Lens characterization apparatus and method

• US 4,767,215 A
• Filed: 06/09/1986
• Issued: 08/30/1988
• Est. Priority Date: 06/09/1986
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Ateoq Corporation
• Inventors: Borodovsky, Yan
• Primary Examiner(s): Rosenberger, R. A.
• Assistant Examiner(s): Cooper, Crystal
• Application Number:
  US06/871,810
• Time in Patent Office: 813 Days
• Field of Search: 356/124-125, 250/231 SE, 250/237 G, 250/211 K
• US Class Current: 356/124
• CPC Class Codes: G01M 11/0264 by using targets or reference patterns
• CPC Class Codes: G03F 7/706 Aberration measurement

Abstract

A beam of light, such as a laser, is used to scan across a lens. The beam passing through the lens is modulated by an optical encoder which controls the amount of the beam passing through the encoder to a light receptor. The received light is quantified and processed to determine any distortion caused by the lens. The encoder is comprised of a set of transparent windows upon an opaque face, the windows having a certain pattern that a beam travelling across the windows casts a specific light intensity pattern. The encoder also allows determination of astigmatism of the lens and distortion inherent in the beam itself.

Claims

1. An apparatus to characterize a performance of an optical lens comprising:

a beam of scanned light which scans across said lens;

a light sensor for receiving said beam after said beam passes through said lens, said sensor generating a signal which is proportional to an amount of said beam striking said sensor;

an encoder positioned between said lens and said sensor to encode said light passing through to said sensor, said beam travelling across a window having a transparent opening disposed on an opaque face of said encoder, said opening having a plurality of sawtooth shaped openings such that said amount of said beam penetrating through said opening to said sensor as said beam scans across said lens is made to vary due to said sawtooth shaped openings, said encoding provided by said beam transitioning between opaque and transparent regions of said face;

a means coupled to said sensor for determining a rate of change of said signal in respect to a scanning time of said beam travelling across said sawtooth shaped opening;

whereby distortion caused by said lens is determined.

2. The apparatus as defined in claim 1, wherein rising edges of said sawtooth openings further include a plurality of ramped steps, such that more of said beam penetrates to said sensor at each subsequent step as said beam scans across said sawtooth opening.

3. The apparatus as defined in claims 1 or 2, wherein said face of said encoder further includes a second window having a plurality of transparent openings located therein, said second window used to align said encoder in position in respect to said beam.

4. The apparatus as defined in claim 3, wherein a laser is used as a source of said beam.

5. The apparatus as defined in claim 4, wherein said scanning is performed by reflecting said laser from a rotating mirror.

6. The apparatus as defined in claim 5, wherein said beam is used to scan across a lens assembly having a plurality of lenses.

7. The apparatus as defined in claim 3, wherein said determining means is comprised of a processor to quantify said amount of light passing to said sensor.

8. An apparatus for characterizing the performance of an optical lens comprising:

a beam of scanning light which scans across said lens;

a light sensor for receiving said beam after said beam passes through said lens, said sensor generating a signal which is proportional to an intensity of said beam striking said sensor;

an encoder positioned between said lens and said sensor to modulate an amount of said light passing through to said sensor,

(a) a face of said encoder being perpendicular to said beam;

(b) said face being opaque and preventing penetration of said beam;

(c) said face including a window having sawtooth shaped openings therein, wherein said openings permit encoding of said beam by controlling said light penetrating to said sensor;

(d) said scanning causing said beam to travel across said window, such that more of said beam penetrates through to said sensor as said beam scans across each tooth of said sawtooth opening;

a processor coupled to said light sensor to determine a rate of change of said signal in respect to time, such that said rate of change at a trailing edge of each of said sawtooth opening having a Gaussian distribution of uniformly spaced peaks if no distortion is present;

whereby said distortion caused by said lens is determined.

9. The apparatus as defined in claim 8, wherein a rising edge of each of said sawtooth openings having a plurality of ramped steps, such that more of said beam penetrates to said sensor at each subsequent step as said beam scans along said opening.

10. The apparatus as defined in claim 9, wherein said processor deconvolutes said signal at each ramped step and determines distortion caused by said beam.

11. The apparatus as defined in claim 10, wherein said processor determines astigmatism of said lens.

12. The apparatus as defined in claim 10, further including a second window having a plurality of transparent openings located therein, said second window used to align said encoder in position with respect to said beam.

13. The apparatus as defined in claim 12, wherein said second window openings are arranged in a row and separated by portions of said opaque face, said opaque portions causing a dip of said light reception when said beam scans across said second window openings, said dips being uniform when said encoder is properly aligned to said beam.

14. The apparatus as defined in claim 13, wherein a laser is used as a source of said beam and said scanning is performed by reflecting said laser from a rotating mirror.

15. The apparatus as defined in claims 8 or 14, wherein said processor further includes a digitizer and a storage device coupled to said processor.

16. The apparatus as defined in claim 10, wherein each of said sawtooth openings having 30 steps, each said step having a height of 0.1 microns and a length of 3 microns.

17. A method to characterize a performance of an optical lens, said method comprising the steps of:

scanning a beam of light across a face of said lens;

encoding said beam of light after passing through said lens, said encoding provided by a transparent window having a plurality of sawtoothed shaped openings upon an opaque face, wherein said scanning causes said beam to travel across said window such that an amount of said beam penetrating through said window as said beam scans across said lens is dependent on said sawtoothed shaped openings;

receiving of said beam passing through said window by using a light sensor, wherein said light sensor generates a signal proportional to an amount of encoded light received;

quantifying said signal to determine a rate of change of said signal in respect to a scanning time of said beam travelling across said sawtooth shaped openings such that said quantified result is compared to an expected undistorted result;

whereby a distortion caused by said lens is determined.

18. The method as defined in claim 17, wherein said scanned beam travels alternately across said opaque face and said transparent window, said quantifying step further comprising the step of determining a rate of change of said signal in respect to time at such crossovers, and said rate of change having a Gussian distribution of uniformly spaced peaks if no said distortion is present.

19. The method as defined in claim 18, wherein a trailing edge of each of said sawtooth shaped opening is used as each of said cross-overs.

20. The method as defined in claim 19, wherein a rising edge of each said sawtooth opening includes a plurality of ramped steps, such that as said beam travels across said ramped steps a predetermined portion of said beam is exposed to said sensor at each said step when said beam is not distorted.

21. The method as defined in claim 20, wherein said quantifying step further includes a deconvoluting step of said signal.

22. The method as defined in claim 21, wherein astigmatism of said lens is measured.

23. The method as defined in claim 17, wherein said scanned beam travels alternately across said opaque face and a second window having a plurality of transparent openings separated by opaque areas, said quantifying step further comprising the step of determining a signal dip at opaque portions as said beam travels across said second window, said dips being uniform when said beam is aligned with said second window.

24. The method as defined in claim 23, wherein said second window is comprised of a row of transparent rectangular openings.