Chemical-sensitive semiconductor device
First Claim
1. A chemical-sensitive semiconductor device comprising a substrate of a semiconductor material, a passageway interconnecting major surfaces of the substrate along which a sample under test may pass and a chemical-sensitive gate region formed on a wall of the passageway and wherein said passageway is tapered.
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Abstract
A chemical-sensitive semiconductor device in the form of a chemical-sensitive field effect transistor, suitable for testing relatively small volumes of a fluid analyte, comprises a substrate provided with a passageway, interconnecting its major surfaces, along which the analyte can pass. Drain and source regions are formed at opposite ends of the passageway and a chemical-sensitive gate region is formed on the sides of the passageway.
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Citations
12 Claims
- 1. A chemical-sensitive semiconductor device comprising a substrate of a semiconductor material, a passageway interconnecting major surfaces of the substrate along which a sample under test may pass and a chemical-sensitive gate region formed on a wall of the passageway and wherein said passageway is tapered.
Specification