopanel and thereafter coupling the refrigerator second stage to the second stage cryopanel.

10. A cryopump as claimed in claim 9 further comprising an air ejector for rough pumping the pumping volume.

11. A cryopump as claimed in claim 10 further comprising a large thermal mass cooled by the first stage of the refrigerator when the first stage of the refrigerator is isolated from the first stage cryopanel, the first stage cryopanel being of relatively low thermal mass.

12. A cryopump as claimed in claim 11 further comprising adsorbent material on the first stage cryopanel.

13. A cryopump as claimed in claim 11 further comprising a radiation shield surrounding the second stage cryopanel and a thermal choke between the first stage cryopanel and the radiation shield.

14. A cryopump as claimed in claim 9 further comprising a large thermal mass cooled by the first stage of the refrigerator when the first stage of the refrigerator is isolated from the first stage cryopanel, the first stage cryopanel being of relatively low thermal mass.

15. A cryopump as claimed in claim 14 further comprising adsorbent material on the first stage cryopanel.

16. A cryopump as claimed in claim 14 further comprising a radiation shield surrounding the second stage cryopanel and a thermal choke between the first stage cryopanel and the radiation shield.

17. A cryopump as claimed in claim 9 further comprising adsorbent material on the first stage cryopanel.

18. A cryopump as claimed in claim 9 further comprising a radiation shield surrounding the second stage cryopanel and a thermal choke between the first stage cryopanel and the radiation shield.

19. A cryopump as claimed in claim 9 wherein the means for thermally coupling the refrigerator comprises means for moving the refrigerator within the insulating volume.

20. A cryopump as claimed in claim 19 wherein a thermal contact element is spring biased relative to the first stage of the refrigerator.

21. A cryopump as claimed in claim 20 wherein the thermal contact element is of a relatively large thermal mass.

22. A cryopump as claimed in claim 21 further comprising a flexible thermal conductor coupling the thermal contact element with the second stage of the refrigerator.

23. A cryopump as claimed in claim 21 further comprising a thermal contact element spring biased relative to the second stage of the refrigerator.

24. A cryopump as claimed in claim 23 further comprising a flexible thermal conductor coupling the second stage thermal contact element with the second stage of the refrigerator.

25. A cryopump as claimed in claim 19 further comprising a bellows between the cryogenic refrigerator and the vacuum vessel forming the pumping volume, the bellows enclosing a portion of the insulating volume.

26. A cryopump comprising:

a first stage cryopanel and second stage cryopanel in a pumping volume;

a refrigerator having a first stage and a second, colder stage in an insulating volume, the insulating volume having a vacuum therein to thermally isolate the refrigerator from the first and second stage cryopanels and from the pumping volume; and

means for moving the refrigerator relative to the first and second stage cryopanels to bring the refrigerator within the insulating volume into and out of thermal contact with the cryopanels.

27. A cryopump comprising a first stage adsorption cryopanel and a second stage cryopanel in a pumping volume;

an ejector for rough pumping the pumping volume;

a refrigerator having a first stage and a second, colder stage in an insulating volume, the insulating volume having a vacuum therein to thermally isolate the refrigerator from the first and second stage cryopanels and from the pumping volume;

a high thermal mass contact element in thermal contact with and spring biased relative to the first stage of the refrigerator; and

means for moving the refrigerator within the vacuum vessel such that the first and second stages of the refrigerator can be moved into thermal contact with the first and second stage cryopanels with the first stage being coupled prior to the second stag being coupled.