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Chemical-sensitive semiconductor device

  • US 4,764,797 A
  • Filed: 07/08/1986
  • Issued: 08/16/1988
  • Est. Priority Date: 09/14/1985
  • Status: Expired due to Fees
First Claim
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1. A chemical-sensitive semiconductor device comprising a substrate of a semiconductor material, a passageway interconnecting major surfaces of the substrate along which a sample under test may pass and a chemical-sensitive gate region formed on a wall of the passageway and wherein said passageway is tapered.

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