Electrostatic capacitive pressure sensor

• US 4,769,738 A
• Filed: 12/01/1987
• Issued: 09/06/1988
• Est. Priority Date: 12/12/1986
• Status: Expired due to Fees

• Current Assignee: Fuji Electric Company Limited 1-1 Tanabeshinden Kawasaki-Ku Kawasaki-Shi Kanagawa Japan
• Original Assignee: Fuji Electric Company Limited (Fuji Electric Systems Company Limited)
• Inventors: Takano, Toshiyuki, Nakamura, Kimihiro
• Primary Examiner(s): GRIFFIN, DONALD
• Application Number:
  US07/127,262
• Time in Patent Office: 280 Days
• Field of Search: 73/718, 73/724, 361/283
• US Class Current: 361/283.1
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm

Abstract

An electrostatic capacitive pressure sensor having two silicon diaphragms electrostatically bonded to opposite faces of an insulating member to form two measuring chambers. A silicon base is coupled to the first diaphragm to form a pressure chamber. The insulating member is provided with a through-hole electrode. The electrode and the two silicon diaphragms are operative to measure pressure in the pressure chamber by measuring changes in capacity in the measuring chambers.

Claims

1. An electrostatic capacitive pressure sensor, comprising:

a silicon base member having a pressure introducing port;

a first silicon diaphragm having a central portion and an outer peripheral portion, the central portion having a thickness less than the thickness of the outer peripheral portion, said first diaphragm being coupled at said outer peripheral portion to said base member to form a chamber in communication with said pressure port;

an insulating member having an electrode disposed thereon, said insulating member having a first and second face, said first face of said insulating member coupled to said first diaphragm at one side of the peripheral portion to form a first measuring chamber therebetween;

a second silicon diaphragm substantially identical to said first diaphragm, said second diaphragm coupled at one side of said outer peripheral portion to said second face of said insulating member to form a second measuring chamber therebetween; and

conducting means connected to said first and second diaphragms and said electrode for detecting the capacitance in said first and second measuring chambers for measuring pressure applied through said pressure introducing port.

2. An electrostatic capacitive pressure sensor as recited in claim 1, wherein the first and second diaphragms are electrostatically bonded to the first and second faces, respectively, of said insulating member.

3. An electrostatic capacitive pressure sensor as recited in claim 1, wherein the surface area of the electrode disposed within the first measuring chamber is equal to the surface area of the electrode disposed within the second measuring chamber.

4. An electrostatic capacitive pressure sensor as recited in claim 1, further comprising a second silicon base member coupled to the second diaphragm at the outer peripheral portion thereof.