Accelerometer with isolator for common mode inputs
First Claim
1. An accelerometer for measuring acceleration along a sensitive axis, the accelerometer comprising:
- a support;
a proof mass;
mounting means for mounting the proof mass to the support such that the proof mass can rotate about a hinge axis perpendicular to the sensitive axis;
an isolator;
isolator suspension means for mounting the isolator to the support, the isolation suspension means being relatively compliant for isolator movement parallel to a transducer axis normal to the hinge axis and relatively noncompliant for isolator rotation about the hinge axis; and
two force transducers connected between the isolator and the proof mass, the force transducers being parallel to the transducer axis, and positioned on opposite sides of the hinge axis from one another such that rotation of the proof mass about the hinge axis puts one force transducer in tension and the other force transducer in compression.
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Accused Products
Abstract
An accelerometer comprising a support (52) and a proof mass (40) mounted to the support by a flexure (50) or the like, such that the proof mass can rotate about a hinge axis (HA) perpendicular to sensitive axis (SA). An isolator (42) is also mounted to the support by an isolator suspension system (60, 62) that is relatively compliant for isolator movement parallel to a transducer axis (TA) normal to the hinge axis, and relatively noncompliant for isolator rotation about the hinge axis. Force transducers (80, 82) are connected between the isolator and the proof mass. The force transducers are parallel to the transducer axis, and positioned on opposite sides of the hinge axis from one another, such that rotation of the proof mass about the hinge axis puts one force transducer in tension and the other force transducer in compression. The isolator suspension system reduces the magnitude of common mode inputs, such as those caused by differential thermal expansion of the crystals with respect to other accelerometer components.
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Citations
14 Claims
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1. An accelerometer for measuring acceleration along a sensitive axis, the accelerometer comprising:
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a support; a proof mass; mounting means for mounting the proof mass to the support such that the proof mass can rotate about a hinge axis perpendicular to the sensitive axis; an isolator; isolator suspension means for mounting the isolator to the support, the isolation suspension means being relatively compliant for isolator movement parallel to a transducer axis normal to the hinge axis and relatively noncompliant for isolator rotation about the hinge axis; and two force transducers connected between the isolator and the proof mass, the force transducers being parallel to the transducer axis, and positioned on opposite sides of the hinge axis from one another such that rotation of the proof mass about the hinge axis puts one force transducer in tension and the other force transducer in compression. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An accelerometer for measuring acceleration along a sensitive axis, the accelerometer comprising:
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an upper plate member; a lower plate member; a proof mass assembly sandwiched between the upper and lower plates, the proof mass assembly including a support connected to the upper and lower plates, a proof mass, mounting means for mounting the proof mass to the support such that the proof mass can rotate about a hinge axis perpendicular to the sensitive axis, an isolator, and isolator suspension means for mounting the isolator to the support, the isolator suspension means being relatively compliant for isolator movement parallel to a transducer axis normal to the hinge axis, and relatively noncompliant for isolator rotation about the hinge axis; and two force transducers connected between the isolator and the proof mass, the force transducers being parallel to the transducer axis and positioned on opposite sides of the hinge axis from one another, such that rotation of the proof mass about the hinge axis puts one force transducer in tension and the other force transducer in compression. - View Dependent Claims (11, 12, 13, 14)
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Specification